Performance control system and method for gas discharge lasers
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H01S-003/22
출원번호
US-0035572
(2001-10-18)
발명자
/ 주소
Vogler, Klaus Wolfgang
Heist, Peter
출원인 / 주소
Lambda Physik AG
대리인 / 주소
Sierra Patent Group, Ltd.
인용정보
피인용 횟수 :
16인용 특허 :
30
초록▼
A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving vol
A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving voltage to a discharge circuit. A master data set of an output parameter such as any of output beam energy, bandwidth, spectrum width, long axial beam profile, short axial beam profile, beam divergence, energy stability, energy efficiency, width of the discharge, temporal beam coherence, spatial beam coherence, spatial pulse width, amplified spontaneous emission and temporal pulse width versus an input parameter such as driving voltage is generated corresponding to an optimal gas mixture status, preferably after a new fill and typically at the factory, and alternatively following a new fill at the fab. Preferably several master data sets are measured and stored following new fills corresponding to various ages and other conditions of the laser system. The master data set is stored into a memory of the control system. Several more calibration data sets are also preferably generated corresponding to other gas mixture or laser operating conditions. At another time, during a check sub-routine preferably during a subsequent start-up procedure or during each subsequent start-up procedure, a current status data set of the output and input parameters is generated corresponding to the current status of the gas mixture. The current status data set is then compared with the master data set and deviations of the current status and master data sets are noted. A follow-up procedure may be performed, preferably automatically as initiated by the processor, based on the comparison.
대표청구항▼
A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving vol
A method is provided for determining the status of a gas mixture of a laser system including a gas discharge laser which generates an output beam and has a discharge chamber containing a gas mixture within which energy is supplied to the gas mixture by a power supply via application of a driving voltage to a discharge circuit. A master data set of an output parameter such as any of output beam energy, bandwidth, spectrum width, long axial beam profile, short axial beam profile, beam divergence, energy stability, energy efficiency, width of the discharge, temporal beam coherence, spatial beam coherence, spatial pulse width, amplified spontaneous emission and temporal pulse width versus an input parameter such as driving voltage is generated corresponding to an optimal gas mixture status, preferably after a new fill and typically at the factory, and alternatively following a new fill at the fab. Preferably several master data sets are measured and stored following new fills corresponding to various ages and other conditions of the laser system. The master data set is stored into a memory of the control system. Several more calibration data sets are also preferably generated corresponding to other gas mixture or laser operating conditions. At another time, during a check sub-routine preferably during a subsequent start-up procedure or during each subsequent start-up procedure, a current status data set of the output and input parameters is generated corresponding to the current status of the gas mixture. The current status data set is then compared with the master data set and deviations of the current status and master data sets are noted. A follow-up procedure may be performed, preferably automatically as initiated by the processor, based on the comparison.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (30)
Bedwell David J. (Bristol GBX), Apparatus for controlling the composition of a laser gas or gas mixture.
Amezcua Marco (Privada del Crepusculo #36 Lote 22 Edificio A Departamento 103 Pedregal de Carrasco Mexico City MXX D. F. C. P. 04700), Stove control timer.
Alger Terry (Tracy CA) Uhlich Dennis M. (Livermore CA) Benett William J. (Livermore CA) Ault Earl R. (Dublin CA), System for controlling the flow of gas into and out of a gas laser.
Rule,John A.; Zambon,Paolo; Watson,Tom A.; Mesina,Omez S.; Zheng,Weijie, Method and apparatus for controlling the output of a gas discharge laser system.
Stadler, Andrew D.; Goldman, David; Farley, Mark; Mielke, Michael M.; Kim, Kyungbum; Vaissié, Laurent; Waarts, Robert G.; Cumbo, Michael J., Systems and methods for control of ultra short pulse amplification.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.