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Methods for making silica crucibles 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C03B-020/00
출원번호 US-0808719 (2001-03-15)
발명자 / 주소
  • Kemmochi, Katsuhiko
  • Togawa, Takayuki
  • Mosier, Robert
  • Spencer, Paul
출원인 / 주소
  • Heraeus Shin-Etsu America, Inc.
대리인 / 주소
    Horton, Kenneth E.Rader, Fishman & Grauer PLLC
인용정보 피인용 횟수 : 11  인용 특허 : 21

초록

Silica crucibles containing an inner layer which is substantially pure and substantially bubble-free and methods for making such crucibles. The inner layer is also substantially stable against roughening and spot devitrification. The inner layer is formed by making a web structure which is then conv

대표청구항

1. A method for making a silica crucible, comprising: providing a silica web structure containing a gettering agent; converting the web structure to a substantially continuous inner layer so an innermost portion of the inner layer contains a portion of the gettering agent; providing an outer la

이 특허에 인용된 특허 (21)

  1. Albrecht Horst (Hanau DEX), Crucible for semiconductor manufacturing purposes and a process for manufacturing the crucible.
  2. Dumbaugh ; Jr. William H. (Painted Post NY), Making glass articles with defect-free surfaces.
  3. Dumbaugh ; Jr. William H. (Painted Post NY), Making glass sheet with defect-free surfaces and alkali metal-free soluble glasses therefor.
  4. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  5. Uchikawa Akira (Takefu JPX) Iwasaki Atsushi (Takefu JPX) Fukuoka Toshio (Sabae JPX) Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX) Sato Yasuhiko (Annaka JPX) Aoyama Masaaki (Kouriyama JPX), Manufacture of a quartz glass vessel for the growth of single crystal semiconductor.
  6. Matsumura Mitsuo (Takefu JPX) Matsui Hiroshi (Takefu JPX), Manufacture of quartz glass crucible for use in the manufacture of single crystal silicon.
  7. Dumbaugh ; Jr. ; William H., Method for making glass articles with defect-free surfaces.
  8. Coppola Frank (Big Flats NY) Dumbaugh ; Jr. William H. (Painted Post NY) Ryszytiwskyj William P. (Corning NY), Method for making glass articles with defect-free surfaces and soluble glasses therefor.
  9. Ikeda Tooru ; Asajima Kazuo,JPX ; Kimura Hiroshi,JPX ; Watanabe Hiroyuki,JPX, Method for producing a quartz glass crucible.
  10. Lang Winfried (Ach ATX) Griesshammer Rudolf (Alttting DEX) Schwab Michael (Neutting DEX) Zulehner Werner (Haiming DEX), Method for producing articles of high-purity synthetic quartz glass.
  11. Ducheyne Paul (Rosemont PA) El-Ghannam Ahmed (Philadelphia PA) Shapiro Irving (Philadelphia PA), Method of forming a porous glass substrate.
  12. Brning Rolf (Bruchkbel DEX) Habegger Friedhelm (Hammersbach DEX), Method of making quartz glass crucibles, and apparatus carrying out the method.
  13. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Method of manufacturing quartz glass crucibles with low bubble content.
  14. Holcombe Cressie E. (Knoxville TN) Dykes Norman L. (Oak Ridge TN) Morrow Marvin S. (Kingston TN), Method of preparing thermal insulation for high temperature microwave sintering operations.
  15. Winterburn John A. (Tynemouth GBX), Method of purifying vitreous silica.
  16. Sato Tatsuhiro (Takefu JPX) Watanabe Hiroyuki (Takefu JPX) Ponto Werner (Bruchkobel DEX), Process for continuous refining of quartz powder.
  17. Elmer ; Thomas H., Process for increasing the annealing point of 96% silica glass.
  18. Watanabe Hiroyuki,JPX ; Sato Tatsuhiro,JPX, Quartz glass crucible for pulling single crystal.
  19. Brown David R. (Beverly MA) Frost ; Jr. Charles E. (Exeter NH) White Kenneth A. (Raymond NH), Quartz glass crucibles.
  20. Taguchi Hiroaki,JPX ; Atami Takashi,JPX ; Furuya Hisashi,JPX ; Fukui Masanori,JPX ; Kida Michio,JPX, Single crystal pulling apparatus.
  21. Hansen Richard L. ; Drafall Larry E. ; McCutchan Robert M. ; Holder John D. ; Allen Leon A. ; Shelley Robert D., Surface-treated crucibles for improved zero dislocation performance.

이 특허를 인용한 특허 (11)

  1. Goldblatt, Scott D.; Capobianco, Chris; Gallo, Thomas A., Continuous reactor system for anoxic purification.
  2. Kemmochi, Katsuhiko; Ohama, Yasuo, Crucible having a doped upper wall portion and method for making the same.
  3. Kemmochi, Katsuhiko; Ohama, Yasuo, Crucible having a doped upper wall portion and method for making the same.
  4. Ohama, Yasuo; Mizuno, Shigeo, Method for producing quartz glass crucible.
  5. Kemmochi, Katsuhiko; Kayser, Thomas; Coolich, Robert Joseph; Lehmann, Walter, Method of making a silica crucible in a controlled atmosphere.
  6. Korus, Gabriele; Laudahn, Hilmar; Arndt, Martin; Gertig, Udo, Method of producing a quartz glass crucible.
  7. Dawes, Steven Bruce; Jennings, Douglas H, Refractory vessels and methods for forming same.
  8. Kemmochi, Katsuhiko; Coolich, Robert Joseph, Silica crucible with pure and bubble free inner crucible layer and method of making the same.
  9. Harada, Kazuhiro; Kudo, Satoshi, Silica glass crucible for pulling up silicon single crystal and method for manufacturing thereof.
  10. Kemmochi,Katsuhiko; Ohama,Yasuo, Silica glass crucible with barium-doped inner wall.
  11. Kemmochi,Katsuhiko; Mosier,Robert; Ohama,Yasuo, Silica glass crucible with bubble-free and reduced bubble growth wall.
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