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Liquid dispensing system with enhanced filter 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F04B-053/00
출원번호 US-0112661 (2002-03-28)
발명자 / 주소
  • Martin, Carl A.
  • Foersterling, Vernon H.
  • Hadzidedic, Darko
  • Savard, Raymond T.
  • Minor, Gary
출원인 / 주소
  • Integrated Designs, L.P.
대리인 / 주소
    Hubbard, Marc A.Munsch Hardt Kopf & Harr, P.C.
인용정보 피인용 횟수 : 41  인용 특허 : 13

초록 ▼

A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter

대표청구항 ▼

A system and method for reducing the time for charging a filter in a liquid dispensing system, such as one utilizing a positive displacement pump, is disclosed. The filter is located at the input side of the pump between the source of the liquid and the pump. In order to prevent air from the filter

이 특허에 인용된 특허 (13)

  1. Hauser Hugo (Palo Alto CA), Bellows-type pump and metering system.
    상세보기
  2. Yajima Takeo,JPX, Chemical liquid supply method and apparatus thereof.
    상세보기
  3. Bailey David C. ; Martin Carl A., Dual stage pump and filter system with control valve between pump stages.
    상세보기
  4. Bailey David C. (San Jose CA) Martin Carl A. (San Jose CA), Dual stage pump system with pre-stressed diaphragms and reservoir.
    상세보기
  5. Bailey David C. (San Jose CA) Raphael Ian R. (Campbell CA), Filtering and dispensing system.
    상세보기
  6. Snodgrass Ocie T. (Garland TX) Farney Michael K. (Perryton TX) Gibson Gregory M. (Dallas TX), Filtering and dispensing system with independently activated pumps in series.
    상세보기
  7. Greer Mark R., Fluid compressor with seal scavenge and method.
    상세보기
  8. Snodgrass Ocie T. (Garland TX) Farney Michael K. (Irving TX) Gibson Gregory M. (Dallas TX), Fluid dispensing system.
    상세보기
  9. Snodgrass Ocie T. ; Farney Michael K. ; Gibson Gregory M., Fluid dispensing system having independently operated pumps.
    상세보기
  10. Burch Daniel E. (Lewisville TX), Liquid dispensing system.
    상세보기
  11. Ohlrogge Klaus (Geesthacht DEX) Wind Jan (Barsbuttel DEX) Burmeister Michael (Lauenburg DEX), Method and device for separating gas mixtures formed above liquids.
    상세보기
  12. Bailey David C. (San Jose CA) Martin Carl A. (San Jose CA), Precision liquid dispenser.
    상세보기
  13. Pecen Roger P. (Michigan City IN) Hartog Richard G. (Michigan City IN), Pressurized purging of a liquid drain for a vacuum system.
    상세보기

이 특허를 인용한 특허 (41)

  1. Manzarek, Donovan K.; Vines, John C.; Laessle, John, Apparatus and method for the remote monitoring, viewing and control of a semiconductor process tool.
    상세보기
  2. Gibson,Gregory M., Apparatus and methods for pumping high viscosity fluids.
    상세보기
  3. Park, Jin Jun; Yun, Suk Fill, Apparatus for dispensing photo-resist in semiconductor device fabrication equipment.
    상세보기
  4. Kim, Jang Seok, Apparatus for monitoring discharge of photoresist.
    상세보기
  5. Kelekar, Rajesh, Calibration of a chemical dispense system.
    상세보기
  6. Udagawa, Seiichiro, Chemical liquid apparatus and deaerating method.
    상세보기
  7. Yajima, Takeo, Chemical liquid supply apparatus and a chemical liquid supply method.
    상세보기
  8. Cedrone, James; Gonnella, George, Error volume system and method for a pump.
    상세보기
  9. Yajima, Takeo, Filter unit, chemical liquid supply system, and chemical liquid supply method.
    상세보기
  10. Hiranaga,Hajime; Hoshino,Tatsuya, Filters.
    상세보기
  11. Hiranga,Hajime; Hoshino,Tatauya; Hiromichi,Itoh, Filtration systems and fitting arrangements for filtration systems.
    상세보기
  12. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
    상세보기
  13. Cedrone, James; McLoughlin, Robert F.; Gonnella, George, I/O systems, methods and devices for interfacing a pump controller.
    상세보기
  14. Cedrone, James; Gonnella, George; Gashgaee, Iraj; Stankowski, Ralph J., Method and system for high viscosity pump.
    상세보기
  15. Gashgaee, Iraj, O-ring-less low profile fittings and fitting assemblies.
    상세보기
  16. Kim,Yong Kyung, Photoresist supply apparatus and method of controlling the operation thereof.
    상세보기
  17. Kim,Yong Kyung, Photoresist supply apparatus and method of controlling the operation thereof.
    상세보기
  18. Zagars,Raymond A.; McLoughlin,Robert F., Pump controller for precision pumping apparatus.
    상세보기
  19. Vines, John C.; Laessle, John, Pump having an automated gas removal and fluid recovery system and method.
    상세보기
  20. Vines, John C.; Laessle, John, Pump having an automated gas removal and fluid recovery system and method using a gas removal reservoir having an internal partition.
    상세보기
  21. Vines, John C.; Laessle, John, Pump system and method having a quick change motor drive.
    상세보기
  22. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with onboard electronics.
    상세보기
  23. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
    상세보기
  24. Cedrone, James; Gonnella, George; Gashgaee, Iraj, System and method for a pump with reduced form factor.
    상세보기
  25. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
    상세보기
  26. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for a variable home position dispense system.
    상세보기
  27. Gonnella, George; Cedrone, James, System and method for control of fluid pressure.
    상세보기
  28. Niermeyer,J. Karl; McLoughlin,Robert F.; Smith,Joseph E., System and method for controlled mixing of fluids via temperature.
    상세보기
  29. Cedrone, James; Gonnella, George; Zagars, Raymond A.; McLoughlin, Robert F., System and method for correcting for pressure variations using a motor.
    상세보기
  30. Gonnella, George L.; Cedrone, James, System and method for monitoring operation of a pump.
    상세보기
  31. Gonnella, George; Cedrone, James, System and method for monitoring operation of a pump.
    상세보기
  32. Gonnella, George; Cedrone, James, System and method for monitoring operation of a pump.
    상세보기
  33. Mcloughlin, Robert F., System and method for multiplexing setpoints.
    상세보기
  34. Magoon, Paul; Gonnella, George; Cedrone, James, System and method for operation of a pump.
    상세보기
  35. Gonnella, George; Cedrone, James; Gashgaee, Iraj, System and method for position control of a mechanical piston in a pump.
    상세보기
  36. Gonnella, George; Cedrone, James; Gashgaee, Iraj, System and method for position control of a mechanical piston in a pump.
    상세보기
  37. Cedrone, James; Gonnella, George, System and method for pressure compensation in a pump.
    상세보기
  38. Cedrone, James; Gonnella, George L., System and method for pressure compensation in a pump.
    상세보기
  39. Cedrone, James; Gonnella, George L., System and method for pressure compensation in a pump.
    상세보기
  40. Gonnella, George; Cedrone, James; Gashgaee, Iraj; Magoon, Paul, System and method for valve sequencing in a pump.
    상세보기
  41. Laverdiere, Marc; Cedrone, James; Gonnella, George; Gashgaee, Iraj; Magoon, Paul; King, Timothy J., System and method for variable dispense position.
    상세보기

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