Method for plating a first layer on a substrate and a second layer on the first layer
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B05D-005/12
C25D-005/02
H01L-021/44
출원번호
US-0674179
(2000-10-27)
우선권정보
JP-0136151 (1998-04-30); JP-0136152 (1998-04-30)
국제출원번호
PCT/JP99/02271
(1999-04-28)
국제공개번호
WO99/57342
(1999-11-11)
발명자
/ 주소
Hongo, Akihisa
Nagai, Mizuki
Ohno, Kanji
Kimizuka, Ryoichi
Maruyama, Megumi
출원인 / 주소
Ebara Corporation
대리인 / 주소
Wenderoth, Lind & Ponack, L.L.P.
인용정보
피인용 횟수 :
10인용 특허 :
16
초록▼
A method and apparatus for plating a substrate is provided, wherein fine pits formed in the substrate, such as fine channels for wiring, are filled with a copper, copper alloy, or other material with low electrical resistance. The method is performed on a wafer W having fine pits (10) to fill the fi
A method and apparatus for plating a substrate is provided, wherein fine pits formed in the substrate, such as fine channels for wiring, are filled with a copper, copper alloy, or other material with low electrical resistance. The method is performed on a wafer W having fine pits (10) to fill the fine pits with a metal (13) and includes performing a first plating process (11) by immersing the wafer in a first plating solution having a composition superior in throwing power; and performing a second plating process (12) by immersing the substrate in a second plating solution having a composition superior in leveling ability.
대표청구항▼
A method and apparatus for plating a substrate is provided, wherein fine pits formed in the substrate, such as fine channels for wiring, are filled with a copper, copper alloy, or other material with low electrical resistance. The method is performed on a wafer W having fine pits (10) to fill the fi
A method and apparatus for plating a substrate is provided, wherein fine pits formed in the substrate, such as fine channels for wiring, are filled with a copper, copper alloy, or other material with low electrical resistance. The method is performed on a wafer W having fine pits (10) to fill the fine pits with a metal (13) and includes performing a first plating process (11) by immersing the wafer in a first plating solution having a composition superior in throwing power; and performing a second plating process (12) by immersing the substrate in a second plating solution having a composition superior in leveling ability. 24, 19920700, Tamaki et al.; US-5178294, 19930100, Hill et al.; US-5300308, 19940400, Louridas; US-5309823, 19940500, Allen; US-5368183, 19941100, Singer; US-5385251, 19950100, Dunn; US-5424083, 19950600, Lozito; US-5636871, 19970600, Field; US-5738786, 19980400, Winnington-Ingram; US-5806408, 19980900, DeBacker et al., 099/295; US-5840189, 19981100, Sylvan et al.; US-5913964, 19990600, Melton; US-5948455, 19990900, Schaeffer et al.; US-5984141, 19991100, Gibler, 222/080; US-6022134, 20000200, Andrews, 366/130; US-6079871, 20000600, Jonas et al., 366/336; US-6089389, 20000700, Sharon et al., 215/011.1; US-6165523, 20001200, Story, 426/112; US-6263923, 20010700, Castillo, 141/100 es to a disposable device for the application of a coating (2) on a tablet, a capsule or a pill. The coating (2) is applied enclosing the tablet, capsule or pill (3) during its passage through a bowl formation (4) with a coating mass (5) and through an elastic diaphragm (12) located in the bottom (11) and provided with a centrally disposed, conveniently penetrable opening (13). During the passage of the tablet, capsule of pill (3) the opening (13) encloses the tablet, capsule or pill and simultaneously shapes a film of coating mass (5) thereon. rian carcinoma using E. coli nitroreductase and CB1954." British Journal of Cancer, vol. 76(supp. 1):40. Bailey et al. (1996) "Investigation of alternative prodrugs for use with E. coli nitroreductase in `suicide gene` approaches to cancer therapy." Gene Therapy, vol. 3:1143-1150. Connors (1995) "The choice of prodrugs for gene directed enzyme prodrug therapy of cancer." Gene Therapy, vol. 2:702-709. Denny et al. (1998) "The Design of Selectively-activated Anti-cancer Prodrugs for use in Antibody-directed and Gene-directed Enzyme-Prodrug Therapies." J. Pharm., vol. 50:387-394. Khan et al. (1969) "Tumour-growth inhibitory nitrophenylaziridines and related compounds: structure-activity relationships." Chem.-Biol. Interactions, vol. 1(1):27-47. Khan et al. (1971) "Tumour-growth inhibitory nitrophenylaziridines and related compounds: sturcture-activity relationships. II." Chem.-Biol. Interactions, vol. 4(1):11-22. Knox et al. (1988) "A New Cytotoxic, DNA Interstrand Crosslinking Agent, 5-(Aziridin-1-yl)-4-Hydroxylamino-2-nitrobenzamide, is formed from 5-)Aziridin-1-yl)-2,4-Dinitrobenzamide (CB 1954) By a Nitroreductase Enzyme in Walker Carcinoma Cells." Biochemical Pharmacology, vol. 37(24):4661-4669. Knox et al. (1991) "Bioactivation of CB 1954: Reaction of the Active 4-Hydroxylamino derivative with Thioesters to Form the Ultimate DNA--DNA Interstrand Crosslinking Species." Biochemical Pharmacology, vol. 42(9):1691-1697. Lewis (1989) "Molecular orbital calculations on tumour-inhibitory phenyl aziridines: QSARs." Xenobiotica, vol. 19(3):341-356. McNeish et al. (1998) "Virus directed enzyme prodrug therapy for ovarian and pancreatic cancer using retrovirally delivered E. coli nitroreductase and CB1954." Gene Therapy, vol. 5:1061-1069. McNeish et al. (1997) "Gene directed enzyme prodrug therapy for cancer." Advanced Drug Delivery Reviews, vol. 26:173-184. Niculescu-Duvaz et al. (1997) "Antibody-directed enzyme prodrug therapy (ADEPT): a review." Advanced Drug Delivery Reviews, vol. 26:151-172. 95440, 19980800, Ampulski et al.; US-5804036, 19980900, Phan et al., 162/116; US-5855739, 19990100, Ampulski et al.; US-5861082, 19990100, Ampulski et al.; US-5897745, 19990400, Ampulski et al.; US-5904811, 19990500, Ampulski et al.
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