초록 ▼

The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated

The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated temperature sensing with temperature sensing devices such as resistance temperature detectors (RTDs). In general, the system provides a self-calibrated temperature sensing by the current-to-frequency converter providing a constant voltage sequentially to at least two calibration resistors and one or more RTDs using switches of low on-resistance in the multiplexer, which is controlled by the controller. The value of one of the reference resistors provided is correlate to the resistive value of the RTD at the minimum temperature of the operating temperature range for the processing equipment to be monitored, the value of another reference resistor provided is correlate to the resistive value of the RTD at the maximum temperature of the operating temperature range for the processing equipment, and the values of the remaining reference resistors, if provided, may correlate to the resistive values of the RTD at selected intermediate temperatures within the temperature range for the processing equipment. The frequency output by the current-to-frequency converter varies directly with current variation and thus inversely with the resistance of the individual calibration resistor or RTD. The controller determines-composite resistance for the calibration resistors and RTDs inclusive of the other component connecting the calibration resistors and RTDs to the current-to-frequency converter, from the frequencies output by the current-to-frequency converter. A calculation is performed using these resistances to determine an accurate self-calibrated temperature for the RTDs and the equipment to which it is associated. Further, the present invention provides the measurement system may be constructed so as to provide self-calibrated temperature measurements of one or more locations in a processing chamber which may operate within different temperature ranges or to provide self-calibrated temperature measurements of one or more a processing chambers. The present invention may also provide even more accurate self-calibrated temperature measurements by utilizing multiple reference resistors so as to provide piecewise linear calibration within the temperature operating range of the processing equipment.

대표청구항 ▼

The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated

The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated temperature sensing with temperature sensing devices such as resistance temperature detectors (RTDs). In general, the system provides a self-calibrated temperature sensing by the current-to-frequency converter providing a constant voltage sequentially to at least two calibration resistors and one or more RTDs using switches of low on-resistance in the multiplexer, which is controlled by the controller. The value of one of the reference resistors provided is correlate to the resistive value of the RTD at the minimum temperature of the operating temperature range for the processing equipment to be monitored, the value of another reference resistor provided is correlate to the resistive value of the RTD at the maximum temperature of the operating temperature range for the processing equipment, and the values of the remaining reference resistors, if provided, may correlate to the resistive values of the RTD at selected intermediate temperatures within the temperature range for the processing equipment. The frequency output by the current-to-frequency converter varies directly with current variation and thus inversely with the resistance of the individual calibration resistor or RTD. The controller determines-composite resistance for the calibration resistors and RTDs inclusive of the other component connecting the calibration resistors and RTDs to the current-to-frequency converter, from the frequencies output by the current-to-frequency converter. A calculation is performed using these resistances to determine an accurate self-calibrated temperature for the RTDs and the equipment to which it is associated. Further, the present invention provides the measurement system may be constructed so as to provide self-calibrated temperature measurements of one or more locations in a processing chamber which may operate within different temperature ranges or to provide self-calibrated temperature measurements of one or more a processing chambers. The present invention may also provide even more accurate self-calibrated temperature measurements by utilizing multiple reference resistors so as to provide piecewise linear calibration within the temperature operating range of the processing equipment. ight scattering pattern falls fully on the image surface without being wasted, so that a spatial light intensity distribution in an auxiliary scanning direction is uniformized. ight guide including a plurality of prisms for redirecting the light from the light source substantially perpendicular to a longitudinal axis of the light guide, the prisms being formed from a single sheet of material into an integral tube, each prism having an included angle that is substantially uniform along a peak of each prism, the included angle of each prism varying as a function of the distance from the light source. 17. The luminaire of claim 16 further comprising a plurality of prisms adjacent the light source that control the spreading of light along the longitudinal axis of the light guide. 18. The luminaire of claim 16 wherein the sheet of material includes bending grooves for forming a U-shaped tube. 19. The luminaire of claim 18 wherein the U-shaped tube includes a reflective surface on an inside, end surface. 20. The luminaire of claim 16 wherein the light guide includes polycarbonate or acrylic. 21. The luminaire of claim 16 wherein the plurality of prisms are molded, embossed, or cast into the light guide. 22. The luminaire of claim 16 wherein the included angle varies stepwise or continuously. 23. The luminaire of claim 16 wherein the plurality of prisms are formed on a top surface of the light guide and on a bottom surface of the light guide. 24. The luminaire of claim 16 wherein the plurality of prisms include linear prisms. 25. The luminaire of claim 24 wherein the linear prisms are saw-toothed, polygon-shaped, curved, or have curved tips or valleys. 26. The luminaire of claim 24 wherein the linear prisms include flats. 27. The luminaire of claim 16 further comprising a redirecting device adjacent the light source for redirecting light rays into the light guide. 28. The luminaire of claim 16 wherein the tube is U-shaped, rectangular-shaped, polygon-shaped, or triangular-shaped. 29. The luminaire of claim 16 wherein the light guide includes at least one curved portion. 30. A method of redirecting light comprising: providing a light source; redirecting light from the light source in a predetermined direction with a plurality of prisms, each prism having an included angle that is substantially uniform along a peak of each prism, the included angle of each prism varying as a function of the distance from the light source; and redirecting light from the light source toward the plurality of prisms. 31. The method of claim 30 wherein the prisms include linear prisms, further comprising the step of configuring the linear prisms to form a curve. 32. A luminaire comprising: a light source; a light guide that receives light radiating from the light source, the light guide being curved; and a plurality of prisms adjacent the light guide for redirecting the light from the light guide in a predetermined direction, each prism having an included angle that is substantially uniform along a longitudinal axis thereof, the included angle of each prism varying as a function of the distance from the light source. 33. The luminaire of claim 32 wherein the plurality of prisms include linear prisms. 34. The luminaire of claim 33 wherein the linear prisms are saw-toothed, polygon-shaped, curved, or have curved tips or valleys. 35. The luminaire of claim 33 wherein the linear prisms include flats.