초록

An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations.

대표청구항 ▼

An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations. al of oil and water vapor from compressed air; An air heat exchanger for coo

An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool, without the occurrence of pressure spikes or flow perturbations. al of oil and water vapor from compressed air; An air heat exchanger for cooling the dehumidified air by refrigerated air; A turbine expander for refrigerating the dehumidified air to subzero temperatures; A refrigerator for taking heat load from the refrigerator-contained items; An impeller means drawing air out of the refrigeration chamber and into said heat exchanger; A controlling means for regulating the flow of air into said turbine expander, and Said refrigerator including a refrigeration chamber and an adjacent channel for delaying exit of the refrigerated air from said refrigerator; Said channel guiding the refrigerated air exited from the refrigeration chamber into a wave like path; and Said channel including a series of staggered fins forming said wave-like path. 6. An air-based refrigeration system comprising: A series of dehumidification devices for sequential removal of oil and water vapor from compressed air; An air heat exchanger for cooling the dehumidified air by refrigerated air; A turbine expander far refrigerating the dehumidified air to subzero temperatures; A refrigerator for taking heat load from the refrigerator-contained items; An impeller means drawing air out of the refrigeration chamber and into said heat exchanger; A controlling means for regulating the flow of air into said turbine expander; Said refrigerator including a refrigeration chamber and an adjacent channel for delaying exit of the refrigerated air from said refrigerator; Said heat exchanger cooling the incoming dehumidified air with the air coming from said refrigeration chamber. 7. An air-based refrigeration system comprising: A series of dehumidification devices for sequential removal of oil and water vapor from compressed air; An air heat exchanger for cooling the dehumidified air by refrigerated air; A turbine expander for refrigerating the dehumidified air to subzero temperatures; A refrigerator for taking heat load from the refrigerator-contained items; An impeller means drawing air out of the refrigeration chamber and into said heat exchanger; A controlling means for regulating the flow of air into said turbine expander, and Said refrigerator including a refrigeration chamber and an adjacent channel for delaying exit of the refrigerated air from said refrigerator; and Said refrigerator including an opening in a partition separating said channel from said refrigeration chamber. 8. A refrigeration system comprising: A multiphase dehumidification means for removing oil and water vapor from said system; Said dehumidification means including a moisture absorber and tap water cooling means; A dust filter for catching absorber dust; A heat exchanger for cooling the filtered and dehumidified air; A turbine expander supplying refrigerated air; A fan drawing air from a refrigerator, then compressing and evacuating said air out of the system; and Waste collection means for removing suspended particles from the refrigerator. 9. A refrigeration system of claim 8, and Said dehumidification means including a moisture absorber being regenerated by hot air exiting from the subject system. 10. A refrigeration system of claim 8, and Said dehumidification means including a dryer with a continuously compacted column of moisture absorbing material; and Said dryer including an entry and exit air chambers. 11. A refrigeration system of claim 8, and Said fan and turbine sitting on the same shaft. 12. A refrigeration system of claim 8, and Said refrigerator including a channel with a series of fins forming a sinusoidal path for the refrigerated airflow. 13. A refrigeration method comprising the following steps: Compressing air with a standard compressor; Cooling air with tap water lines in a pre-cooler for its dehumidification; Separating water and oil droplets from the air by a moisture extractor; Absorbing moisture in dryer including a moisture absorbing material; Cooling the dehum idified air in a heat exchanger; Producing refrigerated air in a turbine expander using the air cooled in the heat exchanger; Extending the time of the refrigerated air presence in a refrigerator by guiding said air into a wave-like path between refrigerator channel fins; Using the refrigerated air for cooling the dehumidified air in said heat exchanger; Attenuating noise of the system by a muffler. 14. A refrigeration method of claim 13, and Said moisture-absorbing material being regenerated by hot air moving in the reverse-to-normal direction from the exit chamber toward the entry chamber of the dryer. 15. A refrigeration method of claim 13, and Filtering the dehumidified air with a dust filter removing suspended particles from the system prior to its entering said turbine expander. 16. A refrigeration method of claim 13, and Compressing the refrigerated air by an impeller fan to increase its temperature and pressure; and Using hot air exiting the system for said absorbing material regeneration. 17. An air-based refrigeration system comprising: A series of dehumidification devices for sequential removal of oil and water vapor from compressed air; An air heat exchanger for cooling the dehumidified air by refrigerated air; A turbine expander for refrigerating the dehumidified air to subzero temperatures; A refrigerator for taking heat load from the refrigerator-contained items; An impeller means drawing air out of the refrigeration chamber and into said heat exchanger; A controlling means for regulating the flow of air into said turbine expander; Said dehumidification devices comprising a pre-cooler for cooling compressed air with tap water; Dryer means containing moisture-absorbing material; Moisture separator means for blocking the entry of water and oil droplets into a compressed air line; A dust filter for removing suspended particles from compressed and dehumidified air; A muffler for noise attenuation of air prior to its exiting from the system; A heater for drying moisture-absorbing material in said dryer; A waste collection means for accumulating snowflakes and particles exiting from said refrigerator; Said impeller means including a fan sitting on the same shaft with said turbine expander. allow the cargo door camming handle to be raised, lowered, and pivoted while the cover is installed on the handle and the handle is free of the top hasp member. te; said locking plate further comprises a latch which engages said hook, and an arm extending sideways from said locking plate; and said lifting plate further comprises a folding plate, wherein said folding plate engages said arm of said locking plate to move said locking plate thereby moving said latch to disengage said hook. 2. An improved lock according to claim 1, wherein said opening device further comprises a convex plate movable within a window in said opening device, the convex plate having a metal bar which engages said folding plate of said lifting plate to facilitate pivotal movement of said lifting plate. 3. An improved lock according to claim 2, wherein said lifting plate is scale shaped, said lifting plate further comprises a second folding plate opposite said folding plate, wherein said locking plate is L-shaped, wherein said base plate comprises a folding plate for receiving one end of said elastic component, and wherein said window of said opening device further comprises four projecting objects on longer sides thereof.