초록 ▼

A process for making thin-film batteries including the steps of cleaning a glass or silicon substrate having an amorphous oxide layer several microns thick; defining with a mask the layer shape when depositing cobalt as an adhesion layer and platinum as a current collector; using the same mask as th

A process for making thin-film batteries including the steps of cleaning a glass or silicon substrate having an amorphous oxide layer several microns thick; defining with a mask the layer shape when depositing cobalt as an adhesion layer and platinum as a current collector; using the same mask as the preceding step to sputter a layer of LiCoO2on the structure while rocking it back and forth; heating the substrate to 300° C. for 30 minutes; sputtering with a new mask that defines the necessary electrolyte area; evaporating lithium metal anodes using an appropriate shadow mask; and, packaging the cell in a dry-room environment by applying a continuous bead of epoxy around the active cell areas and resting a glass slide over the top thereof. The batteries produced by the above process are disclosed.

대표청구항 ▼

1. A thin-film battery structure comprising: a. an adhesion layer of cobalt deposited on a non-metallic substrate; b. a current collector layer of platinum deposited over said adhesion layer, wherein during the formation of said adhesion layer and said collector layer, said substrate is kept sta

1. A thin-film battery structure comprising: a. an adhesion layer of cobalt deposited on a non-metallic substrate; b. a current collector layer of platinum deposited over said adhesion layer, wherein during the formation of said adhesion layer and said collector layer, said substrate is kept stationary; c. a cathode layer sputtered over said adhesion layer and current collector layer, which layer is formed of a thin-film solid state material, wherein during formation of said cathode layer said substrate is rocked back and forth so as to create an ovular area within which the cathode has desired characteristics, including nanocrystalline grains and proper crystallographic orientation on the substrate; d. a lithium based solid state electrolyte layer sputtered from over said cathode layer; e. a lithium based metal anode formed over said electrolyte layer by the use of an appropriate shadow mask; f. an anode lead configured to connect said anode layer to external circuitry; g. a cathode lead configured to connect said cathode layer to external circuitry; and h. a package sealing and protecting said structure. 2. A thin-film battery structure comprising: a. an adhesion layer formed over a non-metallic substrate; b. a current collector layer formed over said adhesion layer; c. a cathode layer comprising a thin-film solid state material formed over said collector layer; d. a lithium-based solid state electrolyte layer formed over said cathode layer; e. a lithium metal anode formed over said electrolyte layer utilizing an appropriate mask; f. an anode lead configured to connect said anode layer to external circuitry; and, g. a cathode lead configured to connect said cathode layer to external circuitry. 3. The structure of claim 2, said substrate comprising one of glass and silicon. 4. The structure of claim 2, further comprising an amorphous oxide layer formed on said substrate. 5. The structure of claim 2, said adhesion layer comprising cobalt. 6. The structure of claim 2, said current collector comprising platinum. 7. The structure of claim 2, said mask comprising a photoresist base layer.