IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
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출원번호 |
US-0087860
(2002-03-05)
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우선권정보 |
JP-0164695 (2001-05-31) |
발명자
/ 주소 |
|
출원인 / 주소 |
|
대리인 / 주소 |
Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
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인용정보 |
피인용 횟수 :
25 인용 특허 :
4 |
초록
▼
There is disclosed a manufacturing method for exposure mask, which comprises acquiring a first information showing surface shape of surface of each of a plurality of mask substrates, and a second information showing the flatness of the surface of each of mask substrates before and after chucked on a
There is disclosed a manufacturing method for exposure mask, which comprises acquiring a first information showing surface shape of surface of each of a plurality of mask substrates, and a second information showing the flatness of the surface of each of mask substrates before and after chucked on a mask stage of an exposure apparatus, forming a corresponding relation of each mask substrate, the first information and the second information, selecting the second information showing a desired flatness among the second information of the corresponding relation, and preparing another mask substrate having the same surface shape as the surface shape indicated by the first information in the corresponding relation with the selected second information, and forming a desired pattern on the above-mentioned another mask substrate.
대표청구항
▼
There is disclosed a manufacturing method for exposure mask, which comprises acquiring a first information showing surface shape of surface of each of a plurality of mask substrates, and a second information showing the flatness of the surface of each of mask substrates before and after chucked on a
There is disclosed a manufacturing method for exposure mask, which comprises acquiring a first information showing surface shape of surface of each of a plurality of mask substrates, and a second information showing the flatness of the surface of each of mask substrates before and after chucked on a mask stage of an exposure apparatus, forming a corresponding relation of each mask substrate, the first information and the second information, selecting the second information showing a desired flatness among the second information of the corresponding relation, and preparing another mask substrate having the same surface shape as the surface shape indicated by the first information in the corresponding relation with the selected second information, and forming a desired pattern on the above-mentioned another mask substrate. immobilized thereon at least one capture probe which binds specifically to the labeled probe-analyte complex; illuminating the capture area with excitation radiation, and detecting emission radiation from the capture area, wherein the emission radiation has a shorter wavelength than the excitation radiation. 2. The method of claim 1, wherein the lateral surface is comprised of a chromatographic material. 3. The method of claim 2, wherein the lateral surface is a wick. 4. The method of claim 1, wherein the probes are antibodies or antibody fragments and the analyte is an antigen. 5. The method of claim 1, wherein the capture probe is biotinylated and the up-converting phosphor label is bound to streptavidin or avidin. 6. The method of claim 1, wherein the lateral surface contains at least two distinct mobilizable labeled probes which bind specifically to at least two distinct target analytes to form distinct labeled probe-analyte complexes, wherein the up-converting phosphor labels differ in their absorption and/or emission spectra. 7. The method of claim 1, wherein the target analyte is selected from the group consisting of polynucleotides, polypeptides, viruses, microorganisms, haptens, mammalian cells, steroid hormone, glycoproteins, lipoproteins, biotinylated magnetic beads, prescribed or over-the-counter drugs, illegal substances, intoxicants and drugs of abuse. 8. The method of claim 1, wherein the probes are selected from the group consisting of antibodies, polynucleotides, polypeptide hormones, avidin, streptavidin, Staphylococcus aureus Protein A, lectins, antigens, and mixtures thereof. 9. The method of claim 1, wherein the target analyte is a polynucleotide and the probes are polynucleotides which specifically hybridize to the target polynucleotide. 10. The method of claim 1, wherein the up-converting phosphor label is smaller than about 3 microns in diameter. 11. The method of claim 10, wherein the up-converting phosphor label is smaller than about 1 micron in diameter. 12. The method of claim 11, wherein the up-converting phosphor label is about 0.1 to about 0.5 microns in diameter. 13. The method of claim 1, wherein the up-converting phosphor label comprises a phosphor host material doped with at least one activator couple comprised of an absorber ion and an emitter ion. 14. The method of claim 13, wherein the absorber ion is ytterbium and the emitter ion is selected from the group consisting of erbium, holmium, thulium, and terbium. 15. The method of claim 14, wherein the phosphor host material is selected from the group consisting of oxysulfides, oxyhalides, fluorides, gallates, silicates, aluminates, phosphates, and vanadates. 16. The method of claim 15, wherein the phosphor host material is selected from the group consisting of sodium yttrium fluoride, lanthanum fluoride, lanthanum oxysulfide, yttrium oxysulfide, yttrium fluoride, yttrium gallate, yttrium aluminum garnet, gadolinium fluoride, barium yttrium fluoride, and gadolinium oxysulfide. 17. The method of claim 16, wherein the up-converting phosphor microparticle comprises sodium yttrium fluoride ytterbium erbium or yttrium ytterbium erbium oxysulfide. 18. A method for determining the presence of at least one target analyte in a liquid sample comprising: flowing the liquid sample across a lateral surface to a capture area on the lateral surface, wherein the capture area has immobilized thereon at least one capture probe which binds specifically to the at least one target analyte to form a target analyte-capture probe complex; contacting the target analyte-capture probe complex with at least one labeled probe comprised of an up-converting phosphor label attached to a probe which binds specifically to the target analyte to form a capture probe-target analyte-labeled probe complex; illuminating the capture area with excitation radiation; and detecting emission radiation from the capture area, wherein the emission radiation has a shorter wavelengt h than the excitation radiation. 19. The method of claim 18, wherein the lateral surface is comprised of a chromatographic material. 20. The method of claim 19, wherein the lateral surface is a wick. 21. The method of claim 18, wherein the probes are antibodies or antibody fragments and the analyte is an antigen. 22. The method of claim 18, wherein the capture probe is biotinylated and the up-converting phosphor label is bound to streptavidin or avidin. 23. The method of claim 18, wherein the lateral surface contains at least two distinct mobilizable labeled probes which bind specifically to at least two distinct target analytes to form distinct labeled probe-analyte complexes, wherein the up-converting phosphor labels differ in their absorption and/or emission spectra. 24. The method of claim 18, wherein the target analyte is selected from the group consisting of polynucleotides, polypeptides, viruses, microorganisms, haptens, mammalian cells, steroid hormones, glycoproteins, lipoproteins, biotinylated magnetic beads, prescribed or over-the-counter drugs, illegal substances, intoxicants and drugs of abuse. 25. The method of claim 18, wherein the probes are selected from the group consisting of antibodies, polynucleotides, polypeptide hormones, avidin, streptavidin, Staphylococcus aureus Protein A. lectins, antigens and mixtures thereof. 26. The method of claim 18, wherein the target analyte is a polynucleotide and the probes are polynucleotides which specifically hybridize to the target polynucleotide. 27. The method of claim 18, wherein the up-converting phosphor label is smaller than about 3 microns in diameter. 28. The method of claim 27, wherein the up-converting phosphor label is smaller than about 1 micron in diameter. 29. The method of claim 28, wherein the up-converting phosphor label is about 0.1 to about 0.5 microns in diameter. 30. The method of claim 18, wherein the up-converting phosphor label comprises a phosphor host material doped with at least one activator couple comprised of an absorber ion and an emitter ion. 31. The method of claim 30, wherein the absorber ion is ytterbium and the emitter ion is selected from the group consisting of erbium, holmium, thulium, and terbium. 32. The method of claim 31, wherein the phosphor host material is selected from the group consisting of oxysulfides, oxyhalides, fluorides, gallates, silicates, aluminates, phosphates, and vanadates. 33. The method of claim 32, wherein the phosphor host material is selected from the group consisting of sodium yttrium fluoride, lanthanum fluoride, lanthanum oxysulfide, yttrium oxysulfide, yttrium fluoride, yttrium gallate, yttrium aluminum garnet, gadolinium fluoride, barium yttrium fluoride, and gadolinium oxysulfide. 34. The method of claim 33, wherein the up-converting phosphor label comprises sodium yttrium fluoride ytterbium erbium or yttrium ytterbium erbium oxysulfide. 35. A method for determining the presence of at least one target analyte in a liquid sample comprising: combining a liquid sample with at least one labeled probe to form a liquid mixture comprising a target analyte-labeled probe complex, wherein the at least one labeled probe is comprised of an up-converting phosphor label attached to a probe which binds specifically to the at least one target analyte to form a target analyte-labeled probe complex, flowing the liquid mixture across a lateral surface to a capture area on the lateral surface, wherein the capture area has immobilized thereon at least one capture probe which binds specifically to the target analyte-labeled probe complex, illuminating the capture area with excitation radiation; and detecting emission radiation from the capture area, wherein the emission radiation has a shorter wavelength than the excitation radiation. 36. The method of claim 35, wherein the lateral surface is comprised of a chromatographic material. 37. The method of claim 36, wherein the lateral surface is a wick. 38. The method
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