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Process and system for separation and recovery of perfluorocompound gases 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01D-053/22
출원번호 US-0296652 (1999-04-23)
발명자 / 주소
  • Li, Yao-En
  • Paganessi, Joseph E.
  • Vassallo, David
  • Fleming, Gregory K.
출원인 / 주소
  • L'Air Liquide - Societe Anonyme a' Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation des Procedes Georges Claude, American Air Liquide
대리인 / 주소
    Russell, Linda K.
인용정보 피인용 횟수 : 4  인용 특허 : 61

초록

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predet

대표청구항

1. A process for the separation and recovery of SF6,which comprises contacting a gas mixture comprising a low concentration of SF6and at least one carrier gas with a membrane selected from the group consisting of polyimides and cellulose acetates at conditions effective to obtain a permeate stream d

이 특허에 인용된 특허 (61)

  1. Kitayama Masayasu (Kawasaki JPX) Sugimori Yoshiaki (Tokyo JPX) Ohta Schunich (Fujisawa JPX), Absorbent for treating gases containing the materials used for semiconductor products and process of treating such gases.
  2. Porter Vernon R. (Plano TX), Apparatus for generation and control of dopant and reactive gases.
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  4. Kesting Robert E. (Elsenfeld MO DEX) Fritzsche Alfred K. (Manchester MO) Murphy Milton K. (Clayton MO) Handerman Alan C. (Matthews NC) Cruse Clint A. (St. John MO) Malon Raymond F. (Edmundson MO), Asymmetric gas separation membranes having graded density skins.
  5. Alegranti ; Constance Wright, Asymmetric polyimide membranes.
  6. Young Thomas C. (Walnut Creek CA) Caskey Terrence L. (Concord CA) Trimmer Johnny L. (Antioch CA) Mahley ; III George E. (Berkeley CA) Yoshisato Randall A. (Vallejo CA) Jensvold John A. (Benicia CA), Boreside feed hollow fiber membrane device.
  7. Koros William J. (Austin TX) Jones Cheryl W. (Austin TX), Composite carbon fluid separation membranes.
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  9. Ohyabu Shuzo (Kurashiki JPX) Kawai Syuji (Kurashiki JPX) Okamoto Takehiko (Kurashiki JPX) Migaki Takao (Okayama JPX), Composite hollow fiber-type separation membranes, processes for the preparation thereof and their use.
  10. Takemura Tohru (Ohtake JPX) Yoshida Haruhiko (Kugagun JPX) Hukunaga Osamu (Iwakuni JPX), Composite hollow fibers and method of making same.
  11. Bikson Benjamin (Brookline MA) Nelson Joyce K. (Lexington MA), Composite membranes and their manufacture and use.
  12. Salemme Robert M. (Schenectady NY) Browall Warella R. (Scotia NY), Continuous preparation of ultrathin polymeric membrane laminates.
  13. Prasad Ravi (East Amherst NY), Enhanced meambrane gas separations.
  14. Barbe Christian (Fontenay aux Roses FRX), Fast response membrane generator using heat accumulation.
  15. Chernyakov Iosif ; Hsiung Thomas Hsiao-Ling ; Schwarz Alexander ; Yang James Hsu-Kuang, Fluorochemical recovery and recycle using membranes.
  16. Hsieh Shan-Tao (Charleston WV) Keller ; II George E. (South Charleston WV), Gas separation by semi-permeable membranes.
  17. Matsuura Junichi (Kamakura JPX) Okada Munehisa (Machida JPX), Gas separation membrane.
  18. Toy Lora G. (San Francisco CA) Pinnau Ingo (Palo Alto CA) Baker Richard W. (Palo Alto CA), Gas-separation process.
  19. Xu Jianguo (Fogelsville PA), High pressure feed membrane separation process.
  20. Kimura Shiro G. (Schenectady NY) Lavigne Raymond G. (Waterford NY) Browall Warella R. (Scotia NY), Method for casting ultrathin methylpentene polymer membranes.
  21. Kitahara Koichi (Kanagawa JPX) Shimada Takashi (Kanagawa JPX), Method for cleaning exhaust gases.
  22. Kitahara Koichi (Kanagawa JPX) Shimada Takashi (Kanagawa JPX) Akita Noboru (Kanagawa JPX) Hiramoto Tadashi (Kanagawa JPX) Sasaki Kohhei (Kanagawa JPX), Method for cleaning exhaust gases.
  23. Kitahara Koichi (Kanagawa JPX) Akita Noboru (Kanagawa JPX) Shimada Takashi (Kanagawa JPX) Sasaki Kohhei (Kanagawa JPX) Hiramoto Tadashi (Kanagawa JPX), Method for cleaning gas containing toxic component.
  24. Cabasso Israel (Syracuse NY) Lundy Kevin A. (Columbus GA), Method of making membranes for gas separation and the composite membranes.
  25. St. Hilaire Kelly L. (Hollis NH), Method of purifying a mixed H2/H2Se vapor stream.
  26. Weinberg Norman L. (Amherst NY) Genders John D. (Lancaster NY) Minklei Alfred O. (Grand Island NY), Methods for purification of air.
  27. Takemura Tohru (Hiroshima JPX) Itoh Hajime (Hiroshima JPX) Kamo Jun (Hiroshima JPX) Yoshida Haruhiko (Yamaguchi JPX), Multilayer composite hollow fibers and method of making same.
  28. Barbe Christian (Paris Cedex FRX) Masurel Dominique (Paris Cedex FRX), Multistage cascade sweep-process for membrane gas separation.
  29. Barbe Christian (Paris Cedex FRX) Masurel Dominique (Paris Cedex FRX), Multistage cascade-sweep process for membrane gas separation.
  30. Thompson David R. (Grand Island NY), Multistage membrane control system and process.
  31. Jeanes Thomas O. (Antioch CA) Summers John D. (Walnut Creek CA) Sanders ; Jr. Edgar S. (Pittsburg CA), Novel alicyclic polyimide gas separation membranes.
  32. Ekiner Okan M. (Wilmington DE) Hayes Richard A. (Parkersburg WV) Manos Phillip (Wilmington DE), Novel multicomponent fluid separation membranes.
  33. Nemser Stuart M. (Wilmington DE) Roman Ian C. (Wilmington DE), Perfluorodioxole membranes.
  34. Hayes Richard A. (Hockessin DE), Polyimide gas separation membranes.
  35. Makino Hiroshi (Ichihara JPX) Kusuki Yoshihiro (Ichihara JPX) Harada Takashi (Ichihara JPX) Shimazaki Hiroshi (Ichihara JPX) Isida Tosio (Ichihara JPX), Porous aromatic imide polymer membrane and a process for its manufacture.
  36. Prasad Ravi (East Amherst NY) Haas Oscar W. (North Tonawanda NY), Prevention of membrane degradation.
  37. Fillet Frdric (Paris FRX), Process and installation for the separation of gas by permeation.
  38. Li Yao-En ; Duchateau Eric L., Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases.
  39. Li Yao-En ; Paganessi Joseph E. ; Vassallo David ; Fleming Gregory K., Process and system for separation and recovery of perfluorocompound gases.
  40. Li Yao-En ; Paganessi Joseph E. ; Vassallo David ; Fleming Gregory K., Process and system for separation and recovery of perfluorocompound gases.
  41. Li Yao-En ; Paganessi Joseph E. ; Vassallo David ; Fleming Gregory K., Process and system for separation and recovery of perfluorocompound gases.
  42. Puri Pushpinder S. (Macungie PA), Process for making highly permeable coated composite hollow fiber membranes.
  43. Bottenbruch ; Ludwig ; Kampf ; Gunther ; Serini ; Volker ; Vernaleken ; Hugo, Process for manufacturing thin, non-porous gas permeable polycarbonate film s.
  44. Makino, Hiroshi; Kusuki, Yoshihiro; Yoshida, Hiroshi; Nakamura, Asumaru, Process for preparing aromatic polyimide semipermeable membranes.
  45. Makino Hiroshi (Ichihara JPX) Kusuki Yoshihiro (Ichihara JPX) Harada Takashi (Ichihara JPX) Shimazaki Hiroshi (Ichihara JPX), Process for producing aromatic polyimide hollow filaments.
  46. Makino Hiroshi (Ichihara JPX) Kusuki Yoshihiro (Ichihara JPX) Harada Takashi (Ichihara JPX) Shimazaki Hiroshi (Ichihara JPX) Isida Tosio (Ichihara JPX), Process for producing porous aromatic polyimide membranes.
  47. Li Yao-En, Process for recovering CF.sub.4 and C.sub.2 F.sub.6 from a gas.
  48. Li Yao-En ; Meimari Magdy,CAX, Process for recovering SF6 from a gas.
  49. Baker, Richard W., Process for recovering organic vapors from air.
  50. Lee Kung H. (Chadds Ford PA), Process for recovering organic vapors from air.
  51. Pinnau Ingo ; Wijmans Johannes G. ; He Zhenjie ; Goakey Shannon ; Baker Richard W., Process for recovering semiconductor industry cleaning compounds.
  52. Anumakonda Amar ; Gaita Romulus ; Yates Stephen ; Zhou Jim, Process for recovering sulfur hexafluoride.
  53. Delobel Olivier (Paris FRX) Louise Jean (Villejuif FRX) Cornut Philippe (Echirolles FRX), Process for removing gaseous hydrides from a solid support comprising metallic oxides.
  54. Lee Kung H. (Chadds Ford PA) Barsotti Domenic J. (Vineland NJ) Sakata Edward K. (Newark DE), Process for separating and recovering fluorocarbons and hydrogen fluoride from mixtures thereof.
  55. Choe Jung S. (Allentown PA) Auvil Steven R. (Macungie PA) Agrawal Rakesh (Allentown PA), Process for separating components of a gas stream.
  56. Makino Hiroshi (Ichihara JPX) Kusuki Yoshihiro (Ichihara JPX) Harada Takashi (Ichihara JPX) Shimazaki Hiroshi (Ichihara JPX) Isida Tosio (Ichihara JPX), Production of aromatic polyimide separating membranes.
  57. Tarasenko Valentin (Little Ferry NJ) Edelstein Harold (Fair Lawn NJ), Purification of anhydrous hydrogen fluoride.
  58. Leondaridis Paul (Paris IL FRX) Vendel Albert S. (Chicago IL) Akthar Tarranum (Chicago IL), Removal of gaseous hydrides.
  59. Prasad Ravi (East Amherst NY) Cook Pauline J. (Kenmore NY), Start-up and shut down processes for membrane systems and membrane systems useful for the same.
  60. Baker Richard W. (Palo Alto CA) Wijmans Johannes G. (Menlo Park CA), Two-stage membrane process and apparatus.
  61. Browall Warella R. (Scotia NY), Ultrathin polyetherimide membrane and gas separation process.

이 특허를 인용한 특허 (4)

  1. Tamata,Shin; Koukun,Ri; Irie,Kazuyoshi; Shibano,Yoshiki; Kanno,Shuichi, Method and apparatus for treating perfluorocompounds.
  2. Whitlock, Walter H., Method for the recovery and re-use of process gases.
  3. Smith, James Robert; Radoiu, Marilena; Coles, Stephen John, Method of treating gas.
  4. Zhou, Shaojun J.; Yates, Stephen F., Ozone resistant O/Nseparation membranes.

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