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A fluid mass flow control apparatus, particularly useful for controlling low flow rates of fluids used in semiconductor manufacturing processes, comprises a first elongated flow tube connected to an inlet fitting and to a capsule like valve housing and a second elongated tube connected to the inlet

A fluid mass flow control apparatus, particularly useful for controlling low flow rates of fluids used in semiconductor manufacturing processes, comprises a first elongated flow tube connected to an inlet fitting and to a capsule like valve housing and a second elongated tube connected to the inlet fitting and the valve housing and including a flow sensor. The valve housing is connected to a magnetostrictive actuator including an elongated actuator member disposed in a conduit connected to the valve housing and serving as part of the fluid flow path through the apparatus. An electromagnetic coil is disposed about the conduit and the actuator and is responsive to energization to effect controlled elongation of the actuator to control the position of a valve closure member disposed in the valve housing. Adjustments to full-scale flow ranges of the apparatus may be obtained by inserting a tube or wire in the flow sensor tube to act as a flow restrictor.

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A fluid mass flow control apparatus, particularly useful for controlling low flow rates of fluids used in semiconductor manufacturing processes, comprises a first elongated flow tube connected to an inlet fitting and to a capsule like valve housing and a second elongated tube connected to the inlet

A fluid mass flow control apparatus, particularly useful for controlling low flow rates of fluids used in semiconductor manufacturing processes, comprises a first elongated flow tube connected to an inlet fitting and to a capsule like valve housing and a second elongated tube connected to the inlet fitting and the valve housing and including a flow sensor. The valve housing is connected to a magnetostrictive actuator including an elongated actuator member disposed in a conduit connected to the valve housing and serving as part of the fluid flow path through the apparatus. An electromagnetic coil is disposed about the conduit and the actuator and is responsive to energization to effect controlled elongation of the actuator to control the position of a valve closure member disposed in the valve housing. Adjustments to full-scale flow ranges of the apparatus may be obtained by inserting a tube or wire in the flow sensor tube to act as a flow restrictor. Systems in Poly(dimethylsiloxane)", (Dec 1998) Analytical Chemistry 70:4974-4984. Grzybowski, B. A., et al., "Generation of Micrometer-Sized Patterns for Microanalytical Applications Using a Laser Direct-Write Method and Microcontact Printing", (Nov 1998) Analytical Chemistry 70:4645-4652. Gonzalez, C., et al., "Fluidic interconnects for modular assembly of chemical microsystems", (Jan 1998) Sensors and Actuators B 49:40-45. Qin, Dong, et al., "Microfabrication, Microstructures and Microsystems", (1998) Topics in Current Chemistry 194:1-19. Fuhr, G., et al., "Biological Application of Microstructures", (1998) Topics in Current Chemistry 194:83-116. Shoji, Shuichi, "Fluids for Sensor Systems", (1998) Topics in Current Chemistry 194:163-188. Cordova, Emilio, et al., "Noncovalent Polycationic Coatings for Capillaries in Capillary Electrophoresis of Proteins" (Apr 1997) Analytical Chemistry 69:1370-1379. McCormick, Randy M., et al., "Microchannel Electrophoretic Separations of DNA in Injection-Molded Plastic Substrates" (Dec 1997) Analytical Chemistry 69:2626-2630. Martynova, Larisa et al., "Fabrication of plastic microfluid channels by imprinting methods" (1997) Anal. Chem.69:4783-4789. Kovacs, Gregory T.A., et al., "Silicon Micromachining Sensors to Systems" (Jul. 1996) Analytical Chemistry News & Features 407A-412A. Shoji, Shuchi, et al., "Microflow devices and systems" (Oct 1994) J. Micromech. Microeng.4:157-171. McNeely, M.R., et al., Hydrophobic Microfluidics, SPIE Article-H . . . crofluidics.doc. Schomburg, W. K., et al., "Microfluidic components in LIGA technique" (Feb 1994) J. Micromech.4:186-191. Weigl, B., et al., "Passive Microfluidics--Ultra-Low-Cost Plastic Disposable Lab-On-A-Chips". Verpoorte, Elisabeth M. J., et al., "Three-dimensional micro flow manifolds for miniaturized chemical analysis systems" (Oct 1994) J. Micromech. Microoeng.4:246-256.