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Production of a GaN bulk crystal substrate and a semiconductor device formed on a GaN bulk crystal substrate 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-011/04
  • C30B-011/12
출원번호 US-0590063 (2000-06-08)
우선권정보 JP-0162411 (1999-06-09); JP-0237195 (1999-08-24); JP-0277045 (1999-09-29); JP-0295039 (1999-10-18)
발명자 / 주소
  • Sarayama, Seiji
  • Shimada, Masahiko
  • Yamane, Hisanori
  • Iwata, Hirokazu
출원인 / 주소
  • Ricoh Company Ltd.
대리인 / 주소
    Cooper and Dunham, LLP.
인용정보 피인용 횟수 : 81  인용 특허 : 3

초록

A method of making a bulk crystal substrate of a GaN single crystal includes the steps of forming a molten flux of an alkali metal in a reaction vessel and causing a growth of a GaN single crystal from the molten flux, wherein the growth is continued while replenishing a compound containing N from a

대표청구항

A method of making a bulk crystal substrate of a GaN single crystal includes the steps of forming a molten flux of an alkali metal in a reaction vessel and causing a growth of a GaN single crystal from the molten flux, wherein the growth is continued while replenishing a compound containing N from a

이 특허에 인용된 특허 (3)

  1. DiSalvo Francis J. ; Yamane Hisanori,JPX ; Molstad Jay, Low temperature method of preparing GaN single crystals.
  2. Shibata Masatomo,JPX ; Furuya Takashi,JPX, Method of fabricating nitride crystal, mixture, liquid phase growth method, nitride crystal, nitride crystal powders, and vapor phase growth method.
  3. Purdy Andrew P., Process for preparing bulk cubic gallium nitride.

이 특허를 인용한 특허 (81)

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  6. Minemoto, Hisashi; Kitaoka, Yasuo; Kidoguchi, Isao; Mori, Yusuke; Kawamura, Fumio; Sasaki, Takatomo; Umeda, Hidekazu; Takahashi, Yasuhito, Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride.
  7. Minemoto,Hisashi; Kitaoka,Yasuo; Kidoguchi,Isao; Mori,Yusuke; Kawamura,Fumio; Sasaki,Takatomo; Umeda,Hidekazu; Takahashi,Yasuhito, Apparatus for production of crystal of group III element nitride and process for producing crystal of group III element nitride.
  8. Melnik, Yuri V.; Soukhoveev, Vitali; Ivantsov, Vladimir; Tsvetkov, Katie; Dmitriev, Vladimir A, Bulk GaN and AlGaN single crystals.
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