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Automatic refill system for ultra pure or contamination sensitive chemicals 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F17C-013/00
출원번호 US-0211940 (2002-08-02)
발명자 / 주소
  • Blatt, Christopher S.
  • Pearce, Richard H.
  • Williams, Graham
  • Wentworth, III, Edward H.
출원인 / 주소
  • Arch Specialty Chemicals, Inc.
대리인 / 주소
    Ohlandt, Greeley, Ruggier & Perle, L.L.P.
인용정보 피인용 횟수 : 16  인용 특허 : 21

초록

A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the sy

대표청구항

A highly reliable and safe, modular automatic refill (bulk delivery) system for ultra-high purity pyrophoric metalorganic chemicals employing: a manifold that insures contamination-free operation; a liquid-level detection system with fail-safe redundancy; and an evacuation system which leaves the sy

이 특허에 인용된 특허 (21)

  1. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  2. Fair David L. (Rockford IL), Bubbler container automatic refill system.
  3. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Bulk containers for high purity chemical delivery systems.
  4. John N. Gregg ; Craig M. Noah ; Robert M. Jackson, Chemical delivery system having purge system utilizing multiple purge techniques.
  5. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Chemical refill system for high purity chemicals.
  6. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (San Jose CA), Chemical refill system for high purity chemicals.
  7. Goossens Dirk (Sint Niklaas BEX) Boeglin Herman J. (South Meriden CT), Computer-controlled chemical dispensing with alternative operating modes.
  8. Jackson Robert M., Delivery system and manifold.
  9. Beale Jeffrey P. (CH-IV Corporation 599 Canal St. Lawrence MA 01840), Dispensing system for refueling transport containers with cryogenic liquids.
  10. Zoltan Bart J. (Old Tappan NJ) Boulay William F. (West Haverstraw NY) Miller Donald R. (Westwood NJ), Filling apparatus.
  11. Siegele Stephen H. ; Noah Craig M. ; Gregg John N., Level control systems for high purity chemical delivery systems.
  12. Burch Daniel E. (Lewisville TX), Liquid dispensing system.
  13. Miyazaki Shinji (Yokohama JPX) Tsunashima Yoshitaka (Tokyo JPX), Liquid source container device.
  14. Topping Joseph C. (Austin TX) Neeb William M. (Rochester Hills MI), Liquid transfer apparatus.
  15. Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Manifold systems for high purity chemical delivery systems.
  16. Keyser Gene E., Method and apparatus for limiting emissions from a contained vessel.
  17. Goossens Dirk (St. Niklass BEX), Modular bubbler container automatic refill system.
  18. Ferri ; Jr. Edward T. (Gilroy CA) Geatz J. Tobin (Durham NC), Process and apparatus for electronic control of the transfer and delivery of high purity chemicals.
  19. Bernosky Eugene W. (Hollister CA) Geatz J. Tobin (Durham NC) Ferrie ; Jr. Edward T. (Gilroy CA) Roberson ; Jr. Glenn A. (Hollister CA), Process for precise volumetrio diluting/mixing of chemicals.
  20. Siegele Stephen H. ; Noah Craig M. ; Gregg John N., Refillable ampule and method re same.
  21. Hamner Richard M. (Huntsville AL) Allen Janice K. (Huntsville AL), Wet atmosphere generation apparatus.

이 특허를 인용한 특허 (16)

  1. Gerken, David, Control of fluid conditions in bulk fluid distribution systems.
  2. Galland, Régis, Device for connecting a storage vat to a feed and process for managing such connection.
  3. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  4. O'Dougherty, Kevin T.; Tom, Glenn M., Fluid storage and dispensing systems and processes.
  5. Yoshimoto, Osamu, Gas supply system.
  6. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  7. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  8. Hovinen, Minna; Kingery, John R.; Tom, Glenn M.; O'Dougherty, Kevin T.; Mikkelsen, Kirk; Ware, Donald D.; Van Buskirk, Peter C., Liner-based liquid storage and dispensing systems with empty detection capability.
  9. Kelekar, Rajesh; Verma, Gaurav; Weiner, Kurt, Maintaining flow rate of a fluid.
  10. Dilorenzo, Thomas G.; Stanton, IV, Edward Allan; Antwiler, Glen Delbert; Kinzie, Michael E.; Nankervis, Brian J.; Givens, Monique; Medina, Casey V.; Dodd, Jon A., Methods and systems of growing and harvesting cells in a hollow fiber bioreactor system with control conditions.
  11. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong, Methods of vapor deposition with multiple vapor sources.
  12. Pomarede, Christophe; Shero, Eric; Verghese, Mohith; Maes, Jan Willem; Wang, Chang-Gong, Multiple vapor sources for vapor deposition.
  13. Varga, Christopher M, Non-metallic humidification component.
  14. Meisner, Gregory P., Offboard heat management during compressed gas filling of vehicular hydrogen storage tanks.
  15. De Carolis, Enrico; Heriot, Scott; Grissom, Brian, Valve manifold circuit board with serial communication and control circuit line.
  16. De Carolis, Enrico; Heriot, Scott D.; Hundt, Michael W., Valve manifold circuit board with serial communication circuit line.
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