Methods are provided for removing edge beads from spin-on films. A spin-on film is removed from a region of a surface of a spin-coated substrate adjacent to an edge of the surface by spinning the spin-coated substrate, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and direct
Methods are provided for removing edge beads from spin-on films. A spin-on film is removed from a region of a surface of a spin-coated substrate adjacent to an edge of the surface by spinning the spin-coated substrate, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and directing the cryogenic aerosol stream against the spin-on film in the region as the substrate spins. In another aspect of the invention, a film is formed on a surface of a substrate by dispensing a liquid composition onto the surface, spinning the substrate to distribute the liquid composition to form a substantially uniform film on the surface, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and directing the cryogenic aerosol stream against the film in a region of the surface adjacent to an edge of the surface as the substrate spins. The film may include an alkoxysilane and a low volatility solvent. The fluid may consists essentially of liquid carbon dioxide. A spin-on film containing low volatility solvents does not grow back into the region from which the film was removed, the edge bead removal process time can be reduced to less than about 10 seconds, and the volume of waste solvent is reduced.
대표청구항▼
Methods are provided for removing edge beads from spin-on films. A spin-on film is removed from a region of a surface of a spin-coated substrate adjacent to an edge of the surface by spinning the spin-coated substrate, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and direct
Methods are provided for removing edge beads from spin-on films. A spin-on film is removed from a region of a surface of a spin-coated substrate adjacent to an edge of the surface by spinning the spin-coated substrate, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and directing the cryogenic aerosol stream against the spin-on film in the region as the substrate spins. In another aspect of the invention, a film is formed on a surface of a substrate by dispensing a liquid composition onto the surface, spinning the substrate to distribute the liquid composition to form a substantially uniform film on the surface, expanding a fluid through a nozzle to form a cryogenic aerosol stream, and directing the cryogenic aerosol stream against the film in a region of the surface adjacent to an edge of the surface as the substrate spins. The film may include an alkoxysilane and a low volatility solvent. The fluid may consists essentially of liquid carbon dioxide. A spin-on film containing low volatility solvents does not grow back into the region from which the film was removed, the edge bead removal process time can be reduced to less than about 10 seconds, and the volume of waste solvent is reduced. he hydroxyl-substituted polybutadiene has a branch-chain structure. 5. A method according to claim 3, wherein the hydroxyl-substituted polybutadiene contains one or more allyl groups. 6. A method according to claim 3, wherein the hydroxyl-substituted polybutadiene is used in an amount in the range 0.2 to 0.7% by weight of the rubber particles. 7. A method according to claim 3, wherein the bonding material is a pre-polymer for a polyurethane or polyurea, having terminal-NCO groups. 8. A method according to claim 3, wherein the hydroxyl-substituted polybutadiene has a molecular weight of up to 9,000. 9. A method according to claim 8, wherein said molecular weight is in the range 1,500 to 4,000. 10. A method according to claim 3, wherein the hydroxyl-substituted polybutadiene has a terminal hydroxyl substituent. 11. The method according to claim 3 further including: between steps (b) and (c), spreading the mixture of coated rubber particles and bonding material on a substrate. 12. The method according to claim 3 further including: after step (b) and before step (c), laying the mixture of coated rubber particles and bonding material on a ground surface to provide a play surface or a sports surface. 13. The method according to claim 3 further including: after step (b) and before step (c), molding the mixture of coated rubber particles and bonding material to provide a mat, sheet, or other article. 14. A process for producing from particles of rubber a coherent rubber composition suitable for use as a sports or play surface, which comprises: (a) coating the rubber particles with a polymeric unsaturated hydrocarbon compound comprising a hydroxyl-substituted polymer of a diene; (b) mixing the resulting coated rubber particles with a bonding material; (c) spreading the resulting mixture on a substrate; and, (d) allowing and/or causing the resulting mixture to form the desired coherent rubber composition. 15. A coherent rubber composition that has been obtained by the process of claim 14. 16. A coherent rubber composition according to claim 15, in the form of a laid play surface or sports surface. 17. A coherent rubber composition according to claim 15, in the form of a mat, sheet or other moulded article.
연구과제 타임라인
LOADING...
LOADING...
LOADING...
LOADING...
LOADING...
이 특허에 인용된 특허 (14)
Srikrishnan Kris V. (Wappingers Falls NY) Wu Jin J. (Ossining NY), Aerosol cleaning method.
Becker David Scott ; Hanestad Ronald J. ; Thomes Gregory P. ; Weygand James F. ; Zimmerman Larry D., Eliminating stiction with the use of cryogenic aerosol.
Yang Jingjun ; Drage James S. ; Forester Lynn, Nanoporous silica dielectric films modified by electron beam exposure and having low dielectric constant and low water content.
Cuthbert John D. (Bethlehem PA) Soos Nicholas A. (Lower Macungie Township ; Lehigh County PA), Removal of coating from periphery of a semiconductor wafer.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.