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A semiconductor device in which TFTs of suitable structures are arranged depending upon the performances of the circuits, and storage capacitors are formed occupying small areas, the semiconductor device featuring high performance and bright image. The thickness of the gate-insulating film is differ

A semiconductor device in which TFTs of suitable structures are arranged depending upon the performances of the circuits, and storage capacitors are formed occupying small areas, the semiconductor device featuring high performance and bright image. The thickness of the gate-insulating film is differed depending upon a circuit that gives importance to the operation speed and a circuit that gives importance to the gate-insulating breakdown voltage, and the position for forming the LDD region is differed depending upon the TFT that gives importance to the countermeasure against the hot carriers and the TFT that gives importance to the countermeasure against the off current. This makes it possible to realize a semiconductor device of high performance. Further, the storage capacity is formed by a light-shielding film and an oxide thereof to minimize its area, and a semiconductor device capable of displaying a bright picture is realized.

대표청구항 ▼

A semiconductor device in which TFTs of suitable structures are arranged depending upon the performances of the circuits, and storage capacitors are formed occupying small areas, the semiconductor device featuring high performance and bright image. The thickness of the gate-insulating film is differ

A semiconductor device in which TFTs of suitable structures are arranged depending upon the performances of the circuits, and storage capacitors are formed occupying small areas, the semiconductor device featuring high performance and bright image. The thickness of the gate-insulating film is differed depending upon a circuit that gives importance to the operation speed and a circuit that gives importance to the gate-insulating breakdown voltage, and the position for forming the LDD region is differed depending upon the TFT that gives importance to the countermeasure against the hot carriers and the TFT that gives importance to the countermeasure against the off current. This makes it possible to realize a semiconductor device of high performance. Further, the storage capacity is formed by a light-shielding film and an oxide thereof to minimize its area, and a semiconductor device capable of displaying a bright picture is realized. vided on a wafer. 6. A method according to claim 1, wherein said method based on operations research technique comprises at least one of a linear programming method, a Lin and Kernighan's approach, and a k-OPT method. 7. A processing method of, in synchronously moving a mask and a photosensitive substrate and effecting exposures in plural chip areas on the photosensitive substrate, successively visiting the plural chip areas provided on the substrate arranged on and movable along a predetermined two dimensional plane for performing an exposure process onto each of the plural chip areas by moving the substrate along the two-dimensional plane, the method comprising: a movement sequence determining step of determining a movement sequence including a visit order of the plural chip areas, said movement sequence determining step including a setting step of setting one or more scan directions at a time of performing the exposure process onto each of the plural chip areas, the exposure process irradiating light onto each of the plural process areas while scanning the substrate along the two-dimensional plane; and an arithmetic step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural chip areas as well as the scan directions of the plural chip areas, and finding a solution of movement sequence most preferred with respect to a total movement time between the plural chip areas, out of the group generated, based on at least information regarding the mask and photosensitive substrate, wherein said processing method further comprises a step of successively visiting the plural chip areas in accordance with the solution of movement sequence most preferred with respect to a total movement time obtained at said arithmetic step. 8. A method according to claim 7, further comprising a prestep carried out prior to said arithmetic step, said prestep being a step of producing a movement time management table storing movement times from scan end positions in said plural chip areas to scan start positions in said plural chip areas. 9. A method according to claim 8, wherein, in a pair of chip areas selected out of said plural chip areas, said movement time management table includes information for inhibiting movement from the scan end position in one chip area of said selected pair to the scan start position in the other chip area of said selected pair. 10. A method according to claim 7, wherein said solution of movement sequence is a movement sequence in which a movement operation between said plural chip areas is completed in a shortest time, said movement sequence being selected from said group generated at a predetermined time, using at least one of a linear programming method, a Lin and Kernighan's approach, a k-OPT method, and an evolutionary computation method. 11. A method according to claim 7, wherein the information regarding said mask and photosensitive substrate includes a size of a pattern area provided on said mask and a size of said photosensitive substrate. 12. A method according to claim 7, wherein said plural chip areas are successively exposed according to a most preferred solution of movement sequence obtained between a time when the information regarding said mask is set and a time of start of exposure operation. 13. A processing method of successively visiting plural process areas provided on an object arranged on and movable along a predetermined two-dimensional plane, for performing a predetermined process onto each of the plural process areas, by moving the object along the two-dimensional plane, the method comprising a movement sequence determining step of determining a movement sequence including a visit order of the plural process areas, said movement sequence determining step including: a setting step of setting one or more scan directions at a time of performing the predetermined process onto each of the plural process areas, the predetermined process irradiating light onto the plural process areas while scanning the object along the two-dimensional plane; and an arithmetic step of finding a solution of movement sequence most preferred with respect to a total movement time between the plural process areas, using a genetic algorithm, for determining the visit order together with the scan directions of the plural process areas, wherein said arithmetic step includes: a first step of generating a group including a plurality of movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural process areas as well as the scan directions of the plural process areas; and a second step of selecting a movement sequence in which a movement operation between the plural process areas is completed in a shortest time, out of the group generated, and wherein said processing method further comprises a step of successively visiting the plural process areas in accordance with the movement sequence selected at said second step. 14. A method according to claim 13, further comprising a prestep carried out prior to said arithmetic step, said prestep being a step of producing a movement time management table storing movement times from scan end positions in said plural process areas to scan start positions in said plural process areas. 15. A method according to claim 14, wherein, in a pair of process areas selected out of said plural process areas, said movement time management table includes information for inhibiting movement from the scan end position in one process area of said selected pair to the scan start position of the other said selected pair of process areas. 16. A method according to claim 13, wherein the scan directions of the plural process areas are set independently of each other for each of the plural process areas. 17. A method according to claim 13, wherein said genetic algorithm includes a method based on operations research technique as a genetic operator, and wherein said arithmetic step is executed plural times, whereby a movement sequence in which a movement operation between said plural process areas is completed in a shortest time is selected from said group generated at the time of every execution of said arithmetic step. 18. A method according to claim 13, wherein an initial solution of said genetic algorithm is generated by one of a linear programming method, a Lin and Kernighan's approach, a k-OPT method, and a combination method thereof. 19. A method according to claim 13, wherein a time of the execution of said arithmetic step using said genetic algorithm is decreased by an improvement by one of a Lin and Kernighan's approach and a k-OPT method in a solution of movement sequence successively updated during execution of said genetic algorithm. 20. A method according to claim 13, wherein said genetic algorithm has a mutation operator, said mutation operator having at least one of an operator for exchanging a visit order of plural process areas selected out of said plural process areas, and an operator for inverting the scan direction of said local area in one process area or two or more process areas selected out of said plural process areas. 21. A method according to claim 17, wherein said method based on operations research technique comprises one of a linear programming method, a Lin and Kernighan's approach, a k-OPT method, and a combination method thereof, and wherein a solution of movement sequence obtained by said method based on operations research technique is set as an initial solution of said genetic algorithm. 22. A method according to claim 21, wherein, in said linear programming method, when there are plural near-optimum solutions as to a movement sequence to be obtained, a plurality of good solutions are generated by recomputation with change of a method for selecting a specific one or with change of a start point of search, and a good solution most preferred with respect to the total movement time between said plural process areas out of said plurality of good solutions generated is set as an initial solution of said genetic algorithm. 23. A method according to claim 21, wherein, in said combination method including said linear programming method, a plurality of first good solutions obtained for a movement sequence to be obtained, by said linear programming method, are set as initial solutions, a plurality of second good solutions are generated by said Lin and Kernighan's approach or said k-OPT method, and a second good solution most preferred with respect to the total movement time between said plural process areas out of said plurality of second good solutions generated is set as an initial solution of said genetic algorithm. 24. A processing method of successively visiting plural process areas provided on an object arranged on and movable along a predetermined two-dimensional plane, for performing a predetermined process onto each of the plural process areas, by moving the object along the two-dimensional plane, the method comprising: a movement sequence determining step of determining a movement sequence including a visit order of the plural process areas, said movement sequence determining step including: a setting step of setting one or more scan directions at a time of performing the predetermined process onto each of the plural process areas the predetermined process irradiating light onto each of the plural process area while scanning the object along the two-dimensional plane; and an arithmetic step of finding a solution of movement sequence most preferred with respect to a total movement time between the plural process areas, using either one of a linear programming method, a Lin and Kernighan's approach, a kOPT method, and a combination method thereof, for determining the visit order together with the scan directions of the plural process areas, wherein said arithmetic step includes a first step of generating a group including a plurality of movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural process areas as well as the scan directions of the plural process areas; and a second step of selecting a movement sequence in which a movement operation between the plural process areas is completed in a shortest time, out of the group generated, and wherein said processing method further comprises a step of successively visiting the plural process areas in accordance with the movement sequence selected at said second step. 25. A method according to claim 24, further comprising a prestep carried out prior to said arithmetic step, said prestep being a step of producing a movement time management table storing movement times from scan end positions in said plural process areas to scan start positions in said plural process areas. 26. A method according to claim 25, wherein, in a pair of process areas selected out of said plural process areas, said movement time management table includes information for inhibiting movement from the scan end position in one process area of said selected pair to the scan start position in the other process area of said selected pair. 27. A method according to claim 24, wherein said arithmetic step is executed plural times, and wherein said solution of movement sequence is obtained every execution of the arithmetic step. 28. A method according to claim 24, wherein, in said linear programming method, when there are plural near-optimum solutions as to a movement sequence to be obtained, a plurality of good solutions are generated by recomputation with change of a method for selecting a specific one or with change of a start point of search, and a good solution most preferred with respect to the total movement time between said plural process areas out of the plurality of good solutions generated is set as an initial solution of said genetic algorithm. 29. A method according to claim 24, wherein, in said combination method including said linear programming method, a plurality of first good solutions obtained for a movement sequence to be obtained, by said linear programming method, are set as initial solutions, a plurality of second good solutions are generated by said Lin and Kernighan's approach or said k-OPT method, and a second good solution most preferred with respect to said total movement time between said plural process areas out of said plurality of second good solutions generated is set as an initial solution of said genetic algorithm. 30. A processing method of, in performing exposures of plural chip areas on a photosensitive substrate, successively visiting a plural chip areas, said processing method comprising: a movement sequence determining step of determining a movement sequence including a visit order of the plural chip areas, said movement sequence determining step including an arithmetic step of finding a solution of movement sequence most preferred with respect to a total movement time between the plural chip areas, using at least one of a linear programming method, a dynamic programming method, and an evolutionary computation method, wherein said arithmetic step includes: a first step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural chip areas; and a second step of selecting a movement sequence in which a movement operation between the plural chip areas is completed in a shortest time, out of the group generated, based on at least information regarding the photosensitive substrate, the information regarding the photosensitive substrate including at least one of a size of each of the plural chip areas and a size of the photosensitive substrate, and wherein said processing method further comprises a step of successively visiting the plural chip areas in accordance with the movement sequence selected at said second step. 31. A method according to claim 30, further comprising a prestep carried out prior to said arithmetic step, said prestep being a step of producing a movement time management table storing movement times from scan end positions in said plural process areas to scan start positions in said plural process areas. 32. A method according to claim 31, wherein, in a pair of process areas selected out of said plural process areas, said movement time management table includes information for inhibiting movement from the scan end position in one process area of said selected pair to the scan start position in the other process area of said selected pair. 33. A method according to claim 30, wherein said arithmetic step is executed plural times, and wherein said solution of movement sequence is obtained every execution of the arithmetic step. 34. A method according to claim 30, wherein said total movement time is given, at least, based on a setting time, a velocity, and an acceleration of a stage on which said photosensitive substrate is mounted. 35. A processing apparatus that successively visits plural process areas provided on an object arranged on and movable along a predetermined two-dimensional plane, for performing a predetermined process onto each of the plural process areas, by moving the object along the two-dimensional plane, the apparatus comprising: a movement sequence determining section that determines a movement sequence including a visit order of the plural process areas, said movement sequence determining section includes a setting section that sets one or more scan directions at a time of performing the predetermined process onto each of the plural process areas the predetermined process irradiating light onto each of the plural process area while scanning the object along the two-dimensional plane; and an arithmetic section that is electrically co nnected to said setting section and determines the visit order of the plural process areas together with the scan directions of the process areas, wherein said arithmetic section includes a first section generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural process areas as well as the scan directions of the plural process areas; and a second section electrically connected to said first section and selecting a movement sequence in which a movement operation between the plural process areas is completed in a shortest time, from the group generated, and wherein said processing apparatus further comprises a controller electrically connected to said arithmetic section, and controlling the visit order of the plural process areas in accordance with the movement sequence selected at said second section. 36. An apparatus according to claim 35, further comprising a memory that stores a movement time management table in which movement times from scan end positions of said plural process areas to scan start positions of said plural process areas, are recorded. 37. An apparatus according to claim 36, wherein, in a pair of process areas selected out of said plural process areas, said movement time management table stored in the memory includes information for inhibiting movement from the scan end position in one process area of said selected pair to the scan start position in the other process area of said selected pair. 38. An apparatus according to claim 35, wherein said apparatus is a scan type exposure apparatus that realizes a movement sequence of exposures of plural chip areas in predetermined scan directions on a wafer, and wherein said arithmetic section carries out said arithmetic step, using at least one of a method based on an operations research technique and an evolutionary computation method. 39. An apparatus according to claim 38, wherein said method based on operations research technique comprises one of a linear programming method, a Lin and Kernighan's approach, a k-OPT method, and a combination method thereof, and wherein a solution obtained by said method based on operations research technique is set as an initial solution in said arithmetic step. 40. An apparatus according to claim 39, wherein said arithmetic section carries out said arithmetic step in chip areas located at the edge of said wafer out of said plural chip areas while giving said chip areas at the edge such a constraint on the scan direction that said chip areas at the edge have to be scanned in a direction from the center of the wafer to the periphery of the wafer. 41. An apparatus according to claim 35, wherein said apparatus is an inspection apparatus that carries out a movement sequence of successively inspecting plural preparations on a pallet in predetermined scan directions, and wherein said arithmetic section carries out said arithmetic step, using at least one of a method of an operations research technique and an evolutionary computation method. 42. A processing method for successively visiting plural process areas provided on an object arranged on and movable along a predetermined two-dimensional plane, for performing a predetermined process onto each of the plural process areas, by moving the object along the two-dimensional plane, the method comprising a movement sequence determining step of determining a movement sequence including a visit order of the plural process areas, said movement sequence determining step including a setting step of setting one or more scan directions at a time of performing the predetermined process onto each of the plural process area, the predetermined process irradiating light onto the process areas while scanning the object along the two-dimensional plane; and an arithmetic step of determining the visit order of the plural process areas together with the scan directions of the plur al process areas, wherein said arithmetic step includes a first step of generating a group including plural movement sequences that can be carried out, out of a group of movement sequence candidates, each indicating a visit order of the plural process areas as well as the scan directions of the plural process areas; and a second step of selecting a movement sequence in which a movement operation between the plural process areas is completed in a shortest time, from the group generated, and wherein said processing method further comprises a third step of successively visiting the plural process area in accordance with the movement sequence selected at said second step. 43. A method according to claim 42, wherein said arithmetic step determines the movement sequence while giving at least one process area a constraint regarding to the scan direction. 44. A method according to claim 43, wherein: the object is a substrate, the plural process areas are chip areas formed on the substrate, and said arithmetic step determines the movement sequence while giving the chip areas located at the edge of the substrate out of the chip areas such a constraint regarding to the scan direction that the chip areas at the edge have to be scanned in a direction from the center of the substrate to the periphery of the substrate. 45. A processing method of visiting plural process areas provided on an objective body by moving the objective body along a predetermined two-dimensional plane in order from a process area having a higher process priority out of the plural process areas, and performing a predetermined process while scanning each of the visited plural process area by moving the object along the two-dimensional plane, said processing method comprising an arithmetic step of determining a scanning course of each of the plural process areas while performing the predetermined process onto each of the plural process areas, by using at least one of an operations research technique and an evolutionary computation method, the determined scanning course of each of the plural process areas exerting an influence upon a total visiting time when the plural process areas are successively visited by way of each visiting course from a process area having a predetermined process priority to a process area having a next process priority, the scanning course being parallel with a plane corresponding to the plural process areas, whereby said arithmetic step obtains a most desirable solution of the scanning course in view of the total visiting time; and a processing step of scanning on the plural process areas in accordance with the most desirable solution of the scanning course obtained by said arithmetic step. 46. A method according to claim 45, wherein said arithmetic step includes: a first step of generating a group including plural candidates of scanning courses which can be performed, generated from candidates each including a scanning course of said local area in each of said plural process areas; and a second step of selecting one of said plural candidates having a shortest total visit time, out of said group generated by said first step, and wherein, in said process step, scanning in accordance with the scanning courses defined by the one of said plural candidates selected in said second step. 47. A method according to claim 46, wherein said evolutionary computation method is a genetic algorithm. 48. A method according to claim 46, wherein said operations research technique includes at least one of a linear programming method, a Lin & Kernighan's approach, a k-OPT method and a combination method thereof.