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Method of preparing a semiconductor using ion implantation in a SiC layer 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 US-0932001 (2001-08-17)
발명자 / 주소
  • Eriksen, Odd Harald Steen
  • Guo, Shuwen
출원인 / 주소
  • Rosemount Aerospace Inc.
대리인 / 주소
    Baker Botts L.L.P.
인용정보 피인용 횟수 : 26  인용 특허 : 11

초록

A method of preparing a semiconductor using ion implantation comprises: (a) providing a first material comprising (i) a first Si wafer, (ii) at least one indigenous SiC layer, (iii) at least one non-indigenous SiC layer applied to the indigenous SiC layer, and (iv) at least one oxide layer applie

대표청구항

A method of preparing a semiconductor using ion implantation comprises: (a) providing a first material comprising (i) a first Si wafer, (ii) at least one indigenous SiC layer, (iii) at least one non-indigenous SiC layer applied to the indigenous SiC layer, and (iv) at least one oxide layer applie

이 특허에 인용된 특허 (11)

  1. Willcox Charles R. (Eden Prairie MN) Ley Kevin R. (Eagan MN) Petersen Eric P. (Minnetonka MN) Peitersen Larry A. (Chaska MN), Capacitive pressure sensor and reference with stress isolating pedestal.
  2. Lee Sahng Kyoo,KRX ; Park Sang Kyun,KRX, Method for fabricating semiconductor wafers.
  3. Steckl Andrew J. ; Yuan Chong, Method for forming SiC-SOI structures.
  4. Harris Christopher,SEX, Method for producing a semiconductor layer of SiC of the 3C-polytype and a semiconductor device having an insulator betw.
  5. Goesele Ulrich M. ; Tong Q.-Y., Method for the transfer of thin layers of monocrystalline material to a desirable substrate.
  6. Orin Wayne Holland ; Darrell Keith Thomas ; Richard Bayne Gregory ; Syd Robert Wilson ; Thomas Allen Wetteroth, Method for transfer of thin-film of silicon carbide via implantation and wafer bonding.
  7. Aga Hiroji,JPX ; Mitani Kiyoshi,JPX ; Inazuki Yukio,JPX, Method of fabricating an SOI wafer and SOI wafer fabricated thereby.
  8. Lea Di Cioccio FR, Process for fabricating a structure of semiconductor-on-insulator type in particular SiCOI.
  9. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
  10. Behfar Alex A. ; Srikrishnan Kris V., Simultaneous multiple silicon on insulator (SOI) wafer production.
  11. Srikrishnan Kris V., Smart-cut process for the production of thin semiconductor material films.

이 특허를 인용한 특허 (26)

  1. Cornwell, Michael D.; Myhre, Douglas C.; Eriksen, O. Harald; Goeke, Jerry L., Active combustion control system for gas turbine engines.
  2. Williams, Brandon P.; Goeke, Jerry L., Active pattern factor control for gas turbine engines.
  3. Williams, Brandon Phillip; Goeke, Jerry Lee, Active pattern factor control for gas turbine engines.
  4. Williams, Brandon Phillip; Goeke, Jerry Lee, Active pattern factor control for gas turbine engines.
  5. Dennard, Robert H.; Ouyang, Qiqing C.; Yau, Jeng-Bang, Hybrid double box back gate silicon-on-insulator wafers with enhanced mobility channels.
  6. Dennard, Robert H.; Greenberg, David R.; Majumdar, Amlan; She, Leathen; Yau, Jeng-Bang, Low cost fabrication of double box back gate silicon-on-insulator wafers with built-in shallow trench isolation in back gate layer.
  7. Dennard, Robert H.; Greenberg, David R.; Majumdar, Amlan; Shi, Leathen; Yau, Jeng-Bang, Low cost fabrication of double box back gate silicon-on-insulator wafers with subsequent self aligned shallow trench isolation.
  8. Notake,Hidenori; Ohnishi,Teruhito; Asai,Akira; Aoki,Shigetaka, Method for fabricating semiconductor device.
  9. Guo, Shuwen; Eriksen, Odd Harald Steen; Childress, Kimiko J., Method for forming a transducer.
  10. Gardes, Pascal, Method for handling a thin silicon wafer.
  11. Eriksen, Odd Harald Steen; Childress, Kimiko J.; Guo, Shuwen, Method for making a transducer.
  12. Yamazaki, Shunpei; Ohnuma, Hideto, Method for manufacturing semiconductor device.
  13. Yamazaki, Shunpei, Method for manufacturing semiconductor substrate.
  14. Yamazaki, Shunpei; Miyanaga, Akiharu; Inada, Ko; Iwaki, Yuji, Method for manufacturing semiconductor wafer.
  15. Maleville,Christophe, Method for producing thin layers of semiconductor material from a donor wafer.
  16. Moriceau, Hubert; Lagahe, Chrystelle; Bataillou, Benoit, Method for production of a very thin layer with thinning by means of induced self-support.
  17. Goeke, Jerry Lee; Williams, Brandon Philip, Methods and systems for modulating fuel flow for gas turbine engines.
  18. Golden, Jim; Stuelke, Robert, Optimized epoxy die attach geometry for MEMS die.
  19. Templier,Fran?ois; Billon,Thierry; Daval,Nicolas, Schottky power diode with SiCOI substrate and process for making such diode.
  20. Eriksen,Odd Harald Steen; Childress,Kimiko Jane, Substrate with adhesive bonding metallization with diffusion barrier.
  21. Eriksen, Odd Harald Steen; Childress, Kimiko J.; Guo, Shuwen, Transducer for use in harsh environments.
  22. Eriksen, Odd Harald Steen; Childress, Kimiko J.; Guo, Shuwen, Transducer with fluidly isolated connection.
  23. Eriksen, Odd Harald Steen; Guo, Shuwen; Childress, Kimiko, Transient liquid phase eutectic bonding.
  24. Baxter, Randy C.; Goeke, Jerry L., Trim valves for modulating fluid flow.
  25. Cornwell, Michael D.; Baxter, Randy C.; Forst, Michael; Goeke, Jerry L., Valve assembly for modulating fuel flow to a gas turbine engine.
  26. Overman, Nicholas R.; Goeke, Jerry Lee, Valve assembly for modulating fuel flow to a gas turbine engine.
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