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A Manual Guide Vehicle for transporting semiconductor-containers to and from processing equipment is disclosed. The Manual Guide Vehicle is capable of receiving electric power for driving a transporting device for transporting cassettes with semiconductor samples to be processed from the external pr

A Manual Guide Vehicle for transporting semiconductor-containers to and from processing equipment is disclosed. The Manual Guide Vehicle is capable of receiving electric power for driving a transporting device for transporting cassettes with semiconductor samples to be processed from the external processing equipment.

대표청구항 ▼

A Manual Guide Vehicle for transporting semiconductor-containers to and from processing equipment is disclosed. The Manual Guide Vehicle is capable of receiving electric power for driving a transporting device for transporting cassettes with semiconductor samples to be processed from the external pr

A Manual Guide Vehicle for transporting semiconductor-containers to and from processing equipment is disclosed. The Manual Guide Vehicle is capable of receiving electric power for driving a transporting device for transporting cassettes with semiconductor samples to be processed from the external processing equipment. output. 15. An apparatus for separating animated objects in a fluid stream, comprising: an input, a diverted output and a non-diverted output; a screen disposed in a generally horizontal manner and that is provided at the input and positioned to separate animated objects from between non-diverted and diverted fluid flows; a reservoir provided at least in part under said screen; and downstream flow control that functions to maintain the height of a fluid flowing through said apparatus at a given level relative to said screen; wherein fluid flows generally downward through said screen to said diverted output. 16. The apparatus of claim 15, wherein said screen is disposed such that relative to the input, the height of the screen proximate said non-diverted output is within a range of 5 degrees in angle from horizontal above the input to 25 degrees from horizontal below the input. 17. The apparatus of claim 15, wherein the surface area of said screen for pass through to said diverted output is tapered towards the non-diverted output. 18. The apparatus of claim 15, wherein the reservoir is defined by a bottom and side walls and at least one of said bottom and side walls is tapered in a manner that reduces the lateral cross-sectional surface area of the reservoir towards the non-diverted output. 19. The apparatus of claim 15, wherein said screen includes a region that is depressed below other portions of said screen such that at low flow levels fluid propagates through said depressed region from said input to said non-diverted output. 20. The apparatus of claim 15, wherein fluid movement through said apparatus from said input to said non-diverted output is substantially unimpeded, thereby facilitating movement of fish from said input to said non-diverted output. 21. The apparatus of claim 15, wherein said reservoir is defined by walls and at least one of said walls includes a distributed portal structure for passage of fluid from said reservoir towards said diverted output, said distributed portal structure serving to facilitate a distributed fluid flow through said screen. 22. The apparatus of claim 15, wherein said apparatus is configured to move a surface fluid flow across said screen to the non-diverted output at a velocity that is greater than the velocity of an average fluid flow through said screen to said diverted output. 23. The apparatus of claim 15, wherein fluid movement through said apparatus from said input to said non-diverted output is substantially unimpeded, thereby facilitating movement of fish from said input to said non-diverted output. 24. An apparatus for use in separating animated objects between fluid streams, comprising: an input, a diverted output and a non-diverted output; a screen generally disposed in a manner that is substantially more horizontal than vertical and that is provided at said input and positioned to separate animated objects between non-diverted and diverted fluid flows; a reservoir formed at least in part under said screen and coupled to said diverted output; and downstream flow control that functions to maintain the height of a fluid flowing through said apparatus at a given level relative to said screen; wherein said apparatus is configured to move a surface fluid flow across said screen to the non-diverted output at a velocity that is greater than the velocity of an average fluid flow through said screen to said diverted output. 25. The apparatus of claim 24, wherein said screen is disposed such that relative to the input, the height of the screen proximate said non-diverted output is within a range of 5 degrees in angle from horizontal above the input to 25 degrees from horizontal below the input. 26. The apparatus of claim 24, wherein the effective surface area of said screen for pass through to said diverted output is tapered towards the non-diverted output. 27. The apparatus of claim 24, wherein the reservoir is defined by a bottom and side walls and at least one