초록 ▼

An adhesion layer made from Al film or Ti film is formed on Cu electrode pad portions as external connection terminals of a Cu interconnection layer of an LSI formed on the surface layer of a semiconductor substrate. A BLM film having a stacked structure of Cr/Cu/Au or Ti/Cu/Au is formed on the adhe

An adhesion layer made from Al film or Ti film is formed on Cu electrode pad portions as external connection terminals of a Cu interconnection layer of an LSI formed on the surface layer of a semiconductor substrate. A BLM film having a stacked structure of Cr/Cu/Au or Ti/Cu/Au is formed on the adhesion layer. Solder ball bumps made from Pb and Sn are formed on the BLM film. The adhesion layer ensures a high adhesion strength and a high electric contact characteristic between the Cu electrode pad portions and the BLM film, that is, between the Cu electrode pads and the solder ball bumps.

대표청구항 ▼

1. A semiconductor device comprising: A semiconductor substrate in contact with a multilayer interconnection layer, said multilayer interconnection layer comprising an electrode pad portion as an external connection terminal of the multilayer interconnection layer, said multilayer interconnection

1. A semiconductor device comprising: A semiconductor substrate in contact with a multilayer interconnection layer, said multilayer interconnection layer comprising an electrode pad portion as an external connection terminal of the multilayer interconnection layer, said multilayer interconnection layer and said electrode pad portion made from copper or an alloy containing copper; an adhesion layer formed directly on the electrode pad portion such that the adhesion layer is in contact with the electrode pad portion; a barrier layer formed on the adhesion layer, wherein such barrier layer has a stacked structure of at least two different types of metal; and a solder bump formed on the barrier layer. 2. A semiconductor device according to claim 1, wherein said adhesion layer is made from at least one kind of metal selected from a group consisting of Al, Cr, Co, Ni, Mo, Ag, Ta, W and Au, or an alloy containing said at least one kind of metal.