초록 ▼

A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve

A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve in the vent line controls connection of the purifier outlet to the vent outlet, and a control valve in the purifier line controls connection of the purifier outlet to the process outlet. A flow controller in the purifier line controls flow rate through the purifier. The system is controlled to provide an increased flow rate through the purifier and to connect the purifier outlet to the vent outlet on start up of the system, and then to connect the purifier outlet to the process outlet as soon as conditioning is complete.

대표청구항 ▼

A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve

A gas purification system has at least one purifier in a purifier line with a gas supply inlet at one end and a process outlet at an opposite end for connection to a process tool using the purified gas. A vent line having a vent outlet is connected to the outlet end of the purifier. A control valve in the vent line controls connection of the purifier outlet to the vent outlet, and a control valve in the purifier line controls connection of the purifier outlet to the process outlet. A flow controller in the purifier line controls flow rate through the purifier. The system is controlled to provide an increased flow rate through the purifier and to connect the purifier outlet to the vent outlet on start up of the system, and then to connect the purifier outlet to the process outlet as soon as conditioning is complete. et al., 523/149; US-5089032, 19920200, Moran, 051/293; US-5131923, 19920700, Markhoff-Matheny et al., 051/293; US-5399606, 19950300, Konig et al., 524/385; US-5611827, 19970300, Hammarstrom et al., 051/298; US-5658360, 19970800, Keil, 051/298; US-5681875, 19971000, Huang et al., 523/351; US-5707409, 19980100, Martin et al., 051/295; US-5827337, 19981000, Keil, 051/298; US-5976204, 19991100, Hammarstrom et al., 051/298 S-5121288, 19920600, Metroka et al., 361/329; US-5141828, 19920800, Bennion et al., 029/623.5; US-5148355, 19920900, Lowe et al., 361/410; US-5217831, 19930600, White, 430/311; US-5230990, 19930700, Iwasaki, 430/321; US-5268006, 19931200, Ueno et al., 029/025.03; US-5344748, 19940900, Feely, 430/311; US-5384685, 19950100, Tong et al., 361/503; US-5437941, 19950800, Arledge et al., 429/129