초록 ▼

There is provided a method of making a high-melting metal powder which has high purity and excellent formability and, particularly, of a metal powder of spherical particles made of Ta, Ru, etc. having a higher melting point than iron. There is also provided a target of high-melting metal or its allo

There is provided a method of making a high-melting metal powder which has high purity and excellent formability and, particularly, of a metal powder of spherical particles made of Ta, Ru, etc. having a higher melting point than iron. There is also provided a target of high-melting metal or its alloy, which is made by the sintering under pressure of these powders and which has high purity and a low oxygen concentration and shows high density and a fine and uniform structure. A powder metal material mainly composed of a high-melting metal material is introduced into a thermal plasma into which hydrogen gas has been introduced, thereby to accomplish refining and spheroidizing. Further, an obtained powder is pressed under pressure by hot isostatic pressing, etc.

대표청구항 ▼

1. A sputtering target obtained by performing pressure sintering of a powder obtained by introducing a powder material mainly composed of a refractory metal into a thermal plasma into which a hydrogen gas has been introduced, said powder material being mainly composed of Ta or Ru and the shape of pa

1. A sputtering target obtained by performing pressure sintering of a powder obtained by introducing a powder material mainly composed of a refractory metal into a thermal plasma into which a hydrogen gas has been introduced, said powder material being mainly composed of Ta or Ru and the shape of particles of said powder material being spherical or analogous to a sphere. 2. A refractory metal powder material, said powder having a purity of not less than 99.999%, an oxygen concentration of not more than 100 ppm, and having a shape of a sphere or analogous thereto. 3. A refractory metal powder material according to claim 2, wherein said powder material can be obtained by introducing the powder material mainly composed of a refractory metal into a thermal plasma flame. 4. A refractory metal powder material according to claim 2, wherein said powder material can be obtained by introducing said powder material into a thermal plasma flame into which hydrogen gas has been introduced. 5. A refractory metal powder material according to claim 2, wherein said powder material mainly composed of a refractory metal is introduced into a thermal plasma flame into which hydrogen gas is introduced, a purity of the powder material is not less than 99.999%, an oxygen concentration thereof not more than 100 ppm, and a shape of said powder material is a sphere or analogous thereto.