초록 ▼

In the invention an electrically isolated copper interconnect structural interface is provided involving a single, about 50-300 A thick, alloy capping layer, that controls diffusion and electromigration of the interconnection components and reduces the overall effective dielectric constant of the in

In the invention an electrically isolated copper interconnect structural interface is provided involving a single, about 50-300 A thick, alloy capping layer, that controls diffusion and electromigration of the interconnection components and reduces the overall effective dielectric constant of the interconnect; the capping layer being surrounded by a material referred to in the art as hard mask material that can provide a resist for subsequent reactive ion etching operations, and there is also provided the interdependent process steps involving electroless deposition in the fabrication of the structural interface. The single layer alloy metal barrier in the invention is an alloy of the general type A--X--Y, where A is a metal taken from the group of cobalt (Co) and nickel (Ni), X is a member taken from the group of tungsten (W), tin (Sn), and silicon (Si), and Y is a member taken from the group of phosphorous (P) and boron (B); having a thickness in the range of 50 to 300 Angstroms.

대표청구항 ▼

In the invention an electrically isolated copper interconnect structural interface is provided involving a single, about 50-300 A thick, alloy capping layer, that controls diffusion and electromigration of the interconnection components and reduces the overall effective dielectric constant of the in

In the invention an electrically isolated copper interconnect structural interface is provided involving a single, about 50-300 A thick, alloy capping layer, that controls diffusion and electromigration of the interconnection components and reduces the overall effective dielectric constant of the interconnect; the capping layer being surrounded by a material referred to in the art as hard mask material that can provide a resist for subsequent reactive ion etching operations, and there is also provided the interdependent process steps involving electroless deposition in the fabrication of the structural interface. The single layer alloy metal barrier in the invention is an alloy of the general type A--X--Y, where A is a metal taken from the group of cobalt (Co) and nickel (Ni), X is a member taken from the group of tungsten (W), tin (Sn), and silicon (Si), and Y is a member taken from the group of phosphorous (P) and boron (B); having a thickness in the range of 50 to 300 Angstroms. or cables and hoses according to claim 1, characterized in that each of said bending-limiting units has a frame structure and, said frame structure includes a cam. 4. A protective guide for cables and according to claim 1, characterized in that said bending-limiting units include a latching portion which opens and closes permitting installation and fitting of said bending-limiting units on said tube. 5. A protective guide for cables and hoses according to claim 1, characterized in that each of said bending_limiting units has a frame structure of a rectangular section. 6. A protective guide for cables and hoses according to claim 5, characterized in that said bending-limiting units are formed by detachably engaging an attachment disposed on the bending inner peripheral side of said flexible tube and a clip disposed on the bending outer peripheral side of said flexible tube. 7. A protective guide for cables and hoses according to claim 5, characterized in that said bending-limiting units include a latching portion which opens and closes permitting installation and fitting of said bending-limiting units on said tube. 8. A protective guide for cables and hoses according to claim 1, characterized in that the bellows_shaped tubular peripheral wall of said flexible tube includes fine bellows portions formed on said bending inner peripheral side and rough bellows portions formed on said bending outer peripheral side. 9. A protective guide for cables and hoses according to claim 8, characterized in that each of said bending-limiting unit has a frame structure of a rectangular section. 10. A protective guide for cables and hoses according to claim 8, characterized in that said bending-limiting units are formed by detachably engaging an attachment disposed on the bending inner peripheral side of said flexible tube and a clip disposed on the bending outer peripheral side of said flexible tube. 11. A protective guide for cables and according to claim 8, characterized in that each of said bending-limiting units has a frame structure and, said frame structure includes a cam. 12. A protective guide for cables and hoses according to claim 8, characterized in that said bending-limiting units include a latching portion which opens and closes permitting installation and fitting of said bending-limiting units on said tube. 13. A protective guide for cables and hoses according to claim 1, characterized in that said flexible tube and said bending_limiting units are molded of resin. 14. A protective guide for cables and hoses according to claim 13, characterized in that the bellows-shaped tubular peripheral wall of said flexible tube includes fine bellows portions formed on said bending inner peripheral side and rough bellows portions formed on said bending outer peripheral side. 15. A protective guide for cables and hoses according to claim 13, characterized in that each of said bending_limiting units has a frame structure of a rectangular section. 16. A protective guide for cables and hoses according to claim 13, characterized in that said bending_limiting units are formed by detachably engaging an attachment disposed on the bending inner peripheral side of said flexible tube and a clip disposed on the bending outer peripheral side of said flexible tube. 17. A protective guide for cables and hoses according to claim 13, characterized in that each of said bending-limiting units has a frame structure and, said frame structure includes a cam. 18. A protective guide for cables and the hoses according to claim 8, characterized in that said bending-limiting units include a latching portion which opens and closes permitting installation and fitting of said bending-limiting units on said tube.