초록 ▼

A hollow cooled turbine airfoil is provided having pressure and suction side walls and a plurality of trailing edge cooling passages that feed cooling air bleed slots at the trailing edge. The airfoil trailing edge is selectively thickened in the root portion so as to allow shortened trailing edge s

A hollow cooled turbine airfoil is provided having pressure and suction side walls and a plurality of trailing edge cooling passages that feed cooling air bleed slots at the trailing edge. The airfoil trailing edge is selectively thickened in the root portion so as to allow shortened trailing edge slots, thereby improving trailing edge cooling and reducing mechanical and thermal stresses.

대표청구항 ▼

A hollow cooled turbine airfoil is provided having pressure and suction side walls and a plurality of trailing edge cooling passages that feed cooling air bleed slots at the trailing edge. The airfoil trailing edge is selectively thickened in the root portion so as to allow shortened trailing edge s

A hollow cooled turbine airfoil is provided having pressure and suction side walls and a plurality of trailing edge cooling passages that feed cooling air bleed slots at the trailing edge. The airfoil trailing edge is selectively thickened in the root portion so as to allow shortened trailing edge slots, thereby improving trailing edge cooling and reducing mechanical and thermal stresses. thin the housing that moves articles between athe article support surface when in its said second support surface position and a processing location removed from the second support surface position within the vacuum chamber. 4. The combination of claim 3, wherein the transport mechanism includes at least one pivotal arm that simultaneously engages two articles that are respectively on the article support surface when in its said second position and in the processing location, wherein rotation of the pivotal arm substantially one-hundred eighty degrees about an axis thereof exchanges positions of the two articles. 5. The combination of claim 4, wherein the transport mechanism also includes a sub-mechanism that cooperates with the pivotal arm to move two articles linearly toward and away from each other, wherein rotation of the pivotal arm substantially one-hundred eighty degrees about an axis thereof exchanges positions of the two articles when held toward each other. 6. The combination of claim 5, wherein the sub-mechanism includes a swinging arm to which the axis of said pivotal arm is attached. 7. The combination of claim 5, wherein the sub-mechanism includes additional arms pivotally mounted at ends of said pivotal arm. 8. The combination of claim 3, wherein the transport mechanism includes a carriage that moves the article support surface between the second support surface position and the processing location, said carriage including an opening for a mechanism to extend therethrough to move the article support surface between said first and second positions and be withdrawn below the carriage to allow its said lateral movement while the support surface rests thereon. 9. The combination of claim 3, wherein the transport mechanism includes a third position within the vacuum chamber for temporarily positioning articles while other articles are moved between the second support surface position and the processing location. 10. The combination of any one of claims 3-9, which comprises articles in the form of wedge shaped segments of a circular domed wafer carrier. 11. The combination of claim 10, wherein the wedge shaped segments are truncated along an edge opposite of a curved edge. 12. A mechanism for moving articles between a first position in a load lock chamber and a second position in an adjacent chamber that processes the articles, comprising: an arm mounted to pivot about a point intermediate of said first and second locations, a sub-mechanism cooperating with the pivot arm that moves articles to a position closer together than when positioned at the first and second locations, and a control of the movement of the arm and sub-mechanism which first causes the sub-mechanism to move articles from said first and second locations to said positions closer together, then causes the pivot arm to rotate substantially one-hundred eighty degrees about its pivot point and thereafter causes the sub-mechanism to move the articles from said positions closer together to the first and second locations, whereby the positions of the articles at the first and second locations are exchanged. 13. The mechanism of claim 12, wherein the sub-mechanism includes a swinging arm to which the axis of said pivot arm is attached. 14. The mechanism of claim 12, wherein the sub-mechanism includes additional arms pivotally mounted at ends of said pivot arm. 15. The mechanism of any one of claims 12-14, which comprises articles in the form of wedge shaped segments of a circular domed wafer carrier. 16. The mechanism of claim 15, wherein the wedge shaped segments are truncated along an edge opposite of a curved edge. 17. A carrier of integrated circuit wafers, comprising: a circular frame, a plurality of wedge shaped pieces supported on the frame to collectively form a domed surface across which wafers are positionable, and an carrying element attached to the individual wedge shaped pieces in a position such that the wedge shaped piece with wa