IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0740663
(2000-12-19)
|
우선권정보 |
JP-0363097 (1999-12-21); JP-0205017 (2000-07-06) |
발명자
/ 주소 |
- Ohtachi, Yoshinobu
- Namiki, Hirotaka
- Yamauchi, Akira
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
9 인용 특허 :
4 |
초록
▼
There is provided a vacuum pump which suppresses the propagation of vibrations to an external container without the use of a damper. The vacuum pump has an outer cylindrical portion, a rotor portion and a stator portion accommodated within the outer cylindrical portion to define a transferring porti
There is provided a vacuum pump which suppresses the propagation of vibrations to an external container without the use of a damper. The vacuum pump has an outer cylindrical portion, a rotor portion and a stator portion accommodated within the outer cylindrical portion to define a transferring portion for a gas sucked from an inlet port, a magnetic bearing for supporting the rotor portion with respect to the stator portion, a motor for rotating the rotor portion with respect to the stator portion, and a base for supporting the outer cylindrical portion and the stator portion. A vibration absorbing member is interposed between the stator portion and the base, which has a natural frequency F=(f1+f3)/2±(f1-f3)/4, provided that f1, f2 and f3 respectively denote a natural frequency of nutation in conical mode, a natural frequency in parallel mode and a natural frequency of procession in the conical mode, when the rotor portion is rotated at a rated speed.
대표청구항
▼
There is provided a vacuum pump which suppresses the propagation of vibrations to an external container without the use of a damper. The vacuum pump has an outer cylindrical portion, a rotor portion and a stator portion accommodated within the outer cylindrical portion to define a transferring porti
There is provided a vacuum pump which suppresses the propagation of vibrations to an external container without the use of a damper. The vacuum pump has an outer cylindrical portion, a rotor portion and a stator portion accommodated within the outer cylindrical portion to define a transferring portion for a gas sucked from an inlet port, a magnetic bearing for supporting the rotor portion with respect to the stator portion, a motor for rotating the rotor portion with respect to the stator portion, and a base for supporting the outer cylindrical portion and the stator portion. A vibration absorbing member is interposed between the stator portion and the base, which has a natural frequency F=(f1+f3)/2±(f1-f3)/4, provided that f1, f2 and f3 respectively denote a natural frequency of nutation in conical mode, a natural frequency in parallel mode and a natural frequency of procession in the conical mode, when the rotor portion is rotated at a rated speed. ted position to prevent the inlet fluid flow from entering the second chamber and influencing the temperature sensitive body. 4. The compressor system of claim 2, wherein the inlet section is substantially cylindrical and further includes: a cylindrical tubular outer wall that intersects with the intermediate wall, wherein the outer diameter of the intermediate wall is substantially the same as the outer diameter of the outer wall; an open end disposed at the end of the outer wall opposite the intermediate wall and near the inlet end, wherein the open end permits the inlet fluid flow to enter the inlet section; and at least one aperture in the outer wall near the intermediate wall that permits the inlet fluid flow to exit the inlet section. 5. The compressor system of claim 4, wherein the at least one aperture is in fluid flow communication with the first chamber when the spool is in the actuated position. 6. The compressor system of claim 4, wherein the at least one aperture is in fluid flow communication with the second chamber when the spool is in the non-actuated position. 7. The compressor system of claim 4, wherein the intermediate wall is disposed between the at least one aperture and the temperature sensitive body. 8. The compressor system of claim 2, wherein the intermediate wall creates a seal with the middle ridge to prevent the inlet fluid flow from entering the second chamber and influencing the temperature sensitive body. 9. The compressor system of claim 1, wherein the temperature sensitive body is exposed to the inlet fluid flow only when the spool is in the non-actuated position. 10. The compressor system of claim 5, wherein the temperature sensitive body is a wax cartridge. 11. A compressor system comprising: a fluid system for circulating fluids through the compressor system, wherein the fluid system includes a cooler and a valve that controls fluid flow to the cooler, the valve comprising: a cylindrical tubular housing including: an inlet end at a first end of the housing, an outlet end at the end of the housing opposite the inlet end, an inlet port disposed near the inlet end, wherein an inlet fluid flow enters the valve through the inlet port, an outlet port disposed near the outlet end, a cooler return disposed near the outlet end, and directs fluid flow from the cooler to the valve, a cooler port disposed between the inlet end and the outlet end, and directs fluid flow from the valve to the cooler, an inner surface defining the inner diameter of the housing near the inlet end, and extending from the inlet end to the cooler port, a middle ridge disposed between the cooler port and the cooler return, wherein the inner diameter of the middle ridge is substantially the same as the inner diameter of the inner surface, a first chamber extending between the inner surface and the middle ridge, wherein the inner diameter of the first chamber is greater than the inner diameter of the inner surface, and the cooler port is in fluid flow communication with the first chamber, and a second chamber extending between the middle ridge and the outlet end, wherein the inner diameter of the second chamber is greater than the inner diameter of the inner surface, and the cooler return and outlet port are in fluid flow communication with the second chamber; a spool disposed within the housing, and movable between a non-actuated position and an actuated position, the spool including: a substantially cylindrical inlet section disposed near the inlet end and having, a cylindrical tubular outer wall, an open end disposed at the end of the outer wall near the inlet end, wherein the open end permits the inlet fluid flow to enter the inlet section, an intermediate wall disposed at the end of the outer wall opposite the open end, and at least one aperture in the outer wall near the intermediate wall that permits the inlet fluid flow to exit the inlet section, an outlet section disposed near the outlet end,
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