초록 ▼

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes. Some mesopump-sensor systems can be manufactured using MEMS technology and can be coupled to controllers for sequencing the pumps and analyzing sensor outputs using methods including Principle Component Analysis.

대표청구항 ▼

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically

An integrated mesopump-sensor suitable for disposition in two- and three-dimensional arrays having small dimensions is disclosed. One mesopump is formed of an electrostatically attractable flexible diaphragm disposed through cavities or pumping chambers formed between two opposing electrostatically chargeable material layers. Fluid is pumped through the chambers by sequentially moving the diaphragm toward the first chargeable layer, then towards the second chargeable layer, which can pull and push the fluid through a series of chambers, and past the sensor. One group of sensors utilizes multiple and varied chemoresistive sensors which can vary in resistance differently in response to the presence of various analytes. Another group of sensors utilizes chemo-fluorescent sensors that fluoresce in the presence of particular analytes. Some mesopump-sensor systems can be manufactured using MEMS technology and can be coupled to controllers for sequencing the pumps and analyzing sensor outputs using methods including Principle Component Analysis. ense the process pressure; transmitter circuitry coupled to the pressure sensor configured to provide an output related to the sensed process pressure; a single isolation diaphragm assembly configured to isolate the process fluid from the pressure sensor; a transmitter housing containing the pressure sensor, transmitter circuitry and isolation diaphragm assembly; and an in-line process coupling integral with the housing having a mounting member which includes a substantially flat mounting face and a bore generally aligned with the isolation diaphragm assembly, the mounting face configured to receive a manifold and seal against the manifold, the mounting member including at least two bolt holes extending therethrough which extend generally parallel with the bore. 2. The in-line pressure transmitter of claim 1 wherein the in-line process coupling is welded to the housing. 3. The in-line pressure transmitter of claim 1 wherein the bolt holes are spaced a substantially equal distance from the bore. 4. The in-line pressure transmitter of claim 1 wherein centers at the bolt holes are spaced about 1.626 inches apart. 5. The in-line pressure transmitter of claim 1 wherein the bore is threaded and configured to receive a threaded process connection. 6. The in-line pressure transmitter of claim 1 wherein the in-line process coupling includes a block valve to block the bore. 7. The in-line pressure transmitter of claim 1 wherein the in-line process coupling includes a vent valve configured to vent the bore. 8. The in-line pressure transmitter of claim 1 wherein the mounting member includes four bolt holes spaced substantially equal distance from the bore. 9. The in-line pressure transmitter of claim 1 wherein the transmitter circuitry is configured to couple to a two-wire process control loop. 10. The in-line pressure transmitter of claim 1 wherein the pressure sensor is configured to measure gage pressure. 11. The in-line pressure transmitter of claim 1 wherein the pressure sensor is configured to measure absolute pressure. 12. The in-line pressure transmitter of claim 1 including a depression in the mounting face which extends around the bore.