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Run-to-run controller for use in microelectronic fabrication

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-019/00
출원번호 US-0599357 (2000-06-20)
발명자 / 주소
  • Stoddard, Kevin D.
  • Schulze, Bradley D.
  • Tsakalis, Konstantinos
출원인 / 주소
  • Brooks Automation, Inc.
대리인 / 주소
    Perman & Green, LLP
인용정보 피인용 횟수 : 138  인용 특허 : 25

초록

A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comp

대표청구항

A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comp

이 특허에 인용된 특허 (25)

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