IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0314169
(1999-05-19)
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발명자
/ 주소 |
- Fishbaine, David
- Case, Steven K.
- Konicek, John P.
- Volkman, Thomas L.
- Cohn, Brian D.
- Jalkio, Jeffrey A.
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출원인 / 주소 |
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대리인 / 주소 |
Dicke, Billig & Czaja, P.A.
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인용정보 |
피인용 횟수 :
10 인용 특허 :
56 |
초록
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The system of the present invention reports a signal related to a physical condition of an object, such as an electronic component, with the most basic realization of the system including a vacuum quill for releasably holding the object and a motion control system for rotating the quill. The inventi
The system of the present invention reports a signal related to a physical condition of an object, such as an electronic component, with the most basic realization of the system including a vacuum quill for releasably holding the object and a motion control system for rotating the quill. The invention includes control electronics coupled to the detector for providing a trigger signal where the detector is oriented to view a stripe in a viewing plane perpendicular to the central axis of the quill, and to provide an image of the stripe. The control electronics sends a plurality of trigger signals to the detector while the motion control system rotates the quill, with each trigger signal triggering the acquisition of another image of a stripe. A processing circuit processes the plurality of images of the stripes to provide the signal related to the physical condition of the object, which can include the orientation or location of the component, the presence or absence of balls on a ball grid array, the height of a specific lead on a leaded component, the distance between the leads on a leaded component or the coplanarity of features on the component. A method for picking and placing components is also disclosed for use with the apparatus of the present invention.
대표청구항
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The system of the present invention reports a signal related to a physical condition of an object, such as an electronic component, with the most basic realization of the system including a vacuum quill for releasably holding the object and a motion control system for rotating the quill. The inventi
The system of the present invention reports a signal related to a physical condition of an object, such as an electronic component, with the most basic realization of the system including a vacuum quill for releasably holding the object and a motion control system for rotating the quill. The invention includes control electronics coupled to the detector for providing a trigger signal where the detector is oriented to view a stripe in a viewing plane perpendicular to the central axis of the quill, and to provide an image of the stripe. The control electronics sends a plurality of trigger signals to the detector while the motion control system rotates the quill, with each trigger signal triggering the acquisition of another image of a stripe. A processing circuit processes the plurality of images of the stripes to provide the signal related to the physical condition of the object, which can include the orientation or location of the component, the presence or absence of balls on a ball grid array, the height of a specific lead on a leaded component, the distance between the leads on a leaded component or the coplanarity of features on the component. A method for picking and placing components is also disclosed for use with the apparatus of the present invention. id adjacent measuring channel. 7. A method as claimed in claim 6, wherein the measuring channels are arranged in at least two adjacent measuring devices and wherein the adjacent measuring devices at least during calibration traverse at least a part of a width of the paper web in the cross direction. 8. A method as claimed in claim 1, wherein the reference sample comprises at least two different sections having different properties or different proportions of the same property. 9. A method as claimed in claim 1, wherein a normal range is determined for an output of the measuring channel, the reference sample is arranged to coincide with the measuring beam of the measuring channel and the output of the measuring channel is read, the output of the measuring channel is compared with the determined normal range and if the output deviates from normal by more than a predetermined amount a fault in connection with the measuring channel is detected. 10. A method as claimed in claim 1, wherein a plurality of adjacent measuring devices are arranged in the cross direction of the paper web. 11. A method as claimed in claim 1, wherein the measuring device traverses at least a portion of the width of the paper web in the cross direction. 12. An apparatus for measuring properties of a paper web, the apparatus comprising at least one measuring device having a transmitter for transmitting a measuring beam at least on one measuring channel and a receiver, the transmitter and the receiver being arranged on the same side of the paper web, the apparatus being arranged to measure at least one property of the paper web simultaneously on at least two measuring channels that are adjacent each other in a cross direction of the paper web, and further comprising at least one reference sample that is traversable in the cross direction of the paper web to carry the reference sample across a path of each of the measuring beams for calibrating the apparatus. 13. An apparatus as claimed in claim 12, wherein the reference sample is arranged to be traversed on a different level than the paper web. 14. An apparatus as claimed in claim 13, wherein the reference sample is arranged to be traversed in the cross direction of the paper web during a paper making process. 15. An apparatus as claimed in claim 14, wherein the apparatus comprises means for ensuring that a distance traveled by the measuring beam is substantially the same in a measuring situation as in a calibration situation. 16. An apparatus as claimed in claim 15, wherein the apparatus comprises a means for controlling the measuring beam in the calibration situation. 17. An apparatus as claimed in claim 16, wherein the means for controlling the measuring beam is a mirror. 18. An apparatus as claimed in claim 12, wherein the reference sample is arranged to be traversed on the same level as that of the paper web. 19. An apparatus as claimed in claim 12, wherein the apparatus comprises at least two adjacent measuring channels measuring the properties of the paper web and at least part of the time measuring a common band of the paper web, and further comprising an edge reference sample arranged at least at one edge of the paper web, wherein an outermost one of the measuring channels is arranged at least during calibration to measure a value of a property of the edge reference sample and thereafter a value of said property of the common band, and means for transferring measuring data from said measurements of the edge reference sample and common band to an adjacent one of the measuring channels which is arranged to measure a value of said property of the common band for calibrating said adjacent measuring channel. 20. An apparatus as claimed in claim 19, wherein the apparatus comprises at least two adjacent measuring devices, the measuring channels are arranged in the adjacent measuring devices, and the apparatus comprises means for making the adjacent measuring devices traverse at least a portion of a width of the paper web in the cross direction. 21. An apparatus as claimed in claim 12, wherein the reference sample comprises at least two different sections having different properties or different proportions of the same property. 22. An apparatus as claimed in claim 12, wherein there are a plurality of adjacent measuring devices in the cross direction of the paper web. 23. An apparatus as claimed in claim 12, wherein the apparatus comprises means for making the measuring device traverse at least a portion of the width of the paper web in the cross direction. 24. An apparatus for measuring properties of a traveling paper web, comprising: a sensor assembly operable to transmit a plurality of measuring beams onto the paper web, the measuring beams impinging on the paper web at a plurality of locations along the paper web in a cross direction thereof, the sensor assembly being further operable to detect each measuring beam as affected by the paper web and to derive a value of a property of the paper web therefrom at each said location; and a reference sample traversable in the cross direction so as to be impinged by each measuring beam in sequence whereby a value of said property of the reference sample is derived for calibrating the sensor assembly, and wherein the reference sample is sized and arranged to be impinged by fewer than all of the measuring beams at all times during traversal of the reference sample in the cross direction, such that measurement of the paper web is carried out by at least one measuring beam at all times during said traversal. 25. The apparatus of claim 24, wherein the reference sample is traversed along a path different from that along which the paper web travels, and further comprising a mechanism for altering a path of each measuring beam such that the measuring beam is transmitted onto the reference sample when the reference sample is traversed. 26. The apparatus of claim 24, wherein the sensor assembly comprises a plurality of transmitters each operable to transmit a measuring beam onto the paper web, and a plurality of receivers for receiving beams resulting from the measuring beams transmitted onto the paper web. 27. The apparatus of claim 26, wherein the transmitters and receivers are on the same side of the paper web. 28. The apparatus of claim 26, wherein the transmitters and receivers are on opposite sides of the paper web. 29. A method for measuring properties of a traveling paper web, comprising: transmitting a plurality of measuring beams from a sensor assembly onto the paper web such that the measuring beams impinge on the paper web at a plurality of locations along the paper web in a cross direction thereof, and detecting each measuring beam as affected by the paper web and deriving a value of a property of the paper web therefrom at each said location; and calibrating the sensor assembly by traversing a reference sample in the cross direction so as to be impinged by each measuring beam in sequence whereby a value of said property of the reference sample is derived and used for calibrating the sensor assembly, and wherein the reference sample is sized and arranged to be impinged by fewer than all of the measuring beams at all times during traversal of the reference sample in the cross direction, such that measurement of the paper web is carried out by at least one measuring beam at all times during said traversal. the first and second points in the shared image; determining a phase difference in the light intensity between the first and second points; rotating the diffraction grating about the predetermined axis; repeating said transmitting operation, said guiding operation, said overlapping operation, said changing operation, and said determining operation; and evaluating the aberration of the optical element by using the determined phase differences. 2. A method for evaluating an aberration of an optical element, said method comprising: transmitting light through the optical element; diffracting the light to obtain a first diffracted light and a second diffracted light; overlapping the first and second diffracted lights to form an image shared by the first and second lights; determining a plurality of points in the shared image, the plurality of points including a first point which is a mid-center of a first line connecting axes of the first and second diffracted lights, a second point which is located on a second line crossing the first line at the first point, a third point which is located on the second line, the second and third points being positioned symmetrical with respect to the first line, fourth and fifth points which are located on the second line and symmetrical on opposite sides of the first line, each of the fourth and fifth points being spaced a distance from the first line, and sixth and seventh points which are located on opposite sides of the first line, each of the sixth and seventh points being spaced the distance from the first line; changing a light intensity at the first to seventh points in the shared image while detecting the light intensity at the first to seventh points; determining a phase in the light intensity at each of the first to seventh points; and evaluating the aberration of the optical element by using the phases at the first to seventh points. 3. The method of claim 2, wherein said evaluating of the aberration comprises: determining a first phase difference Ph(1) in the light intensity between the first and second points, a second phase difference Ph(2) in the light intensity between the second and third points, a third phase difference Ph(3) in the light intensity between the fourth and fifth points, and a fourth phase difference Ph(4) in the light intensity between the sixth and seventh points; determining a magnitude of a coma according to a phase difference obtained by an equation: Phase difference=|Ph(1)|-|Ph(2)|/2; and determining a direction of coma according to a phase difference obtained by another equation: Phase difference=|Ph(4)|-|Ph(3)|. 4. A method for evaluating an aberration of an optical element, said method comprising: transmitting light through the optical element; guiding the light into one of a plurality of gratings respectively located on one of a plurality of regions of a plate to obtain a first diffracted light and a second diffracted light, wherein each of the plurality of gratings has a direction different than a remainder of the plurality of gratings; overlapping the first and second diffracted lights to form an image shared by the first and second diffracted lights; changing a light intensity at first and second points in the shared image while detecting the light intensity at the first and second points in the shared image; and determining a phase difference in the light intensity between the first and second points; repeating said transmitting operation, said guiding operation, said overlapping operation, said changing operation, and said determining operation for each of the plurality of gratings; and evaluating the aberration of the optical element from the phase differences obtained for the plurality of gratings. 5. A method for evaluating an aberration of an optical element, said method comprising: directing a diffraction grating in one of three directions; transmitting light through the optical element; guiding the light into a diffraction grating to obtain a first diffracted light and a second diffracted light; overlapping the first and second lights to form an image shared by the first and second lights; changing a light intensity at first and second points in the shared image while detecting the light intensity at the first and second points in the shared image, the first and second points being located on a line crossing a mid-center of another line connecting centers of the first and second diffracted lights and the line being symmetrical with respect to the another line; determining a phase difference in the light intensity between the first and second points; repeating said directing operation, said transmitting operation, said guiding operation, said overlapping operation, said changing operation, and said determining operation for each of a remainder of the three directions; and evaluating an astigmatism of the optical element from the phase differences obtained in the three directions. 6. The method of 5, further comprising determining a magnitude of the astigmatism from the phase differences in two of the three directions. 7. An apparatus for evaluating an aberration of an optical element, said apparatus comprising: a reflection diffraction grating having a plurality of parallel grooves adapted to diffract light from the optical element into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image; a mechanism adapted to move said reflection diffraction grating in a direction substantially perpendicular to an axis of the light; a mechanism adapted to rotate said reflection diffraction grating about the axis of the light; an image receiver operable to receive the shared image; and a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image. 8. An apparatus for evaluating an aberration of an optical element, said apparatus comprising: a transmission diffraction grating having a plurality of parallel slits adapted to diffract light from the optical element into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image; a mechanism adapted to move said transmission diffraction grating in a direction substantially perpendicular to an axis of the light; a mechanism adapted to rotate said transmission diffraction grating about the axis of the light; an image receiver operable to receive the shared image; and a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image. 9. An apparatus for evaluating an aberration of an optical element, said apparatus comprising: a reflection diffraction grating having a plurality of grooves adapted to diffract light from the optical element into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image, wherein said plurality of grooves in said reflection diffraction grating include a plurality groups of grooves defined in different regions of said reflection diffraction grating, each of said plurality of groups of grooves being directed in a certain direction which is different than any other group of grooves; a mechanism adapted to move said reflection diffraction grating in a direction substantially perpendicular to an axis of the light; an image receiver operable to receive the shared image; and a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image. 10. The apparatus of claim 9, wherein said plurality of groups of grooves in said reflection diffraction grating has first, second and third groups of grooves, said grooves of said second group being angled at +45 degrees with respect to said grooves of said first group and said grooves of s aid third group being angled at -45 degrees with respect to said grooves of said first group. 11. An apparatus for evaluating an aberration of an optical element, said apparatus comprising: a transmission diffraction grating having a plurality of slits adapted to diffract light from the optical element into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image, wherein said plurality of slits in said transmission diffraction grating include a plurality of groups of slits, each of the plurality of groups of slits being directed in a certain direction which is different from any other group of slits; a mechanism adapted to move said transmission diffraction grating in a direction substantially perpendicular to an axis of the light; an image receiver operable to receive the shared image; a mechanism adapted to rotate said transmission diffraction grating about the axis of the light and a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image. 12. The apparatus of claim 11, wherein said plurality of groups of slits in said transmission diffraction grating has first, second and third groups of slits, said slits of said second group being angled at +45 degrees with respect to said slits of said first group and said slits of said third group being angled at -45 degrees with respect to said slits of said first group. 13. An apparatus for correcting an aberration an optical element, said apparatus comprising: a reflection diffraction grating having a plurality of parallel grooves so that light from the optical element is diffracted into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image; a mechanism adapted to move said reflection diffraction grating in a direction substantially perpendicular to an axis of the light; an image receiver operable to receive the shared image; a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image and then evaluate the aberration of the optical element; and a correction mechanism adapted to correct the aberration of the optical element, said correction mechanism having means for changing an angle of the optical element to the axis of the light. 14. An apparatus of claim 13, further comprising a collimator lens adapted to collimate the light which is guided into the optical element, and wherein said correction mechanism further includes means for moving said collimator lens in a direction parallel to the axis of the light. 15. An apparatus for correcting an aberration an optical element, said apparatus comprising: a transmission diffraction grating having a plurality of parallel slits adapted to diffract light from the optical element into a plurality of diffraction lights, the diffraction lights including a first light and a second light partially overlapped to form a shared image; a mechanism adapted to move diffraction grating in a direction substantially perpendicular to an axis of the light; an image receiver operable to receive the shared image; and a processor operable to determine a phase of a light intensity at each of a plurality of points in the shared image and then evaluate the aberration of the optical element; and a correction mechanism adapted to correct the aberration of the optical element, said correction mechanism having means for changing an angle of the optical element to the axis of the light. 16. An apparatus of claim 15, further comprising a collimator lens adapted to collimate the light which is guided into the optical element, and wherein said correction mechanism further includes means for moving said collimator lens in a direction parallel to the axis of the light.
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