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A device for delivering meals at an appropriate temperature comprising: a transport cart equipped with at least one electric energy source, a plurality of plates fastened to said transport cart, each plate comprising at least one thermal energy transfer device operatively connected to the electric e

A device for delivering meals at an appropriate temperature comprising: a transport cart equipped with at least one electric energy source, a plurality of plates fastened to said transport cart, each plate comprising at least one thermal energy transfer device operatively connected to the electric energy source, and a plurality of trays, each tray being removably associated to a plate of said plurality of plates and having at least one seat for housing a container or dish containing a meal to be delivered, the device being characterised in that each plate of said plurality of plates comprises means for automatic measuring of the container or dish temperature, which are operatively connected to the processing means for automatic activation of said at least one thermal energy transfer device respectively for heating or cooling when the temperature measured in the container or dish is respectively higher than a maximum value or lower than a minimum value out of a predetermined temperature range.

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A device for delivering meals at an appropriate temperature comprising: a transport cart equipped with at least one electric energy source, a plurality of plates fastened to said transport cart, each plate comprising at least one thermal energy transfer device operatively connected to the electric e

A device for delivering meals at an appropriate temperature comprising: a transport cart equipped with at least one electric energy source, a plurality of plates fastened to said transport cart, each plate comprising at least one thermal energy transfer device operatively connected to the electric energy source, and a plurality of trays, each tray being removably associated to a plate of said plurality of plates and having at least one seat for housing a container or dish containing a meal to be delivered, the device being characterised in that each plate of said plurality of plates comprises means for automatic measuring of the container or dish temperature, which are operatively connected to the processing means for automatic activation of said at least one thermal energy transfer device respectively for heating or cooling when the temperature measured in the container or dish is respectively higher than a maximum value or lower than a minimum value out of a predetermined temperature range. ing of said spin rate sensors. 2. A spin rate measurement device as defined in claim 1 wherein: a) said spin rate sensors comprise oscillator structures based on the Coriolis principle; b) each said sensor.includes at least two layers; and c) said sensors can be capacitively excited and read. 3. A spin rate measurement device as defined in claim 2 wherein said spin rate sensors comprise oscillator structures that can be capacitively reset. 4. A spin rate measurement device as defined in claim 1, characterized in that electronics of the spin rate sensors, a rotor pick-off and a rotor drive are combined in the interior of said platform. 2, wherein said viscous media has a viscosity such that as a result of said stiction alone a force of at least 1 kPascals is required to separate a 2.54 cm by 2.54 cm square portion of a silicon wafer from said media, the portion having four corners, as measured at one of the corners in connection with peeling the corner away from the substrate. 14. A chuck according to claim 10, wherein said viscous media has a viscosity ranging from 10 to 1,000 mPa-s (milliPascal-second). 15. A chuck according to claim 10, wherein said base includes an opening in said first surface and a passageway in fluid communication said opening, said passageway countable to a source of pressurized fluid, said opening being positioned so as to be aligned with the aperture when the substrate is positioned in a first relationship to said first surface. 16. A bulge testing system for testing a portion of a film of material positioned on a substrate having an aperture positioned adjacent the film, the system comprising: a) a source of pressurized fluid; b) a device for determining deflection of the film portion being bulge tested and providing a first output signal containing information representative of the extent of deflection of the film portion; c) a base having a first surface; and d) a media on said first surface for contacting the substrate, said media inducing stiction with the substrate such that a force of at least 1 KPascals is required to separate a 2.54 cm square portion of a silicon wafer from the media, the portion having four corners, as measured at one of the corners in connection with peeling the corner away from the substrate, said media capable of being easily removed from said substrate upon completion of the bulge testing. 17. A bulge test system according to claim 16, further including a computer connected to said device, said computer being programmed with software for determining properties of the film portion being bulge tested based on said information contained in said first output signal. 18. A system according to claim 16, wherein said media comprises a viscous grease. 19. A system according to claim 18, wherein said viscous grease has a viscosity ranging from 10 to 1,000 mPa-s (milliPascal-second). 20. A system according to claim 16, wherein said media comprises a piece of flexible material. 21. A system according to claim 20, wherein said piece of flexible material has a Shore durometer ranging from 40 to 60. 22. A system according to claim 16, wherein media comprises a piece of flexible material and a viscous grease provided on said flexible material so as to contact the substrate. 23. A method of bulge testing a film comprising the steps of: a) providing a first surface, and a substrate with an aperture and a film extending over the aperture; b) providing a media on said first surface for contacting the substrate; c) inducing stiction between the substrate and the surface such that a force of at least 1 KPascals is required to separate a 2.54 cm by 2.54 cm square portion of a silicon wafer from the media, the portion having four corners, as measured at one of the corners in connection with peeling the corner away from the substrate, said media capable of being easily removed from said substrate upon completion of the bulge testing; d) directing a pressurized fluid through said aperture so as to contact said film and cause it to deflect; and e) determining material properties of the film as a function of pressure of the fluid and deflection of the film. 24. A method according to claim 23, wherein said inducing step c) involves providing a piece of flexible material between the surface and the substrate, the material capable of inducing said stiction. 25. A method according to claim 23, wherein said inducing step c) involves providing a viscous grease between the surface and the substrate, the viscous grease capable of inducing said stiction. 26. A method according to claim 23, wherein said inducing step c) involves providing a piece of flexible material between the surface and the substrate and providing a viscous grease between the material and the substrate, the material and viscous grease capable of inducing said stiction. 27. A method according to claim 23, wherein said pressurized fluid is delivered at a pressure ranging from 0.1 to 40 KPascals. 28. A method according to claim 23, the substrate having a plurality of apertures, each with a film overlying the aperture, wherein the method further comprises the steps of directing the pressurized fluid through each of said plurality of apertures so as to contact the film overlying said each aperture and cause it to deflect, and then determining material properties for each film contacted by the pressurized fluid. 29. A method according to claim 23, further including the step of urging the substrate against the surface with vacuum pressure. 30. A method according to claim 23, further including the step of urging the substrate against the surface with magnetic force. 31. A method of supporting a film to be bulge tested comprising the steps of: a) providing a substrate with an aperture and a film adjacent the aperture; b) positioning the film on a surface; and c) including a media between the film and the substrate to induce stiction forces between the film and the surface such that a force of at least 1 KPascals is required to separate a 2.54 cm by 2.54 cm square portion of a silicon wafer from the media, the portion having four corners, as measured at one of the corners in connection with peeling the corner away from the substrate, the media capable of being easily remove from the substrate upon completion of the bulge testing. 32. A method according to claim 29, wherein said inducing step c) involves providing a piece of flexible material between the surface and the substrate, the material capable of inducing said stiction. 33. A method according to claim 29, wherein said inducing step c) involves providing a viscous grease between the surface and the substrate, the viscous grease capable of inducing said stiction. 34. A method according to claim 29, wherein said inducing step c) involves providing a piece of flexible material between the surface and the substrate and providing a viscous grease between the material and the substrate, the material and viscous grease capable of inducing said stiction. 35. A method according to claim 29, further including the step of urging the substrate against the surface with vacuum pressure. 36. A method according to claim 29, further including the step of urging the substrate against the surface with magnetic force. he region of the measuring tube opposite the first measuring electrode. 3. The apparatus as claimed in claim 2, wherein the two measuring electrodes are diametrically opposite one another in a central region of the measuring tube. 4. The apparatus as claim in claim 3, wherein the at least one test electrode is arranged with respect to the two measuring electrodes in such a way that it is essentially at the same distance from each of the two measuring electrodes. 5. The apparatus as claimed in claim 3, wherein the at least one test electrode includes first and second test electrodes, the measuring tube includes a topmost point and a bottommost point spaced apart from the topmost point, the second test electrode is essentially diametrically opposite the first test electrode, the first test electrode is preferably arranged in the topmost point of the measuring tube and the second test electrode is preferably arranged in the bottommost point of the measuring tube. 6. The apparatus as claimed in claim 3, wherein at least the one test electrode is grounded. 7. The apparatus as claimed in claim 3, wherein the test signal is a symmetrical pulse. 8. The apparatus as claim in claim 2, wherein the at least one test electrode is arranged with respect to the two measuring electrodes in such a way that it is essentially at the same distance from each of the two measuring electrodes. 9. The apparatus as claimed in claim 2, wherein the at least one test electrode includes first and second test electrodes, the measuring tube includes a topmost point and a bottommost point spaced apart from the topmost point, the second test electrode is essentially diametrically opposite the first test electrode, the first test electrode is preferably arranged in the topmost point of the measuring tube and the second test electrode is preferably arranged in the bottommost point of the measuring tube. 10. The apparatus as claimed in claim 2, wherein at least the one test electrode is grounded. 11. The apparatus as claimed in claim 2, wherein the test signal is a symmetrical pulse. 12. The apparatus as claimed in claim 1, wherein the at least one test electrode is substantially the same distance from each of the at least one measuring electrode. 13. The apparatus as claimed in claim 4, wherein the at least one test electrode includes first and second test electrodes, the measuring tube includes a topmost point and a bottommost point spaced apart from the topmost point, the second test electrode is essentially diametrically opposite the first test electrode, the first test electrode is preferably arranged in the topmost point of the measuring tube and the second test electrode is preferably arranged in the bottommost point of the measuring tube. 14. The apparatus as claimed in claim 4, wherein at least the one test electrode is grounded. 15. The apparatus as claimed in claim 12, wherein the test signal is a symmetrical pulse. 16. The apparatus as claimed in claim 1, wherein the at least one test electrode includes first and second test electrodes, the measuring tube includes a topmost point and a bottommost point spaced apart from the topmost point, the second test electrode is essentially diametrically opposite the first test electrode, the first test electrode is preferably arranged in the topmost point of the measuring tube and the second test electrode is preferably arranged in the bottommost point of the measuring tube. 17. The apparatus as claimed in claim 5, wherein one of the first and second test electrodes is grounded. 18. The apparatus as claimed in claim 16, wherein the test signal is a symmetrical pulse. 19. The apparatus as claimed in claim 1, wherein at least one test electrode is grounded. 20. The apparatus as claimed in claim 19, wherein the test signal is a symmetrical pulse. 21. The apparatus as claimed in claim 1, wherein the test signal is a symmetrical pulse. 22. The apparatus as claimed in claim 21, wherein the evaluation/control unit corre