초록 ▼

A load port assembly capable of monitoring a plurality of performance characteristics of wafer carriers. The load port assembly may include one or more of the following monitoring systems: a torque measurement system, a wafer height measurement system, a carrier identification reader, an information

A load port assembly capable of monitoring a plurality of performance characteristics of wafer carriers. The load port assembly may include one or more of the following monitoring systems: a torque measurement system, a wafer height measurement system, a carrier identification reader, an information pad, a resistivity measurement system, a cleanliness measurement system, a seal performance detector, and a relative humidity detector. In a preferred embodiment of the present invention, each of the monitoring systems are integrated into either a carrier advance plate or a port door of the load port assembly.

대표청구항 ▼

1. A load port assembly capable of monitoring characteristics of a carrier having a carrier door removably coupled to a carrier shell, the load port assembly comprising: a port door having latch keys capable of decoupling the carrier door from the carrier shell, said port door includes: at leas

1. A load port assembly capable of monitoring characteristics of a carrier having a carrier door removably coupled to a carrier shell, the load port assembly comprising: a port door having latch keys capable of decoupling the carrier door from the carrier shell, said port door includes: at least one monitoring system selected from a group consisting of (i) a torque measurement system, and (ii) a wafer height measurement system; a carrier advance plate having registration pins for engaging the carrier shell while the carrier is seated on said carrier advance plate, and capable of moving a carrier seated upon said carrier advance plate towards said port door, said carrier advance plate includes: at least two monitoring systems selected from a group consisting of (i) a carrier identification reader, (ii) a carrier configuration detector, (iii) a resistivity measurement system, (iv) a cleanliness measurement system, (v) a seal performance detector, and (vi) a relative humidity detector. 2. The load port assembly according to claim 1, wherein said torque measurement system is capable of measuring the amount of torque required for said latch keys to decouple the carrier door from the carrier shell. 3. The load port assembly according to claim 1, wherein said wafer height measurement system is capable of detecting each wafer stored in the carrier. 4. The load port assembly according to claim 1, wherein said seal performance detector includes an inlet opening and an outlet opening formed in said carrier advance plate that align with an inlet and outlet valve located in the bottom of the carrier shell when the carrier is seated on said carrier advance plate. 5. The load port assembly according to claim 1, wherein each said monitoring system generates an electronic data signal. 6. The load port assembly according to claim 5, wherein the load port assembly further includes a database for storing said electronic data signals and generating reports. 7. A load port assembly capable of monitoring characteristics of a wafer carrier having a carrier door coupled to a carrier shell, the load port assembly comprising: a port door having latch keys to engage the carrier door and decouple the carrier door from the carrier shell, said port door includes: means for measuring the torque required to decouple the carrier door from the carrier shell; means for detecting each wafer stored in the carrier; a carrier advance plate having registration pins for engaging the carrier shell, and capable of moving a carrier seated upon said carrier advance plate towards said port door, said carrier advance plate includes: means for identifying the carrier; means for determining if the carrier is compatible with the load port assembly; means for neutralizing a static charge on the carrier; means for measuring the amount of particulates within the carrier; means for testing the effectiveness of the seal located between the carrier door and the carrier shell; and means for measuring the relative humidity within the carrier. 8. A load port assembly capable of monitoring characteristics of a carrier having a carrier door coupled to a carrier shell, the load port assembly comprising: a port door having latch keys to engage the carrier door and decouple the carrier door from the carrier shell, said port door includes: a torque measurement system; a wafer height measurement system; a carrier advance plate having registration pins for engaging the carrier shell while the carrier is seated on said wafer advance plate, and capable of moving a carrier seated upon said carrier advance plate towards said port door, said carrier advance plate includes: a carrier identification reader; a carrier configuration detector; a resistivity measurement system; a cleanliness measurement system; a seal performance detector; and a relative humidity detector.