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Low pressure vapor phase deposition of organic thin films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/24
출원번호 US-0125400 (2002-04-19)
발명자 / 주소
  • Forrest, Stephen R.
  • Burrows, Paul E.
  • Ban, Vladimir S.
출원인 / 주소
  • The Trustees of Princeton University
대리인 / 주소
    Kenyon & Kenyon
인용정보 피인용 횟수 : 6  인용 특허 : 41

초록 ▼

Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuse

대표청구항 ▼

Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuse

이 특허에 인용된 특허 (41)

  1. Iwasaki Masanobu (Hyogo JPX) Itoh Hiromi (Hyogo JPX) Tokui Akira (Hyogo JPX) Mitsui Katsuyoshi (Hyogo JPX) Tsukamoto Katsuhiro (Hyogo JPX), Apparatus for forming a thin film on surface of semiconductor substrate.
    상세보기
  2. Bean John C. (New Providence NJ), Apparatus for simultaneous molecular beam deposition on a plurality of substrates.
    상세보기
  3. Thompson Mark ; You Yujian ; Petasis Nicos A. ; Burrows Paul E. ; Forrest Stephen R., Azlactone-related dopants in the emissive layer of an OLED.
    상세보기
  4. Staring Aemilianus G. J. (Eindhoven NLX) Broer Dirk J. (Eindhoven NLX) Demandt Robert J. C. E. (Eindhoven NLX), CVD method of providing a film of conjugated, substituted or unsubstituted poly(p-phenylene vinylene) on a substrate.
    상세보기
  5. Wadley Haydn N. G. (Keswick VA) Groves James F. (Charlottesville VA), Directed vapor deposition of electron beam evaporant.
    상세보기
  6. Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., Displays having mesa pixel configuration.
    상세보기
  7. Forrest Stephen R. ; Burrows Paul, Driving circuit for stacked organic light emitting devices.
    상세보기
  8. Tang Ching W. (Rochester NY) Chen Chin H. (Fairport NY) Goswami Ramanuj (Rochester NY), Electroluminescent device with modified thin film luminescent zone.
    상세보기
  9. Thompson Mark E., Electron transporting and light emitting layers based on organic free radicals.
    상세보기
  10. Jones Philip J., Flexible electrode-bearing article.
    상세보기
  11. Thompson Mark E. ; Forrest Stephen R. ; Burrows Paul, High contrast transparent organic light emitting device display.
    상세보기
  12. Bulovic Vladimir ; Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., High efficiency organic light emitting devices with light directing structures.
    상세보기
  13. Bulovic Vladimir ; Forrest Stephen R. ; Burrows Paul ; Garbuzov Dmitri Z., High reliability, high efficiency, integratable organic light emitting devices and methods of producing same.
    상세보기
  14. Garbuzov Dmitri Z. ; Forrest Stephen R. ; Burrows Paul, Light emitting device with stack of OLEDS and phosphor downconverter.
    상세보기
  15. Forrest Stephen R. ; Burrows Paul ; Garbuzov Dimitri Z., Light emitting devices having high brightness.
    상세보기
  16. Thompson Mark E. ; Cronin Jon A. ; Forrest Stephen R. ; Burrows Paul, Materials for multicolor light emitting diodes.
    상세보기
  17. Desu Seshu B. (Blacksburg VA) Peng Chien-Hsiung (Blacksburg VA), Metalorganic chemical vapor deposition of ferroelectric thin films.
    상세보기
  18. Schmitt Jerome J. (265 College St. (12N) New Haven CT 06510), Method and apparatus for the deposition of solid films of a material from a jet stream entraining the gaseous phase of s.
    상세보기
  19. Forrest Stephen R. (Princeton NJ) Ban Vladimir S. (Princeton NJ) Burrows Paul E. (Princeton NJ) Schwartz Jeffrey (Princeton NJ), Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-li.
    상세보기
  20. Burrows Paul ; Forrest Stephen R. ; Shen Zilan, Method for depositing indium tin oxide layers in organic light emitting devices.
    상세보기
  21. Klinedinst Keith A. (Marlboro MA) Gary Richard A. (Everett MA) Lichtensteiger Silvia E. (Acton MA), Method for making moisture insensitive zinc sulfide based luminescent materials.
    상세보기
  22. Stephen Ross Forrest ; Mark Edward Thompson ; Paul Edward Burrows ; Dennis Matthew McCarty ; Linda Susan Sapochak ; Jon Andrew Cronin, Mixed vapor deposited films for electroluminescent devices.
    상세보기
  23. Ashizawa Yasuo (Yokohama JPX) Sugiyama Naoharu (Yokohama JPX), Molecular beam epitaxial growth apparatus.
    상세보기
  24. Thompson Mark E. ; Forrest Stephen R., Multicolor display devices.
    상세보기
  25. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
    상세보기
  26. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
    상세보기
  27. Thomson Mark E. ; Koene Bryan E. ; Loy Douglas E., OLEDs containing thermally stable asymmetric charge carrier materials.
    상세보기
  28. Namiki Tohru (Tsurugashima JPX) Sato Hitoshi (Tsurugashima JPX) Nagayama Kenichi (Tsurugashima JPX) Watanabe Teruichi (Tsurugashima JPX), Organic electroluminescent device.
    상세보기
  29. Forrest Stephen ; Burrows Paul ; Thompson Mark E. ; Bulovic Vladimir, Organic light emitting device containing a hole injection enhancement layer.
    상세보기
  30. Thompson Mark E. ; Forrest Stephen R. ; Burrows Paul E. ; You Yujian ; Shoustikov Andrei, Organic light emitting devices containing a metal complex of 5-hydroxy-quinoxaline as a host material.
    상세보기
  31. Forrest Stephen R. ; Burrows Paul E. ; Bulovic Vladimir ; Garbuzov Dmitri Z., Organic luminescent coating for light detectors.
    상세보기
  32. Kozlov Vladimir ; Forrest Stephen R. ; Burrows Paul ; Bulovic Vladimir, Organic semiconductor laser.
    상세보기
  33. Goldman Allen M. (Mendota Heights MN) Berkley Dale D. (Minneapolis MN) Johnson Burgess R. (Minneapolis MN), Preparation of superconducting oxide films by reactive evaporation using ozone.
    상세보기
  34. Toyotama Hideki (Saitama JPX), Process for preparing ultrafine particles of organic compounds.
    상세보기
  35. Burrows Paul ; Forrest Stephen R. ; Thompson Mark E., Red-emitting organic light emitting devices (OLED's).
    상세보기
  36. Shen Zilan ; Forrest Stephen R. ; Burrows Paul, Saturated full color stacked organic light emitting devices.
    상세보기
  37. Burrows Paul ; Forrest Stephen R., Stacked organic light emitting devices.
    상세보기
  38. Forrest Stephen R. (Princeton NJ) Thompson Mark E. (Anaheim Hills CA) Burrows Paul E. (Princeton NJ) Bulovic Vladimir (Metuchen NJ) Gu Gong (Princeton NJ), Transparent contacts for organic devices.
    상세보기
  39. Gu Gong ; Burrows Paul ; Forrest Stephen R., Vacuum deposited, non-polymeric flexible organic light emitting devices.
    상세보기
  40. Mikami Akiyoshi (Yamatotakada JPX) Ogura Takashi (Nara JPX) Terada Kousuke (Tenri JPX) Yoshida Masaru (Nara JPX) Yamashita Takuo (Tenri JPX) Tanaka Koichi (Nara JPX) Okibayashi Katsushi (Sakurai JPX), Vapor deposition apparatus for using solid starting materials.
    상세보기
  41. Miyagi Katsushin (Sagamihara JPX) Ohsawa Tetsu (Sagamihara JPX), Vertical treating apparatus having a restricting means for avoiding misalignment.
    상세보기

이 특허를 인용한 특허 (6)

  1. J?rgensen, Holger; Strauch, Gerhard Karl; Schwambera, Markus, Method and device for depositing in particular organic layers using organic vapor phase deposition.
    상세보기
  2. Baltussen, Sander, Method and system for realizing a vacuum in a vacuum chamber.
    상세보기
  3. Bremser, Michael; Dauelsberg, Martin; Strauch, Gerhard Karl, Method for depositing in particular crystalline layers, and device for carrying out the method.
    상세보기
  4. Hirakata, Yoshiharu; Yamazaki, Shunpei, Method for manufacturing semiconductor device including organic semiconductor.
    상세보기
  5. Grace, Jeremy M.; Long, Michael, Two-dimensional aperture array for vapor deposition.
    상세보기
  6. Won,Tae Kyung; Yadav,Sanjay, Water-barrier performance of an encapsulating film.
    상세보기

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