Article comprising a freestanding micro-tube and method therefor
원문보기
IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0660952
(2000-09-13)
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발명자
/ 주소 |
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출원인 / 주소 |
- Agere Systems Inc., Lucent Technologies Inc.
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인용정보 |
피인용 횟수 :
8 인용 특허 :
6 |
초록
▼
A free-standing hollow micro-tube that provides, in some embodiments, a flexible support for a movable platform. The hollow micro-tube is actuated to flex at substantially lower voltages than solid supports. Consequently, articles incorporating the micro-tubes that may be actuated by electrostatic f
A free-standing hollow micro-tube that provides, in some embodiments, a flexible support for a movable platform. The hollow micro-tube is actuated to flex at substantially lower voltages than solid supports. Consequently, articles incorporating the micro-tubes that may be actuated by electrostatic forces, such as an XY translation stage and an array of pedestal mirrors, operate at reduced voltages.
대표청구항
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1. An article comprising: a base; a hollow shaft depending, at a first end thereof, from said base, wherein: said hollow shaft is defined by a wall; and said wall has a thickness that is less than about 5 microns; and a platform depending from a second end of said hollow shaft. 2. The art
1. An article comprising: a base; a hollow shaft depending, at a first end thereof, from said base, wherein: said hollow shaft is defined by a wall; and said wall has a thickness that is less than about 5 microns; and a platform depending from a second end of said hollow shaft. 2. The article of claim 1 wherein said base comprises silicon. 3. The article of claim 2 wherein said silicon comprises a handle part of a silicon-on-insulator wafer. 4. The article of claim 1 wherein said wall is electrically conductive. 5. The article of claim 1 wherein said wall comprises polysilicon. 6. The article of claim 1 wherein said platform comprises silicon. 7. The article of claim 6 wherein said silicon comprises a thin silicon layer of a silicon-on-insulator wafer. 8. The article of claim 1 further comprising at least one electrode that is disposed on said base near said platform. 9. The article of claim 1 further comprising four electrodes that are disposed on said base near said platform. 10. The article of claim 8 further comprising a controlled voltage source that is electrically connected to said electrode. 11. The article of claim 1 wherein said platform is reflective, and further comprising at least one electrode disposed on said base beneath said platform. 12. The article of claim 11 wherein said hollow shaft and said platform depending therefrom collectively define a first pedestal mirror, said article further comprising a plurality of pedestal mirrors disposed on said base, wherein said first pedestal mirror and said plurality of pedestal mirrors are organized in an array. 13. The article of claim 12 wherein the article is an optical cross connect. 14. The article of claim 1 further comprising a first sidewall depending from said platform along a first edge thereof and projecting towards, but not touching, said base. 15. The article of claim 14 further comprising a first electrode disposed on said base but electrically insulated therefrom, wherein, a surface of said first electrode is disposed in opposed and spaced relation to said first sidewall. 16. The article of claim 15 further comprising: a second sidewall, third sidewall and fourth sidewall depending from said platform along respective second, third and fourth edges thereof, said second sidewall, third sidewall and fourth sidewall projecting towards, but not touching, said base; and a second electrode, third electrode and fourth electrode disposed on said base but electrically insulated therefrom, wherein: a surface of said second electrode is disposed in opposed and spaced relation to said second sidewall; a surface of said third electrode is disposed in opposed and spaced relation to said third sidewall; and a surface of said fourth electrode is disposed in opposed and spaced relation to said fourth sidewall. 17. An article comprising: a base; a hollow shaft depending, at a first end thereof, from said base, wherein: said hollow shaft is defined by a wall; and said wall comprises polysilicon; and a platform depending from a second end of said hollow shaft. 18. A method comprising: forming a hole in a substrate, said hole defining a cylindrical wall within said substrate; depositing material on said cylindrical wall to a thickness that is less than a radius of said hole; removing a portion of said substrate surrounding said cylindrical wall, thereby releasing a micro-tube depending, at a first end thereof, from said base; and positioning a platform to depend from a second end of said micro-tube. 19. The method of claim 18 wherein said step of forming comprises etching said hole using deep ion etching. 20. The method of claim 19 wherein said substrate comprises silicon-on-insulator. 21. The method of claim 18 wherein said material is polysilicon.
이 특허에 인용된 특허 (6)
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이 특허를 인용한 특허 (8)
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Przybyla,James R.; Faase,Kenneth; Jilani,Adel; McKinnell,James C.; Nikkel,Eric L.; Piehl,Arthur; Yeh,Bao Sung Bruce; Monroe,Michael G., Flexures.
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Dyer, Thomas W.; Toomey, James J., Method of patterning semiconductor structure and structure thereof.
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Dyer, Thomas W.; Toomey, James J., Method of patterning semiconductor structure and structure thereof.
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Lee, Chris Seung Bok, Microelectromechanical system with balanced center of mass.
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Hichwa, Bryant P.; Foster, John S.; Martin, Richard T.; Rubel, Paul J.; Stocker, John W.; Summers, Jeffery F., Optical cross-connect with magnetic micro-electro-mechanical actuator cells.
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Sniegowski, Jeffry J.; Rodgers, M. Steven, Surface micromachined optical system with reinforced mirror microstructure.
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Domash,Lawrence H.; Wagner,Matthias, Tunable dispersion compensator.
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Ma,Eugene Yi Shan; Cohen,Mitchell S., Tunable optical filter with heater on a CTE-matched transparent substrate.
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