IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0752915
(2001-01-02)
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발명자
/ 주소 |
- Miller, Thomas R.
- Stauffer, Kristen A.
- Wozniak, Michael
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출원인 / 주소 |
- International Business Machines Corporation
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대리인 / 주소 |
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인용정보 |
피인용 횟수 :
8 인용 특허 :
16 |
초록
▼
A method of forming an electronic structure, including adhesively coupling a plated metallic layer (e.g. a copper layer) of a plated through hole (PTH) to holefill material (e.g., epoxy resin) distributed within the PTH. The adhesive coupling utilizes an adhesion promoter film on the plated metallic
A method of forming an electronic structure, including adhesively coupling a plated metallic layer (e.g. a copper layer) of a plated through hole (PTH) to holefill material (e.g., epoxy resin) distributed within the PTH. The adhesive coupling utilizes an adhesion promoter film on the plated metallic layer such that the adhesion promoter film is bonded to the resin. The adhesion promoter film may include a metallic oxide layer such as a layer containing cupric oxide and cuprous oxide, which could be formed from bathing a PTH plated with copper in a solution of sodium chlorite. The adhesion promoter film may alternatively include an organometallic layer such as a layer that includes a chemical complex of metal and an organic corrosion inhibitor. The organometallic layer could be formed from bathing the PTH in a bath of hydrogen peroxide, sulfuric acid, and the organic corrosion inhibitor.
대표청구항
▼
1. A method for forming an electronic structure, comprising the steps of providing a substrate and a plated through hole (PTH) through a thickness of the substrate; forming an adhesion promoter film on a plated metallic layer of the PTH, wherein the plated metallic layer includes copper, wherein
1. A method for forming an electronic structure, comprising the steps of providing a substrate and a plated through hole (PTH) through a thickness of the substrate; forming an adhesion promoter film on a plated metallic layer of the PTH, wherein the plated metallic layer includes copper, wherein forming the adhesion promoter film includes chemically cleaning and microetching the plated metallic layer and dipping the substrate in a chlorite bath and dipping the substrate in a reducing solution; and distributing a holefill within the PTH, said holefill including a resin, and bonding the holefill to the adhesion promoter film such that the hole fill mechanically attaches directly of the adhesion promoter film. 2. The method of claim 1, wherein the chlorite bath includes sodium chlorite. 3. The method of claim 1, wherein the reducing solution includes dimethylamine borane. 4. The method of claim 1, wherein the distributing step partially but not completely fills the PTH with said holefill. 5. A method for forming an electronic structure, comprising the steps of providing a substrate and a plated through hole (PTH) through a thickness of the substrate; forming an adhesion promoter film on a plated metallic layer of the PTH, wherein forming the adhesion promoter film includes forming a metallic oxide layer on the plated metallic layer and forming an organometallic layer on the metallic oxide layer; and distributing a holefill within the PTH, said holefill including a resin, and bonding the holefill to the adhesion promoter film. 6. The method of claim 1, wherein the resin includes a composition selected from the group consisting of an epoxy composition, a cyanate composition, and a combination thereof. 7. The method of claim 1, wherein the holefill further includes a particulate composition. 8. The method of claim 1, wherein the resin includes a composition selected from the group consisting of an epoxy composition, a cyanate composition, and a combination thereof. 9. The method of claim 1, wherein the adhesion promoter film includes a mixture of cuprous oxide and cupric oxide. 10. The method of claim 1, wherein the chemically cleaning comprises dipping the substrate in a sodium metasilicate solution. 11. The method of claim 1, wherein the microetching comprises dipping the substrate in a solution having an active ingredient of potassium peroxymonosulfate or sodium peroxymonosulfate. 12. The method of claim 1, wherein the resin includes a composition selected from the group consisting of an epoxy composition, a cyanate composition, and a combination thereof. 13. The method of claim 1, wherein the organometallic layer includes a chemical complex of a metal and an organic corrosion inhibitor. 14. The method of claim 13, wherein the organic corrosion inhibitor is selected from the group consisting of a triazole, a tetrazole, and an imidazole. 15. The method of claim 1, wherein forming the organometallic layer comprises reacting the metallic layer with hydrogen peroxide and an organic corrosion inhibitor. 16. The method of claim 5, wherein the resin includes a composition selected from the group consisting of an epoxy composition, a cyanate composition, and a combination thereof. 17. The method of claim 5, wherein the distributing step partially but not completely fills the PTH with said holefill.
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