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Local interconnect junction on insulator (JOI) structure 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-029/80
출원번호 US-0928738 (2001-08-13)
발명자 / 주소
  • Mandelman, Jack A.
  • Gan, Dong
  • Lam, Chung H.
출원인 / 주소
  • International Business Machines Corporation
대리인 / 주소
    Scully, Scott, Murphy & Presser
인용정보 피인용 횟수 : 63  인용 특허 : 9

초록

A JOI structure and cell layout including at least one patterned gate stack region present atop a semiconductor substrate, said semiconductor substrate having source/drain diffusion regions of opposite dopant polarity abutting each other present therein, said source/drain diffusion regions are prese

대표청구항

A JOI structure and cell layout including at least one patterned gate stack region present atop a semiconductor substrate, said semiconductor substrate having source/drain diffusion regions of opposite dopant polarity abutting each other present therein, said source/drain diffusion regions are prese

이 특허에 인용된 특허 (9)

  1. Tanaka Kazuo,JPX ; Kumagai Takashi,JPX ; Karasawa Junichi,JPX ; Watanabe Kunio,JPX, CMOS device with improved wiring density.
  2. Fitch Jon T. (Austin TX) Venkatesan Suresh (Austin TX) Witek Keith E. (Austin TX), Integrated circuit having both vertical and horizontal devices and process for making the same.
  3. Hsu Sheng Teng, Method for manufacturing a CMOS self-aligned strapped interconnection.
  4. Naem Abdalla Aly, Method of simultaneous formation of salicide and local interconnects in an integrated circuit structure.
  5. Lien Chuen-Der, Methods for making compact P-channel/N-channel transistor structure.
  6. Manning H. Monte, Self-aligned silicide strap connection of polysilicon layers.
  7. Ohno Takio (Hyogo JPX), Semiconductor device including a local interconnection between an interconnection layer and an adjoining impurity region.
  8. Hashimoto Koichi,JPX ; Hayashi Hiromi,JPX, Semiconductor device with local interconnect of metal silicide.
  9. Jeng Shin-Puu, TiSi.sub.2 /TiN clad interconnect technology.

이 특허를 인용한 특허 (63)

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  8. Yeo,Yee Chia; Wang,Ping Wei; Chen,Hao Yu; Yang,Fu Liang; Hu,Chenming, Doping of semiconductor fin devices.
  9. Radosavljevic, Marko; Datta, Suman; Doyle, Brian S.; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Majumdar, Amian; Chau, Robert S., Field effect transistor with metal source/drain regions.
  10. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
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  18. Chau, Robert S.; Datta, Suman; Kavalieros, Jack; Brask, Justin K.; Doczy, Mark L.; Metz, Matthew, Field effect transistor with narrow bandgap source and drain regions and method of fabrication.
  19. Chang, Peter L. D.; Doyle, Brian S., Independently accessed double-gate and tri-gate transistors.
  20. Chang, Peter L. D.; Doyle, Brian S., Independently accessed double-gate and tri-gate transistors in same process flow.
  21. Chang, Peter L. D.; Doyle, Brian S., Independently accessed double-gate and tri-gate transistors in same process flow.
  22. Chan, Yuen H.; Joshi, Rajiv V.; Plass, Donald W., Integrated circuit chip with improved array stability.
  23. Chan,Yuen H.; Joshi,Rajiv V.; Plass,Donald W., Integrated circuit chip with improved array stability.
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  25. Brask, Justin K.; Chau, Robert S.; Datta, Suman; Doczy, Mark L.; Doyle, Brian S.; Kavalieros, Jack T.; Majumdar, Amlan; Metz, Matthew V.; Radosavljevic, Marko, Method for fabricating transistor with thinned channel.
  26. Brask, Justin K.; Chau, Robert S.; Datta, Suman; Doczy, Mark L.; Doyle, Brian S.; Kavalieros, Jack T.; Majumdar, Amlan; Metz, Matthew V.; Radosavljevic, Marko, Method for fabricating transistor with thinned channel.
  27. Brask, Justin K.; Doyle, Brian S.; Shah, Uday; Chau, Robert S., Method of patterning a film.
  28. Brask, Justin K.; Kavalieros, Jack; Shah, Uday; Datta, Suman; Majumdar, Amlan; Chau, Robert S.; Doyle, Brian S., Methods for patterning a semiconductor film.
  29. Shah, Uday; Doyle, Brian S.; Brask, Justin K.; Chau, Robert S.; Letson, Thomas A., Nonplanar device with thinned lower body portion and method of fabrication.
  30. Shah, Uday; Doyle, Brian S.; Brask, Justin K.; Chau, Robert S.; Letson, Thomas A., Nonplanar device with thinned lower body portion and method of fabrication.
  31. Shah, Uday; Doyle, Brian S.; Brask, Justin K.; Chau, Robert S.; Letson, Thomas A., Nonplanar device with thinned lower body portion and method of fabrication.
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  35. Shah, Uday; Doyle, Brian; Brask, Justin K.; Chau, Robert S.; Letson, Thomas A., Nonplanar device with thinned lower body portion and method of fabrication.
  36. Hareland, Scott A.; Chau, Robert S.; Doyle, Brian S.; Rios, Rafael; Linton, Tom; Datta, Suman, Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication.
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  43. Koh, Risho; Yamagami, Shigeharu; Lee, Jong-wook; Wakabayashi, Hitoshi; Saito, Yukishige; Ogura, Atsushi; Narihiro, Mitsuru; Arai, Kohichi; Takemura, Hisashi; Mogami, Tohru; Yamamoto, Toyoji; Ochiai, , SOI MOSFET.
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  54. Rakshit, Titash; Giles, Martin; Pillarisetty, Ravi; Kavalieros, Jack T., Stress in trigate devices using complimentary gate fill materials.
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  57. Rakshit, Titash; Giles, Martin; Pillarisetty, Ravi; Kavalieros, Jack T., Stress in trigate devices using complimentary gate fill materials.
  58. Yeo,Yee Chia; Yang,Fu Liang, Structure and method for forming the gate electrode in a multiple-gate transistor.
  59. Yeo,Yee Chia; Yang,Fu Liang, Structure and method for forming the gate electrode in a multiple-gate transistor.
  60. Sandhu, Gurtej S.; Smythe, III, John A., Trench isolation implantation.
  61. Sandhu, Gurtej S.; Smythe, III, John A., Trench isolation implantation.
  62. Hareland, Scott A.; Chau, Robert S.; Doyle, Brian S.; Datta, Suman; Jin, Been-Yih, Tri-gate transistor device with stress incorporation layer and method of fabrication.
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