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Performance control system and method for gas discharge lasers

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01S-003/22
출원번호 US-0035572 (2001-10-18)
발명자 / 주소
  • Vogler, Klaus Wolfgang
  • Heist, Peter
출원인 / 주소
  • Lambda Physik AG
대리인 / 주소
    Sierra Patent Group, Ltd.
인용정보 피인용 횟수 : 16  인용 특허 : 30

초록

A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving vol

대표청구항

A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving vol

이 특허에 인용된 특허 (30)

  1. Bedwell David J. (Bristol GBX), Apparatus for controlling the composition of a laser gas or gas mixture.
  2. Weiss Hardy P. (IM Seeblick 8821 Hutten CHX), Axial gas laser and process for stabilizing its operation.
  3. Hohla Kristian (Gttingen DEX) Albers Ernst (Gttingen DEX), Discharge-pumped laser.
  4. Suzuki Kazuaki (Kawasaki JPX), Energy amount control device.
  5. Das Palash P. (Vista CA) Larson Donald G. (San Diego CA), Excimer laser.
  6. Das Palash P. (Vista CA) Larson Donald G. (San Diego CA), Excimer laser.
  7. Voss Frank (Gottingen DEX), Excimer laser comprising a gas reservoir and a collecting receptacle and a method of refilling the gas reservoir of the.
  8. Wakabayashi Osamu (Hiratsuka JPX) Mizoguchi Hakaru (Hiratsuka JPX), Excimer laser device.
  9. Haruta Kenyu (Amagasaki JPX) Wakata Hitoshi (Amagasaki JPX) Sato Yukio (Amagasaki JPX) Nagai Haruhiko (Amagasaki JPX), Excimer laser equipment.
  10. Bittenson Steven N. (Bedford MA) Klauminzer Gary K. (Lexington MA), Excimer laser output control device.
  11. Rokni Shahryar ; Watson Tom A. ; Tammadge David J., Fluorine control system for excimer lasers.
  12. von Borstel Michael (Stuttgart DEX), Gas laser.
  13. Sandstrom Richard L. (Encinitas CA), Gas replenishment method and apparatus for excimer lasers.
  14. Mizoguchi Hakaru,JPX ; Nishisaka Toshihiro,JPX ; Komori Hiroshi,JPX, Laser gas controller and charging/discharging device for discharge-excited laser.
  15. Mizoguchi Hakaru (Hiratsuka JPX) Fujimoto Junichi (Hiratsuka JPX) Kowaka Masahiko (Hiratsuka JPX) Takahashi Tomokazu (Hiratsuka JPX), Laser gas replenishing apparatus and method in excimer laser system.
  16. Yoshida Kenichi (Osaka JPX) Ono Kimizo (Osaka JPX) Sunago Katsuyoshi (Osaka JPX) Takenaka Shinya (Osaka JPX) Iwai Tohru (Osaka JPX), Laser output controlling device.
  17. Das Palash P. (Vista CA) Stephenson Gary R. (San Diego CA), Maintenance strategy control system and monitoring method for gas discharge lasers.
  18. Hakuta Kohzo (Fuchu JPX) Aramaki Minoru (Tokyo JPX) Suen. A Takashi (Yamaguchi JPX) Kodama Mitsuo (Ube JPX) Nakano Hisaji (Ube JPX) Nakagawa Shinsuke (Ube JPX), Method and apparatus for analyzing fluorine containing gases.
  19. Wakabayashi Osamu (Hiratsuka JPX) Kowaka Masahiko (Hiratsuka JPX), Method and system for controlling narrow-band oscillation excimer laser.
  20. Aramaki Minoru (Tokyo JPX) Nakagawa Shinsuke (Ube JPX) Nakano Hisaji (Ube JPX) Ichimura Hiroshi (Ube JPX) Tainaka Masahiro (Ube JPX), Method of refining rare gas fluoride excimer laser gas.
  21. Hakuta Kohzo (Fuchu JPX) Aramaki Minoru (Ube JPX) Suenaga Takashi (Yamaguchi Prefecture JPX), Method of refining rare gas halide excimer laser gas.
  22. Hofmann Thomas ; Ishihara Toshihiko ; Das Palash P. ; Ershov Alexander I., Narrow band excimer laser with gas additive.
  23. Schall Wolfgang,DEX, Oxygen-iodine laser.
  24. Vogler Klaus Wolfgang,DEX ; Heist Peter,DEX, Performance control system and method for gas discharge lasers.
  25. Bees George L. (Ashland MA), Power supply for negative impedance gas discharge lasers.
  26. Das Palash P., Process for selecting operating range for narrow band excimer laser.
  27. Sandstrom Richard L. ; Besaucele Herve Andre ; Fomenkov Igor V. ; Das Palash P., Pulse energy control for excimer laser.
  28. Zhou Zhengzhuo (Torrance CA) Pothoven Floyd R. (Hawthorne CA) Waters Rodney L. (Torrance CA), Sealed excimer laser with longitudinal discharge and transverse preionization for low-average-power uses.
  29. Amezcua Marco (Privada del Crepusculo #36 Lote 22 Edificio A Departamento 103 Pedregal de Carrasco Mexico City MXX D. F. C. P. 04700), Stove control timer.
  30. Alger Terry (Tracy CA) Uhlich Dennis M. (Livermore CA) Benett William J. (Livermore CA) Ault Earl R. (Dublin CA), System for controlling the flow of gas into and out of a gas laser.

이 특허를 인용한 특허 (16)

  1. Brennan, III, James Francis; Vaissié, Laurent; Mielke, Michael Marshall, Active tuning of temporal dispersion in an ultrashort pulse laser system.
  2. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael M., Automated laser tuning.
  3. Stadler, Andrew D.; Mielke, Michael Marshall; Vaissié, Laurent; Yilmaz, Ismail Tolga; Saunders, Thomas, Automated polarization correction.
  4. Greenberg, Michael; Chang, Kok Wai, Compact monolithic dispersion compensator.
  5. Vaissié, Laurent; Brennan, III, James Francis, Dispersion compensation in a chirped pulse amplification system.
  6. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael, Intelligent laser interlock system.
  7. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael, Intelligent laser interlock system.
  8. Delfyett, Peter; Stoltz, Richard, Laser ablation method and apparatus having a feedback loop and control unit.
  9. Srinivas, Ramanujapuram A.; Greenberg, Michael; Gaudiosi, David; Mielke, Michael; Booth, Tim, Laser based processing of layered materials.
  10. Rule,John A.; Zambon,Paolo; Watson,Tom A.; Mesina,Omez S.; Zheng,Weijie, Method and apparatus for controlling the output of a gas discharge laser system.
  11. Vaissié, Laurent, Methods and systems for trimming circuits.
  12. Stoltz, Richard; Bullington, Jeff, Portable optical ablation system.
  13. Gaudiosi, David M.; Akbulut, Mehmetcan, Static phase mask for high-order spectral phase control in a hybrid chirped pulse amplifier system.
  14. Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael M.; Kim, Kyungbum; Vaissié, Laurent; Waarts, Robert G.; Cumbo, Michael J., Systems and methods for control of ultra short pulse amplification.
  15. Mielke, Michael M.; Waarts, Robert G.; Tong, Sha; Chang, Kok Wai, Systems and methods for controlling a pulsed laser by combining laser signals.
  16. Mielke, Michael; Srinivas, Ramanujapuram A.; Booth, Tim; Wilbanks, Thor, Systems and processes that singulate materials.
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