IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0929658
(2001-08-15)
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발명자
/ 주소 |
- Whiteside, Kirt E.
- Whiteside, Terry L.
- Mays, Kristin C.
|
출원인 / 주소 |
|
대리인 / 주소 |
Renner, Kenner, Greive, Bobak, Taylor & Weber
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인용정보 |
피인용 횟수 :
12 인용 특허 :
9 |
초록
▼
A creeper (10) includes a main frame (11) which is rendered mobile by caster assemblies (14, 15, 16). A pivot frame (22) is pivotally attached to the main frame (11) and carries a pad section (19). Another pivot frame (28) is pivotally attached to the main frame (11) and carries another pad section
A creeper (10) includes a main frame (11) which is rendered mobile by caster assemblies (14, 15, 16). A pivot frame (22) is pivotally attached to the main frame (11) and carries a pad section (19). Another pivot frame (28) is pivotally attached to the main frame (11) and carries another pad section (20). A floating frame holding mechanism (50) is provided to maintain a selected pivotal position of the pivot frame (22) relative to the main frame (11), and a frame holding mechanism (34) is provided to maintain a selected pivotal position of the other pivot frame (28) relative to the main frame (11).
대표청구항
▼
A creeper (10) includes a main frame (11) which is rendered mobile by caster assemblies (14, 15, 16). A pivot frame (22) is pivotally attached to the main frame (11) and carries a pad section (19). Another pivot frame (28) is pivotally attached to the main frame (11) and carries another pad section
A creeper (10) includes a main frame (11) which is rendered mobile by caster assemblies (14, 15, 16). A pivot frame (22) is pivotally attached to the main frame (11) and carries a pad section (19). Another pivot frame (28) is pivotally attached to the main frame (11) and carries another pad section (20). A floating frame holding mechanism (50) is provided to maintain a selected pivotal position of the pivot frame (22) relative to the main frame (11), and a frame holding mechanism (34) is provided to maintain a selected pivotal position of the other pivot frame (28) relative to the main frame (11). r drive shaft being configured to move the conical-type wedge between the upper position and the lower position; and a rotary drive shaft being attached to the liner drive shaft, the rotary drive shaft being configured to rotate so as to cause the linear drive shaft and the conical-type wedge to rotate. 5. A chuck assembly for use in preparing a substrate as recited in claim 1, wherein the plurality of spokes are configured to create a plurality of ribs, the ribs being configured to reduce a weight of the chuck body. 6. A chuck assembly for use in preparing a substrate as recited in claim 1, wherein the chuck assembly is configured to be open when the conical-type wedge is in the upper position and is configured to be closed when the conical-type wedge is in the lower position. 7. A chuck assembly for use in a substrate spin, rinse, and dry (SRD) module, the chuck assembly comprising: a wedge having a sidewall, the wedge being configured to move from a lower position to an upper position and from the upper position to the lower position thus opening and closing the chuck assembly, respectively; a chuck body having a cylindrical shape, the chuck body being configured to include a plurality of linkage arms, the chuck body being configured to enclose the wedge such that each linkage arm is configured to be substantially in contact with the sidewall of the wedge, the cylindrical shape of the chuck body is configured to reduce air disturbance around a surface of a substrate; and a plurality of grippers configured to be coupled to the chuck body via a plurality of rotation pins, each of the grippers configured to stand substantially upright so as to engage the substrate when the wedge is in a lower position, and to lie substantially flat so as to disengage the substrate when the wedge is in the upper position. 8. A chuck assembly for use in a substrate (SRD) module as recited in claim 7, wherein the plurality of spokes are configured to outline a plurality of ribs, the ribs being configured to reduce a weight of the chuck body. 9. A chuck assembly for use in a substrate (SRD) module as recited in claim 7, further comprising: a wafer backside plate having a cylindrical-disk shape, the wafer backside plate configured to be connected on a top surface of the chuck top plate. 10. A chuck assembly for use in a substrate (SRD) module as recited in claim 7, further comprising: a wafer backside plate having a cylindrical-disk shape, the wafer backside plate configured to be defined on a top surface of the chuck body. 11. A chuck assembly for use in a substrate (SRD) module as recited in claim 7, further comprising: a linear drive shaft configured to be attached to a bottom region of the wedge, the linear drive shaft being configured to move the wedge between the upper position and the lower position; and a rotary drive shaft configured to be attached to the liner drive shaft, the rotary drive shaft being configured to rotate so as to cause the linear drive shaft and the wedge to rotate. 12. A chuck assembly for use in preparing a substrate, the chuck assembly comprising: a chuck body designed to have a cylindrical shape configured to reduce air disturbance around a surface of the substrate, the chuck body having an outer ring and an inner ring, the outer ring being connected to the inner ring with a plurality of spokes, each spoke being configured to house a linkage arm; a chuck top plate having a ring, the chuck top plate configured to be attached to a top surface of the chuck body; a wafer backside plate having a cylindrical-disk shape, the wafer backside plate configured to be defined on a top surface of the chuck top plate; a plurality of grippers, each gripper being coupled to the chuck body with a rotation pin and to the respective linkage arm with a linkage pin, each gripper being configured to pivot about the respective rotation pin between a substantially upright position and a substantially flat posi
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