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Integrated circuit bonding pads including conductive layers with arrays of unaligned spaced apart insulating islands therein and methods of forming same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-023/48
  • H01L-023/52
  • H01L-029/40
출원번호 US-0745241 (2000-12-21)
우선권정보 KR-0062154 (1999-12-24)
발명자 / 주소
  • Lee, Soo-cheol
  • Ahn, Jong-hyon
  • Son, Kyoung-mok
  • Shin, Heon-jong
  • Lee, Hyae-ryoung
  • Kim, Young-pill
  • Jung, Moo-jin
  • Wang, Son-jong
  • Yoo, Jae-Cheol
출원인 / 주소
  • Samsung Electronics Co.
대리인 / 주소
    Myers Bigel Sibley & Sajovec
인용정보 피인용 횟수 : 16  인용 특허 : 22

초록

Bonding pads for integrated circuits include first and second spaced apart conductive layers, a third continuous conductive layer between the first and second spaced apart and an array of unaligned spaced apart insulating islands in the third continuous conductive layer and extending therethrough su

대표청구항

Bonding pads for integrated circuits include first and second spaced apart conductive layers, a third continuous conductive layer between the first and second spaced apart and an array of unaligned spaced apart insulating islands in the third continuous conductive layer and extending therethrough su

이 특허에 인용된 특허 (22)

  1. Chittipeddi Sailesh ; Ryan Vivian, Bond pad design for integrated circuits.
  2. Wong Richard J., Bond pad having vias usable with antifuse process technology.
  3. Zhao Bin, Bonding pad and support structure and method for their fabrication.
  4. Hsiao Ming-Shan,TWX, Bonding pad structure and method thereof.
  5. Heim Dorothy A. (San Jose CA), Composite bond pads for semiconductor devices.
  6. Henson Matthew Brady, Method and apparatus for testing an integrated circuit.
  7. Shiue Ruey-Yun (Hsin-Chu TWX) Wu Wen-Teng (Hsin-Chu TWX) Shieh Pi-Chen (Hsinchu TWX) Liu Chin-Kai (Hsin-Chu TWX), Method of forming bond pad structure for the via plug process.
  8. Osann ; Jr. Robert ; Eltoukhy Shafy, Methods and apparatuses for binning partially completed integrated circuits based upon test results.
  9. Eichelberger Charles W. (Schenectady NY), Multichip integrated circuit modules.
  10. Hsuan Min-Chih,TWX ; Liou Fu-Tai,TWX, Package-free bonding pad structure.
  11. Bryant Frank R. (Denton TX) Chen Fusen E. (Milpitas CA), Semiconductor bond pad structure and method.
  12. Noriaki Fujiki JP; Takashi Yamashita JP; Shigeru Harada JP; Kazunobu Miki JP, Semiconductor device.
  13. Tanaka Kazuo,JPX, Semiconductor device and a method for making the same that provide arrangement of a connecting region for an external connecting terminal.
  14. Fujiki Noriaki,JPX ; Yamashita Takashi,JPX, Semiconductor device and bonding pad structure therefor.
  15. Ito Kazunori,JPX ; Irinoda Mitsugu,JPX ; Ueno Kaichi,JPX ; Ishida Mamoru,JPX ; Kuroda Takahiko,JPX, Semiconductor device and manufacturing method for the same.
  16. Sato Hisakatsu,JPX, Semiconductor device having a multi-latered wiring structure.
  17. Satoh Shinichi (Hyogo JPX) Ozaki Hiroji (Hyogo JPX) Kimura Hiroshi (Hyogo JPX) Wakamiya Wataru (Hyogo JPX) Tanaka Yoshinori (Hyogo JPX), Semiconductor device having bonding pad comprising buffer layer.
  18. Lee Sueng-Rok,KRX ; Kim Myung-Sung,KRX ; Lee Yunhee,KRX ; Kim Manjun,KRX, Semiconductor device having multi-layered pad and a manufacturing method thereof.
  19. Nozaki Masahiko (Hyogo JPX), Semiconductor device structure including multiple interconnection layers with interlayer insulating films.
  20. Abe Masahiro (Yokohama JPX) Aoyama Masaharu (Fujisawa JPX) Ajima Takashi (Kamakura JPX) Yonezawa Toshio (Yokosuka JPX), Semiconductor device with an improved bonding section.
  21. Lu Chang-Ming,TWX ; Lu Shu-Ying,TWX, Structure of a bonding pad for semiconductor devices.
  22. Moslehi Mehrdad M., Ultra high-speed chip semiconductor integrated circuit interconnect structure and fabrication method using free-space dielectrics.

이 특허를 인용한 특허 (16)

  1. Hung,Meng Chi; Hou,Shang Yung; Jeng,Shin Puu, Bonding pad structure.
  2. Hung,Meng Chi; Hou,Shang Yung; Jeng,Shin Puu, Bonding pad structure.
  3. Venkitachalam, Girish; Rahim, Irfan; McElheny, Peter John, Integrated circuit bond pad structures.
  4. Kuo,Yian Liang; Lin,Yu Chang, Integrated circuit package bond pad having plurality of conductive members.
  5. Singh,Inderjit; Marks,Howard Lee; Greco,Joseph David, Pad over active circuit system and method with frame support structure.
  6. Singh,Inderjit; Marks,Howard Lee; Greco,Joseph David, Pad over active circuit system and method with meshed support structure.
  7. Chen, Yu-Kai; Hsu, Yeh-Chi, Pad structure, circuit carrier and integrated circuit chip.
  8. Yamazaki, Yasushi, Semiconductor device having a bonding pad structure including an annular contact.
  9. Takemura, Koji; Hirano, Hiroshige; Takahashi, Masao; Sano, Hikari; Itoh, Yutaka; Koike, Koji, Semiconductor device having a pad and plurality of interconnects.
  10. Liang, Zhongning; Lous, Erik Jan, Semiconductor device with isolated intermetal dielectrics.
  11. Hashimoto, Shin; Mimura, Tadaaki, Semiconductor device with multilayered metal pattern.
  12. Hashimoto,Shin; Mimura,Tadaaki, Semiconductor device with multilayered metal pattern.
  13. Kwon, Dong Whee; Lee, Jin Hyuk; Song, Yun Heub; Kang, Sa Yoon, Semiconductor devices with bonding pads having intermetal dielectric layer of hybrid configuration and methods of fabricating the same.
  14. Saito,Hitoshi, Semiconductor element and manufacturing method thereof.
  15. Saito,Hitoshi, Semiconductor element and manufacturing method thereof.
  16. Davis, Charles R.; Hawken, David L.; Jung, Dae Young; Landers, William F.; Questad, David L., Unique feature design enabling structural integrity for advanced low k semiconductor chips.
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