초록 ▼

Deflagration suppression and explosion isolation system (10) is provided for contained hazardous material. Containment structure (12) for a highly flammable, particulate or gaseous material is connected by a conduit (16) to an area (14) for collection or processing of the material. Normally, the par

Deflagration suppression and explosion isolation system (10) is provided for contained hazardous material. Containment structure (12) for a highly flammable, particulate or gaseous material is connected by a conduit (16) to an area (14) for collection or processing of the material. Normally, the particulate gaseous material is conveyed via the conduit (16) to the collection or processing area (14). However, the conduit is of a length and configuration such that upon unforeseen ignition of the material in the containment structure (12), flame and combustion generated pressure resulting from the incipient explosion in the containment structure can course along the conduit (16) connected thereto toward the collection or processing area (14) in the form of a deflagration front that transitions into a detonation stage before reaching the collection or processing area unless adequately suppressed and isolated. A pressure detector (18) is connected to the containment structure (12) for detecting a rapid rise of pressure in the containment structure indicative of an incipient explosion. A suppressant device (20, 22) communicates with the conduit (16) in disposition to direct a fire suppression agent into the conduit to prevent the flame and combustion generated pressures from the incipient explosion in the containment structure from transitioning from a deflagration stage to a detonation stage in the conduit. A gate valve assembly (24) is provided in the conduit downstream of the suppressant device (20, 22) which has a gate member (70) which is closed in tandem with release of the suppressant agent into the conduit to isolate the flame and combustion generated pressures and thereby prevent the flame and combustion generated pressures from entering the collection or processing area (14).

대표청구항 ▼

Deflagration suppression and explosion isolation system (10) is provided for contained hazardous material. Containment structure (12) for a highly flammable, particulate or gaseous material is connected by a conduit (16) to an area (14) for collection or processing of the material. Normally, the par

Deflagration suppression and explosion isolation system (10) is provided for contained hazardous material. Containment structure (12) for a highly flammable, particulate or gaseous material is connected by a conduit (16) to an area (14) for collection or processing of the material. Normally, the particulate gaseous material is conveyed via the conduit (16) to the collection or processing area (14). However, the conduit is of a length and configuration such that upon unforeseen ignition of the material in the containment structure (12), flame and combustion generated pressure resulting from the incipient explosion in the containment structure can course along the conduit (16) connected thereto toward the collection or processing area (14) in the form of a deflagration front that transitions into a detonation stage before reaching the collection or processing area unless adequately suppressed and isolated. A pressure detector (18) is connected to the containment structure (12) for detecting a rapid rise of pressure in the containment structure indicative of an incipient explosion. A suppressant device (20, 22) communicates with the conduit (16) in disposition to direct a fire suppression agent into the conduit to prevent the flame and combustion generated pressures from the incipient explosion in the containment structure from transitioning from a deflagration stage to a detonation stage in the conduit. A gate valve assembly (24) is provided in the conduit downstream of the suppressant device (20, 22) which has a gate member (70) which is closed in tandem with release of the suppressant agent into the conduit to isolate the flame and combustion generated pressures and thereby prevent the flame and combustion generated pressures from entering the collection or processing area (14). erein said outside peripheral surface of the plug base is further equipped with an O-ring for sealingly engaging said bottom cavity for the heater bellow. 5. An apparatus for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 1, wherein said plug and said plug base are fabricated of a rigid plastic or metal. 6. An apparatus for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 1, wherein said plug and said plug base are fabricated of aluminum. 7. A method for cleaning a heater bellow in a chemical vapor deposition chamber comprising the steps of: providing a cleaning apparatus consisting of a plug of elongated shape having a hollow fluid passageway therethrough, said plug having a quick connect fitting at a top end and a threaded pipe fitting at a bottom end, said plug further having a plurality of apertures located in a bottom half of the plug in fluid communication with said hollow fluid passageway, and a plug base having an inside threaded hole for threadingly engaging said bottom end of the plug and for draining away a fluid from a drain pipe in fluid communication with said inside threaded hole, said plug base further having an outside peripheral surface adapted for fitting intimately into a bottom cavity for the heater bellow; mounting said cleaning apparatus into said bottom cavity of the heater bellow; filling through said top end of the plug an oxidizing fluid into said heater bellow and soaking for a sufficient length of time until substantially all residue on an interior wall of said bellow is oxidized; removing said oxidizing fluid from said heater bellow by draining through said drain pipe; filling through said top end of the plug deionized water into said heater bellow and purging an inert gas through said deionized water; removing said deionized water from said heater bellow by draining through said drain pipe; and flowing through said top end of the plug an inert gas or air into said heater bellow to substantially dry said interior wall of the bellow. 8. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of wiping said interior wall of the bellow with a lint-free cloth after said deionized water is removed from the heater bellow. 9. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of flowing N2into said heater bellow to substantially dry said interior wall of the bellow. 10. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of mounting said cleaning apparatus into said bottom cavity of the heater bellow by frictionally engaging said O-ring to an inside wall of the bottom cavity of the bellow. 11. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of soaking said interior wall of the heater bellow with said oxidizing fluid for a time period of at least 15 min. 12. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of soaking said interior wall of the heater bellow with H2O2. 13. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of soaking said interior wall of the heater bellow with H2O2for at least 20 min. 14. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of repeating said filling/removing steps for said oxidizing fluid and said deionized water at least once prior to said drying step by inert gas or air. 15. A method for cleaning a heater bellow in a chemical vapor deposition chamber according to claim 7 further comprising the step of purging Ar gas through s