초록 ▼

The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is m

The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber.

대표청구항 ▼

The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is m

The present invention provides an apparatus and method for substrate transport. In systems according to the invention, at least a first and second chamber are provided. The first chamber may be a load lock and the second chamber a processing chamber. A substrate transfer shuttle is provided and is moveable along a linear path defined by guide rollers between one position in the first chamber and another position in the second chamber. In this way, the substrate may be transferred, in both a forward and a reverse direction, between the first chamber and the second chamber. The substrate transfer shuttle is structured so that a substrate may be removed therefrom by moving a support in one of the chambers from a lowered position to an intermediate position, after which the substrate transfer shuttle may be removed from the chamber. on. 3. The fastener assembly of claim 1, wherein said supporting ring is connected to said screw element to be captive but movable. 4. The fastener assembly of claim 1, wherein said non-planar bearing surface is designed to have increased friction. 5. The fastener assembly of claim 4, wherein said non-planar bearing surface includes a number of ribs. 6. The fastener assembly of claim 4, wherein said non-planar bearing surface includes a number of strip-like protrusions. 7. The fastener assembly of claim 4, wherein said non-planar bearing surface includes a coating being designed to increase friction. 8. The fastener assembly of claim 4, wherein said non-planar bearing surface is abrasive-blast. 9. The fastener assembly of claim 1, wherein said supporting ring is designed as a hollow body to increase its elasticity. 10. The fastener assembly of claim 9, wherein said supporting ring at its outer circumference includes a continuous elastic channel to increase its elasticity. 11. The fastener assembly of claim 1, wherein said supporting ring at its outer circumference includes a continuous elastic channel to increase its elasticity. 12. The fastener assembly of claim 1, wherein said supporting ring and said screw element are made of different materials. 13. The fastener assembly of claim 1, wherein said supporting ring and said screw element are made of the same material having different stability. 14. The fastener assembly of claim 1, wherein said screw element is a wheel bolt. 15. The fastener assembly of claim 1, wherein said screw element is a wheel nut.