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When tantalum pentoxide film that is deposited on silicon wafer is subjected to a heat treatment in an oxygen atmosphere to improve crystallinity, refractive index is measured by an ellipsometer to appraise change in the crystallinity or change in the relative dielectric constant of the dielectric f

When tantalum pentoxide film that is deposited on silicon wafer is subjected to a heat treatment in an oxygen atmosphere to improve crystallinity, refractive index is measured by an ellipsometer to appraise change in the crystallinity or change in the relative dielectric constant of the dielectric film and judge the adequacy of the heat treatment temperature. In particular, when the dielectric film is a structure that includes tantalum pentoxide film in which crystallinity is changed by heat treatment and silicon oxide film in which film thickness is changed by heat treatment, the temperature of the heat treatment can be accurately appraised by taking advantage of the correlation between the temperatures of the heat treatment and the refractive indices of the laminated films, this correlation having a curve with a maximum point and a minimum point.

대표청구항 ▼

When tantalum pentoxide film that is deposited on silicon wafer is subjected to a heat treatment in an oxygen atmosphere to improve crystallinity, refractive index is measured by an ellipsometer to appraise change in the crystallinity or change in the relative dielectric constant of the dielectric f

When tantalum pentoxide film that is deposited on silicon wafer is subjected to a heat treatment in an oxygen atmosphere to improve crystallinity, refractive index is measured by an ellipsometer to appraise change in the crystallinity or change in the relative dielectric constant of the dielectric film and judge the adequacy of the heat treatment temperature. In particular, when the dielectric film is a structure that includes tantalum pentoxide film in which crystallinity is changed by heat treatment and silicon oxide film in which film thickness is changed by heat treatment, the temperature of the heat treatment can be accurately appraised by taking advantage of the correlation between the temperatures of the heat treatment and the refractive indices of the laminated films, this correlation having a curve with a maximum point and a minimum point. the corners of the package before it is wrapped by the wrapping apparatus, the number of said devices corresponding to the number of corners in the package, each one of said devices (32) comprising a gripping and positioning device (1) for gripping a corner protector and moving it to a corner of the package, and a corner protector magazine (2) comprising a storage space (3) fitted to store a number of corner protectors (4; 41,42,43) arranged as a file in an upright position, said storage space being delimited in the downward direction by a bottom support (5) which supports the corner protectors from below, said storage space comprising a delivery end (6) from where an individual corner protector can be taken by the gripping and positioning device; conveying means (7, 8, 9, 10) for moving the file of corner protectors in the storage space toward the delivery end; and arresting means (11, 12, 13, 14, 15) arranged near the delivery end to arrest the corner protectors, characterized in that the conveying means comprise a press device (7) driven by a first power means (8) and arranged to be in contact with the hindmost corner protector (43) to move the file of corner protectors toward the delivery end (6) and to pack the corner protectors in the file substantially closely together; and that the arresting means comprise a gate (11) which can be opened and closed, with an arrangement for moving the gate between a closed position (I) and an open position (II) using a second power means (12), in which closed position (I) the gate detains the file of corner protectors against the pressure applied by the press device as the foremost corner protector (41) leans against the gate, and in which open position (II) the gate is open so as to release the foremost corner protector to allow it to be taken by the gripping and positioning device, and an arresting device (13) disposed near the delivery end (6) and comprising a separating tab (14) fitted to be moved by a third power means (15) between an arresting position (A) and a releasing position (B), in which arresting position (A) the separating tab is between the foremost corner protector (41) in the file and the second corner protector (42) next in the file so as to arrest the file of corner protectors while the gate (11) is in the open position (II), and in which releasing position (B) the separating tab is out