초록 ▼

A damper for an air flow system opening, such as the air inlet of a clean room filter module, includes a number of control plates (14, 15) reciprocally mounted on holding elements (22) and a drive element (24, 36) supported from a supporting surface (20) with an airflow opening (21) therein. Gaskets

A damper for an air flow system opening, such as the air inlet of a clean room filter module, includes a number of control plates (14, 15) reciprocally mounted on holding elements (22) and a drive element (24, 36) supported from a supporting surface (20) with an airflow opening (21) therein. Gaskets (30, 31) seal around apertures (16, 18) and the airflow opening to allow more accurate and positive control and diffusion, as well as virtually complete shut off, of airflow through the opening. A tool (42) is used to rotate a threaded end (34) of the drive element rotatably held in an opening in a beam (40) by holders (38). The threaded end of the drive element cooperates with an internally threaded opening in a non-round-shaped traveler (36) passing through matching non-round openings in the control plates.

대표청구항 ▼

A damper for an air flow system opening, such as the air inlet of a clean room filter module, includes a number of control plates (14, 15) reciprocally mounted on holding elements (22) and a drive element (24, 36) supported from a supporting surface (20) with an airflow opening (21) therein. Gaskets

A damper for an air flow system opening, such as the air inlet of a clean room filter module, includes a number of control plates (14, 15) reciprocally mounted on holding elements (22) and a drive element (24, 36) supported from a supporting surface (20) with an airflow opening (21) therein. Gaskets (30, 31) seal around apertures (16, 18) and the airflow opening to allow more accurate and positive control and diffusion, as well as virtually complete shut off, of airflow through the opening. A tool (42) is used to rotate a threaded end (34) of the drive element rotatably held in an opening in a beam (40) by holders (38). The threaded end of the drive element cooperates with an internally threaded opening in a non-round-shaped traveler (36) passing through matching non-round openings in the control plates. said aperture, thereafter said space for suction is evacuated through said intake/exhaust port by said vacuum changer, thereafter said intake/exhaust port is hermetically closed by said additional lid, and the hermetically closed space outside the box body, including said additional lid, is turned into the atmospheric pressure. 4. A clean transfer apparatus comprising: a clean box comprising a box body, said box body having an aperture in one side surface, an annular groove for suction formed in said one side surface so as to surround the aperture, and an intake/exhaust port in communication with said annular groove for suction in another surface; a side lid arranged to hermetically cover said annular groove for suction to form a space for suction while being mounted on the box body, said side lid being sucked to the box body by a pressure difference between inside and outside the space for suction to hermetically close said aperture; and an additional lid for hermetically closing said intake/exhaust port by a pressure difference between inside and outside thereof; a clean device having a gate aperture formed in a side wall surface thereof and a gate valve capable of opening or closing said gate aperture and capable of holding the side lid of the clean box connected to the gate aperture; and a vacuum changer for evacuating a hermetically closed space outside the box body, including the additional lid of the clean box connected to said gate aperture, wherein in a state in which said vacuum changer cancels the pressure difference between inside and outside of said additional lid and opens said intake/exhaust port to turn said space for suction into the atmospheric pressure through said intake/exhaust port, said side lid is drawn into said clean device while being held by said gate valve, to establish communication between an inside space of said clean box and the inside of said clean device. 5. The clean transfer apparatus according to claim 4, wherein said vacuum changer has a box holding member constructed in such structure that a vacuum suction passage for suction of said box body is formed in an opposite surface thereof to said box body and wherein said hermetically closed space is formed inside said box holding member. 6. The clean transfer apparatus according to claim 5, wherein said vacuum changer has a lid receiver for receiving said additional lid separated from said box body, inside said box holding member, said lid receiver being movable. 7. A clean box comprising: a box body having an aperture in one surface; a lid for hermetically closing the aperture of the box body; an annular suction space surrounding said aperture, defined by a surface of the box body facing the lid and a surface of the lid facing the box body under a state in which the box body is closed by the lid; and a closable port in communication with said suction space for evacuation of said suction space, wherein said lid is to be sucked to the box body by a pressure difference between the suction space and the outside of the clean box. 8. A container comprising: a container body having an aperture; a lid for hermetically closing the aperture of the container body; an annular suction space surrounding said aperture, defined by a surface of the container body facing the lid and a surface of the lid facing the container body under a state in which the container body is closed by the lid; and a closable port in communication with said suction space for evacuation of said suction space, wherein said lid is to be sucked to the container body by a pressure difference between the suction space and the outside of the container. 9. A method of sealing a clean box comprising: preparing a clean box including a box body having an aperture in one surface, a lid for hermetically closing the aperture of the box body, an annular suction space surrounding said aperture defined by a surface of the box body facing the lid and a surface of the