초록 ▼

Metallographic samples are cross-sectioned to inspect internal features of the samples and to determine the cause of component failures. In order to reach an area of interest that is to be inspected, the cross-sections undergo grinding. Conventional grinding techniques require that a metallographic

Metallographic samples are cross-sectioned to inspect internal features of the samples and to determine the cause of component failures. In order to reach an area of interest that is to be inspected, the cross-sections undergo grinding. Conventional grinding techniques require that a metallographic sample be removed from the grinding apparatus and visually inspected in order to determine whether the area of interest has been reached. An improved grinding apparatus and method of grinding, images the sample while it is being ground so that grinding does not have to be interrupted in order to determine how far grinding has progressed. Real-time monitoring of the grinding process allows precision control of grinding of metallographic samples.

대표청구항 ▼

1. An arrangement for grinding a metallographic sample comprising: a metallographic sample comprising an area of interest, having first and second opposing major sides; an imaging arrangement positioned so as to generate images of the first major side of the metallographic sample while the sampl

1. An arrangement for grinding a metallographic sample comprising: a metallographic sample comprising an area of interest, having first and second opposing major sides; an imaging arrangement positioned so as to generate images of the first major side of the metallographic sample while the sample is undergoing grinding, wherein the first side of the sample is attached to a first surface of a substantially transparent substrate and the imaging arrangement is attached to a second surface of the substantially transparent substrate; and a grinding wheel for grinding a surface of the sample. 2. The arrangement of claim 1, wherein the substantially transparent substrate comprises a material selected from the group consisting of a glass and a polymer composition. 3. The arrangement of claim 2, wherein the substantially transparent substrate is substantially a parallelepiped. 4. The arrangement of claim 2, wherein the substantially transparent substrate is a right angle prism. 5. The arrangement of claim 2, wherein the transparent substrate comprises two right angle prisms, wherein the hypotenuse of one of the prisms abuts the hypotenuse of the other and the two prisms are joined together forming a dual prism parallelepiped. 6. The arrangement of claim 1, wherein a stub is attached to the second major opposing side of the sample, and-the stub is mounted in a chuck. 7. The arrangement of claim 1, wherein the sample is cast in a resin, and the cast sample is positioned for grinding by securing the sample with a clamp. 8. The arrangement of claim 1, wherein the imaging arrangement comprises a lens, filter, and video camera located along a common optical path that includes the substantially transparent substrate and the first side of the sample. 9. The arrangement of claim 8, further comprising a video monitor, for displaying images of the sample, connected to the video camera, and a computer connected to the video camera, for capturing images of the sample. 10. The arrangement of claim 1, further comprising a light source for illuminating the first side of the sample. 11. The arrangement of claim 1, wherein the metallographic sample is a semiconductor device sample.