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A flow shut off valve for use with a pressurized fluid application and which is actuated in response to a flow rate exceeding a maximum allowable rating, the fluid application including a normally regulated and pressurized fluid supply, a length of a conduit extending from the fluid supply. The valv

A flow shut off valve for use with a pressurized fluid application and which is actuated in response to a flow rate exceeding a maximum allowable rating, the fluid application including a normally regulated and pressurized fluid supply, a length of a conduit extending from the fluid supply. The valve includes an elongated and substantially cylindrical shaped housing interposed between the fluid supply and the extending conduit, the housing having an inlet end communicating with a first coupling extending from an outlet of the fluid supply and an outlet end communicating with a second coupling extending from an inlet of the length of conduit. The housing further including an axially extending interior extending between the inlet and outlet ends. A seating member is slidably mounted within the axially extending interior and translatable over a selected distance defining an open position permitting fluid flow through the interior and a closed position in which the seating member abuts against the annular shoulder, substantially interrupting said fluid flow. A first biasing spring exerts against an inlet side of the seating member and a second adjustable biasing spring exerts against an outlet side of the seating member, the second spring equalizes a combined force provided by the first spring and the normally regulated fluid supply in the open position. Upon the fluid application switching from a normally regulated condition to an opened and unregulated condition, the combined force acting upon the seating member overcomes the counter force exerted by the second biasing spring and actuates the seating member to the closed position.

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A flow shut off valve for use with a pressurized fluid application and which is actuated in response to a flow rate exceeding a maximum allowable rating, the fluid application including a normally regulated and pressurized fluid supply, a length of a conduit extending from the fluid supply. The valv

A flow shut off valve for use with a pressurized fluid application and which is actuated in response to a flow rate exceeding a maximum allowable rating, the fluid application including a normally regulated and pressurized fluid supply, a length of a conduit extending from the fluid supply. The valve includes an elongated and substantially cylindrical shaped housing interposed between the fluid supply and the extending conduit, the housing having an inlet end communicating with a first coupling extending from an outlet of the fluid supply and an outlet end communicating with a second coupling extending from an inlet of the length of conduit. The housing further including an axially extending interior extending between the inlet and outlet ends. A seating member is slidably mounted within the axially extending interior and translatable over a selected distance defining an open position permitting fluid flow through the interior and a closed position in which the seating member abuts against the annular shoulder, substantially interrupting said fluid flow. A first biasing spring exerts against an inlet side of the seating member and a second adjustable biasing spring exerts against an outlet side of the seating member, the second spring equalizes a combined force provided by the first spring and the normally regulated fluid supply in the open position. Upon the fluid application switching from a normally regulated condition to an opened and unregulated condition, the combined force acting upon the seating member overcomes the counter force exerted by the second biasing spring and actuates the seating member to the closed position. s are supplied into a process chamber, the hydrogen gas in a plasma state and the fluorine-containing gas in a natural state. 9. The method of claim 1, wherein a carrier gas including at least one of nitrogen and argon is provided into the process chamber together with the hydrogen gas and the fluorine-containing gas. 10. The method of claim 1, wherein the step of treating the substrate with hydrogen gas and fluorine-containing gas is performed at a temperature of about -25° C. to about 50° C. and a pressure of about 0.01 torr to about 10 torr. 11. The method of claim 1, wherein the step of treating the substrate with hydrogen gas and fluorine-containing gas is performed for about 20 seconds to about 600 seconds. 12. The method of claim 1, wherein the step treating the substrate with hydrogen gas and fluorine-containing gas, and the step of annealing the substrate are performed within the same process chamber. 13. The method of claim 1, further comprising the step of rinsing with ozone water after treating the substrate with the cleaning solution. 14. The method of claim 13, wherein the cleaning solution treatment and the ozone water rinse are carried out within the same bath. 15. The method of claim 13, wherein the temperature of the ozone water is about 0° C. to about 30° C. 16. The method of claim 13, wherein the ozone water includes deionized water and ozone, and the content of ozone is about 1 ppm to about 1000 ppm with respect to the deionized water. 17. The method of claim 16, wherein the temperature of the ozone water is about 0° C. to about 30° C. 18. The method of claim 1, wherein the step of annealing the substrate is performed for about 20 seconds to about 600 seconds. 19. The method of claim 1, wherein the step of treating the substrate with hydrogen gas and fluorine-containing gas and the step of annealing the substrate are performed one or more times. 20. The method of claim 1, wherein the reaction layer is (NH4)2SiF6.