Sample separating apparatus and method, and substrate manufacturing method
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B32B-035/00
H01L-021/425
출원번호
US-0434740
(1999-11-05)
우선권정보
JP-0316574 (1998-11-06); JP-0272987 (1999-09-27)
발명자
/ 주소
Yanagita, Kazutaka
Ohmi, Kazuaki
Sakaguchi, Kiyofumi
출원인 / 주소
Canon Kabushiki Kaisha
대리인 / 주소
Morgan & Finnegan LLP
인용정보
피인용 횟수 :
15인용 특허 :
35
초록▼
This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the s
This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the substrate holding portions (270, 280) and rotated. A jet is ejected from a nozzle (260) and injected into the porous layer of the bonded substrate stack (50), thereby separating the bonded substrate stack (50) into two substrates at the porous layer. Another separating apparatus (5000) has a pair of substrate holding portions (270, 280), a nozzle (260) of rejecting a fluid to the porous layer of a bonded substrate stack (50), and an abrupt operation prevention mechanism (4000) for preventing the lower substrate holding portion (280) from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack (50).
대표청구항▼
This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the s
This invention is to provide a technique of separating bonded substrate stacks having porous layers at a high yield. A separating apparatus (100) has a pair of substrate holding portions (270, 280). A bonded substrate stack (50) is sandwiched from upper and lower sides and horizontally held by the substrate holding portions (270, 280) and rotated. A jet is ejected from a nozzle (260) and injected into the porous layer of the bonded substrate stack (50), thereby separating the bonded substrate stack (50) into two substrates at the porous layer. Another separating apparatus (5000) has a pair of substrate holding portions (270, 280), a nozzle (260) of rejecting a fluid to the porous layer of a bonded substrate stack (50), and an abrupt operation prevention mechanism (4000) for preventing the lower substrate holding portion (280) from abruptly moving downward but allowing it to moderately move when separating the bonded substrate stack (50). ystem for an internal combustion engine for preventing dispersion of a control amount and unexpected release of a lock pin is provided. The valve timing control system is provided with actuators 15 and 16 connected to cam shafts 15C and 16C, hydraulic pressure supply units 19 and 20 for driving the actuators, and a controller 21A for controlling a hydraulic pressure for the actuators in dependence on engine operation states while changing a relative phase of the cam shafts relative to crank shafts. The actuator includes a locking mechanism for setting the relative phase to a lock-up position, and an unlocking mechanism for releasing the locking mechanism in response to a predetermined hydraulic pressure. The controller makes a limit of control range small when the controller drives the locking mechanism to control the relative phase within a predetermined range of the lock-up position. ary device as in claim 6 wherein said gasket is in intimate contact with both said outer surface of said cylinder housing and said second inner surface has said outer housing. 8. A rotary device as in claim 1 wherein said rotatable wheel includes a central wheel body and at least one radial arm extending outwardly from said central wheel body, said radial arm having a first edge surface extending in a plane parallel to a tangent to said wheel body. 9. A rotary device as in claim 8 wherein said first edge surface includes a slide fixture extending along the length of said first edge surface, said slide fixture being secured to said rotatable wheel at said first edge surface. 10. A rotary device as in claim 9 wherein said rotatable wheel is substantially disc-shaped, said wheel including a first end, a second opposing end, and a third circumferential side there between, said at least one radial arm being defined in said third side, a first shaft extending outwardly from the first end, a longitudinal axis of said first shaft coinciding with the second axis of rotation. 11. A rotary device as In claim 10, the first axis of rotation being displaced from the second axis of rotation. 12. A rotary device as in claim 11 wherein the magnitude of displacement between the first and second axes of rotation determines the compression ratios in the respective cylinders. 13. A rotary device as in claim 8 wherein respective said pistons are connected to respective piston rods, said pistons, said piston rods, and the first edge surfaces, in combination, being configured such that a force applied by a fluid on a top of a respective said piston is directed at said first edge surface of the corresponding radial arm at an angle of at least 75 degrees with respect to the first edge surface. 14. A rotary device as in claim 8 wherein respective said pistons are connected to respective piston rods, said pistons, said piston rods, and the first edge surfaces, in combination, being configured such that a force applied by a fluid on a top of a respective said piston is directed at said first edge surface of the corresponding radial arm at an angle perpendicular to the first edge surface. 15. A rotary device as in claim 8 wherein said rotary device is configured such that an expansive force, associated with a fluid being compressed in a respective fluid processing chamber while the respective piston is in a compression phase of rotation of said cylinder housing, urges said wheel in the same rotational direction as an expansive force associated with an expanding gas trapped within the fluid processing chamber while the respective said piston is in an expansion phase of rotation of said cylinder housing. 16. A rotary device as in claim 1, said cylinder head including at least one aperture forming an open passage from said first top side to said second bottom side. 17. A rotary device as in claim 1 wherein said cylinder head occupies a cross-sectional area of such chamber. 18. A rotary device for receiving fluid input and generating a fluid discharge therefrom, said rotary device comprising: (a) a stationary outer housing having a circumferential outer wall comprising a first outer surface and a second opposing annular inner surface; (b) a rotatable cylinder housing positioned within said outer housing, said cylinder housing comprising a generally annular outer surface disposed toward and positioned in generally close juxtaposition with at least a portion of the inner surface of said outer housing, said cylinder housing including a central opening therein and a plurality of open cylinders defining passages extending from the central opening generally to the outer surface of said cylinder housing; (c) a rotatable wheel positioned within said central opening, said rotatable wheel having a wheel axis of rotation defined therein, a central body portion, and a plurality of radial arms extending outwardly from said central body portion; and (d) a plurality of pistons connected to respective ones of said radial arms, and received in respective ones of said cylinders, thereby to define closed fluid processing chambers between said pistons and the inner surface of said outer housing, said rotatable wheel, said pistons, and said rotatable cylinder housing being cooperatively designed and configured to rotate substantially in unison within said stationary outer housing, each said radial arm includes a first edge surface extending in a plane parallel to a tangent to said wheel body, each said first edge surface includes a slide fixture extending along the length of the respective said first edge surface, said slide fixtures being secured to said rotatable wheel at said first edge surfaces. 19. A rotary device as in claim 18 wherein said outer housing includes at least one aperture sized and configured to receive an igniter, said aperture being positioned at or adjacent a compression locus of said rotary device. 20. A rotary device as in claim 18, including at least one igniter disposed in 8 respective said igniter aperture. 21. A rotary device as in claim 18 wherein said outer housing includes at least one aperture for intake of fresh air into said fluid processing chambers, at least one aperture for intake of fuel into said fluid processing chambers, and at least one aperture for exhaust of ignited fuel/air mixtures from said fluid processing chambers. 22. A rotary device as in claim 18 wherein said rotatable wheel is substantially disc-shaped, said wheel including a first end, a second opposing end, and a third circumferential side there between, said radial arms being defined in said third side, a wheel shaft extending outwardly from the first end, a longitudinal axis of said wheel shaft coinciding with the axis of rotation of said wheel. 23. A rotary device as in claim 22 wherein said cylinder housing defines an additional housing axis of rotation displaced from the wheel axis of rotation. 24. A rotary device as in claim 23 wherein the magnitude of the displacement between the wheel axis of rotation and the housing axis of rotation determines the compression ratios in the respective cylinders. 25. A rotary device as in claim 18 wherein respective said pistons are connected to respective piston rods, said pistons, said piston rods, and the first edge surfaces, in combination, being configured such that a force applied by a fluid on a top of a respective said piston is directed at said first edge surface of the corresponding radial arm at an angle perpendicular to the first edge surface. 26. A rotary device as in claim 18 wherein respective said pistons are connected to respective piston rods, said pistons, said piston rods, and the first edge surfaces, in combination, being configured such that a force applied by a fluid on a top of a respective said piston is directed at said first edge surface of the corresponding radial arm at an angle of at least 75 degrees to the first edge surface. 27. A rotary device as in claim 18 wherein said rotary device is configured such that an expansive force, associated with a fluid being compressed in a respective fluid processing chamber while the respective piston is in a compression phase of rotation of said cylinder housing, urges said wheel in the same rotational direction as an expansive force associated with an expanding gas trapped within the fluid processing chamber, while the respective said piston is in an expansion phase of rotation of said cylinder housing. 28. A rotary device as in claim 18, including a cylinder head in respective said cylinders proximate the outer surface of said cylinder housing, said cylinder heads each comprising solid structure having a first top side and a second generally opposing bottom side, said first top side being disposed toward said second inner surface of said outer housing. 29. A rotary device as in claim 28 wherein said cylinder heads occupy cross-sectional areas of such chambers. 30. A rotary devi
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