초록 ▼

The present invention is a method and apparatus for determining whether the sensors or the used in a device monitoring system are properly functioning before rendering a determination as to a defect within the device itself. As a result, maintenance costs may be reduced while limiting the number of

The present invention is a method and apparatus for determining whether the sensors or the used in a device monitoring system are properly functioning before rendering a determination as to a defect within the device itself. As a result, maintenance costs may be reduced while limiting the number of false indications of failure, thereby increasing the reliability of the monitoring system.

대표청구항 ▼

The present invention is a method and apparatus for determining whether the sensors or the used in a device monitoring system are properly functioning before rendering a determination as to a defect within the device itself. As a result, maintenance costs may be reduced while limiting the number of

The present invention is a method and apparatus for determining whether the sensors or the used in a device monitoring system are properly functioning before rendering a determination as to a defect within the device itself. As a result, maintenance costs may be reduced while limiting the number of false indications of failure, thereby increasing the reliability of the monitoring system. chanism for causing the conveying arm to move, at least one container stage disposed in a moving area of the holding portion for placing a cassette container that can contain a plurality of objects to be conveyed in a tier-like manner, a direction-position positioning unit having: a rotation standard stage disposed in the moving area of the holding portion, and a position and posture detector for detecting an eccentric volume and an eccentric direction of the object to be conveyed placed on the rotation standard stage, and a controlling unit that can control entire operations, wherein the holding portion is positioned with respect to a standard position, the method comprising; a step of inputting respective provisional position coordinates of an orienter teaching standard position that is a predetermined position on the rotation standard stage and a container teaching standard position that is a predetermined position in the cassette container placed on the container stage, into the controlling unit in advance, a step of conveying and placing an object to be conveyed precisely positioned with respect to and held by the holding portion onto the rotation standard stage, according to a control based on the provisional position coordinates of the orienter teaching standard position, a step of detecting an eccentric volume and an eccentric direction of the object to be conveyed placed on the rotation standard stage by the position and posture detector, a step of making appropriate position coordinates by amending the provisional position coordinates of the orienter teaching standard position based on the detected eccentric volume and the detected eccentric direction, a step of conveying and placing an object to be conveyed precisely positioned with respect to the container teaching standard position onto the rotation standard stage, according to a control based on the provisional position coordinates of the container teaching standard position, a step of detecting an eccentric volume and an eccentric direction of the object to be conveyed placed on the rotation standard stage by the position and posture detector, and a step of making appropriate position coordinates by amending the provisional position coordinates of the container teaching standard position based on the detected eccentric volume and the detected eccentric direction. 2. A method for positioning a conveying system according to claim 1, wherein the moving mechanism has a guide rail on which the conveying arm can slide, and the provisional position coordinates include an X-coordinate along the guide rail, an R-coordinate being a contraction or expansion volume of the conveying arm body, a θ-coordinate being a rotation volume of the conveying arm body and a Z-coordinate being a vertical movement volume of the conveying arm body. 3. A method for positioning a conveying system according to claim 1, wherein a load-lock chamber in which a vacuum can be formed is arranged in the moving area of the holding portion, the load-lock chamber having therein a object-to-be-conveyed stage for placing the object to be conveyed, and the method further comprising: a step of inputting provisional position coordinates of a load-lock teaching standard position that is a predetermined position on the object-to-be-conveyed stage, into the controlling unit in advance, a step of conveying and placing an object to be conveyed precisely positioned with respect to the load-lock teaching standard position onto the rotation standard stage, according to a control based on the provisional position coordinates of the load-lock teaching standard position, a step of detecting an eccentric volume and an eccentric direction of the object to be conveyed placed on the rotation standard stage by the position and posture detector, and a step of making appropriate position coordinates by amending the provisional position coordinates of the load-lock teaching standard position