IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0599357
(2000-06-20)
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발명자
/ 주소 |
- Stoddard, Kevin D.
- Schulze, Bradley D.
- Tsakalis, Konstantinos
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출원인 / 주소 |
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대리인 / 주소 |
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인용정보 |
피인용 횟수 :
138 인용 특허 :
25 |
초록
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A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comp
A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comprises an interface for receiving metrology data from the metrology tools and a number of variable parameter tables, one for each of the processing tools, collectively associated with a manufacturing process recipe. The supervising station also includes one or more internal models which relate received metrology data to one or more variables for a processing tool, and which can modify variables stored in the variable parameter table to control the process tools using feedback and/or feed-forward control algorithms. Feed-forward control algorithms may, in certain embodiments, be used to adjust process targets for closed loop feedback control. The supervising station may have a user interface by which different feedback or feed-forward model formats (single or multi-variate) may be interactively selected based upon experimental or predicted behavior of the system, and may also permit users to utilize their own models for run-to-run control.
대표청구항
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A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comp
A automated run-to-run controller for controlling manufacturing processes comprises set of processing tools, a set of metrology tools for taking metrology measurements from the processing tools, and a supervising station for managing and controlling the processing tools. The supervising station comprises an interface for receiving metrology data from the metrology tools and a number of variable parameter tables, one for each of the processing tools, collectively associated with a manufacturing process recipe. The supervising station also includes one or more internal models which relate received metrology data to one or more variables for a processing tool, and which can modify variables stored in the variable parameter table to control the process tools using feedback and/or feed-forward control algorithms. Feed-forward control algorithms may, in certain embodiments, be used to adjust process targets for closed loop feedback control. The supervising station may have a user interface by which different feedback or feed-forward model formats (single or multi-variate) may be interactively selected based upon experimental or predicted behavior of the system, and may also permit users to utilize their own models for run-to-run control. York, 1978. erein said second display is a touch-sensitive display that serves as an input device for allowing a user to enter information. 10. A personal communicator as defined in claim 7, further comprising at least one software-definable input key on said flip element, said input key positioned proximate to said display such that a function of said input key can be indicated on said display. 11. A personal communicator as defined in claim 7, further comprising means to activate at least one of said displays when said flip element is in a first angular position relative to said body portion and to deactivate at least one of said displays when said flip element is in a second angular position relative to said body portion. 12. A method of communicating, comprising: receiving at least one data message in a radiotelephone that includes a flip element with a display screen hingedly attached to a body portion that is configured for placement to an ear of a user for voice communications; receiving application programs by transmission from a remote storage device; in response to a position of the flip element, determining an operating mode of the radiotelephone from among a voice mode, a display mode, and a dual mode that supports simultaneous participation in telephone conversations and interaction with software application programs including text messaging applications, wherein the received application programs are processed partially by the remote storage device; controlling power states of components of the radiotelephone in response to the operating mode; and displaying the at least one data message on the display screen. 13. The method according to claim 12, further comprising activating the display screen by opening the flip element. 14. The method according to claim 12, further comprising displaying at least one menu option on a portion of the display screen, the menu option indicating a function of an input key located on the flip element. 15. The method according to claim 12, further comprising: displaying a menu option on a portion of the display screen; and selecting the menu option by pressing on the portion of the display screen. 16. A personal communicator, comprising: a body portion configured for placement to an ear of a user; a speaker disposed in the body portion; input means disposed on the body portion for allowing the user to enter information; a flip element hingedly mounted on the body portion, wherein a position of the flip element determines an operating mode of the personal communicator from among a voice mode, a display mode, and a dual mode that supports simultaneous participation in telephone conversations and interaction with software application programs including text messaging applications; a microphone disposed in the flip element; a display disposed on the body; a memory for storing application programs; and a CPU disposed in communication with the input means and the display, the CPU executing application programs stored in the memory and being capable of receiving application programs by transmission from a remote storage device, wherein the application programs include at least one program that controls display of information, wherein the application programs may be executed partially by the processor and partially by a remote processing means and wherein the CPU controls power states of components of the personal communicator in response to the operating mode. 17. The personal communicator according to claim 16, wherein said CPU is further disposed in communication with said microphone and one of said application programs implements voice recognition enabling a user to dial a telephone number by speaking into said microphone. 18. The personal communicator according to claim 16, wherein said display is touch sensitive and one of said application programs implements handwriting recognition enabling a user to dial a telephone number by writing on said display. 19. The personal c ommunicator according to claim 16, further comprising a second display disposed on said flip element, said display being of sufficient size to present multiple lines of alphanumeric data simultaneously to the user. 20. The personal communicator according to claim 19, wherein said display and said second display are both touch sensitive. 21. The personal communicator according to claim 19, wherein said display is touch sensitive. 22. The personal communicator according to claim 19, wherein said display and said second display may be turned on and off as required by said CPU executing one of said application programs. 23. The personal communicator of claim 16, further comprising: a voice mode wherein said communicator operates as a telephone; and a display mode wherein said user may interact with one or more of said application programs. 24. The personal communicator of claim 23, further comprising: a dual mode wherein said communicator operates as a telephone, and said user may interact with one or more of said application programs. 25. A programmable personal communicator comprising: a body portion configured for placement to an ear of a user; a speaker disposed in the body portion; input means disposed on the body portion for allowing the user to enter information; a flip element hingedly mounted on the body portion, wherein a position of the flip element determines an operating mode of the programmable personal communicator from among a voice mode, a display mode, and a dual mode that supports simultaneous participation in telephone conversations and interaction with software application programs including text messaging applications; a microphone disposed in the flip element; a display disposed on the flip element the display being of sufficient size to present multiple lines of alphanumeric data simultaneously to the user and for displaying facsimile messages and e-mail messages; a memory for storing application programs; and a CPU disposed in communication with the display, the CPU executing application programs stored in the memory and being capable of receiving application programs by transmission from a personal computer via a communications adapter, the adapter linking the CPU to the personal computer, the executing controlling information displayed on the display, the CPU receiving the facsimile messages and the e-mail communications, wherein the application programs may be executed partially by the processor and partially by a remote processing means and wherein the CPU controls power states of components of the personal communicator in response to the operating mode. 26. A programmable personal communicator comprising: a body portion configured for placement to the ear of a user; a speaker disposed in said body portion; an input device disposed on said body portion for allowing the user to enter information; a flip element hingedly mounted on said body portion, wherein a position of the flip element determines an operating mode of the programmable personal communicator from among a voice mode, a display mode, and a dual mode that supports simultaneous participation in telephone conversations and interaction with software application programs including text messaging applications; a microphone disposed in said flip element; a display disposed on said flip element, said display being of sufficient size to present multiple lines of alphanumeric data simultaneously to the user and for displaying facsimile messages and e-mail messages; a memory for storing application programs; and a CPU disposed in communication with said display, said CPU executing application programs stored in said memory and being capable of receiving application programs by transmission from a personal computer via a communications adapter, said adapter linking said CPU to said personal computer, said executing controlling information displayed on said display, said CPU receiving said facsimile messages and said e
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