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An environmental control system (ECS) includes an air cycle machine (ACM) subsystem that is in a heat exchange relationship with one or more liquid cycle subsystems. Compressed air which exits a compressor section of the ACM is communicated to a reheater and a condenser to further cool the water vap

An environmental control system (ECS) includes an air cycle machine (ACM) subsystem that is in a heat exchange relationship with one or more liquid cycle subsystems. Compressed air which exits a compressor section of the ACM is communicated to a reheater and a condenser to further cool the water vapor bearing air by condensing and separating the water into a water extractor. Dehumidified air exits the extractor and is communicated to an air-liquid heat exchanger to absorb a first heat load. The heated dehumidified air recovers thermal energy from the air-liquid heat exchanger and is expanded over a first turbine. The expanded air is communicated through the condenser and reheater such that the expanded air absorbs thermal energy therefrom. The recovered thermal energy in the expanded air then used by a second turbine to increase its efficiency. The expanded air from the second turbine is placed in the thermal exchange with a second air-liquid heat exchanger to absorb a second heat load.

대표청구항 ▼

An environmental control system (ECS) includes an air cycle machine (ACM) subsystem that is in a heat exchange relationship with one or more liquid cycle subsystems. Compressed air which exits a compressor section of the ACM is communicated to a reheater and a condenser to further cool the water vap

An environmental control system (ECS) includes an air cycle machine (ACM) subsystem that is in a heat exchange relationship with one or more liquid cycle subsystems. Compressed air which exits a compressor section of the ACM is communicated to a reheater and a condenser to further cool the water vapor bearing air by condensing and separating the water into a water extractor. Dehumidified air exits the extractor and is communicated to an air-liquid heat exchanger to absorb a first heat load. The heated dehumidified air recovers thermal energy from the air-liquid heat exchanger and is expanded over a first turbine. The expanded air is communicated through the condenser and reheater such that the expanded air absorbs thermal energy therefrom. The recovered thermal energy in the expanded air then used by a second turbine to increase its efficiency. The expanded air from the second turbine is placed in the thermal exchange with a second air-liquid heat exchanger to absorb a second heat load. linear motor, the reticle chamber being situated between the illumination-optical system and the projection-optical system and being made of a ferromagnetic material; a substrate chamber containing the substrate stage and its respective linear motor, the substrate chamber being situated downstream of the projection-optical system and being made of a ferromagnetic material; a first partition shield, made of a ferromagnetic material, situated in the reticle chamber between the respective linear motor and the CPB-column, the first partition shield defining a gap allowing unobstructed movement of the reticle stage through the gap; and a second partition shield, made of a ferromagnetic material, situated in the substrate chamber between the respective linear motor and the CPB column, the second partition shield defining a gap allowing unobstructed movement of the substrate stage through the gap. 2. The apparatus of claim 1, wherein each of the first and second partition shields comprises opposing lip portions having respective edges between which the respective gap is defined. 3. The apparatus of claim 1, wherein each partition shield is attached to an inside wall of the respective chamber by a non-magnetic fastener. 4. The apparatus of claim 1, wherein: each of the reticle and substrate stages extends in a respective X-Y plane that is perpendicular to a Z-axis; and each partition shield comprises a first portion extending in a respective X-Y plane on one side of the respective linear motor, and a second portion extending in a respective X-Y plane on an opposing side of the respective linear motor. 5. The apparatus of claim 4, wherein, with respect to each of the partition shields, the first and second portions are separately attached to respective inside walls of the respective chamber by a non-magnetic fastener. 6. The apparatus of claim 4, wherein, with respect to each of the partition shields: each of the first and second portions defines a respective lip portion; the lip portions are situated opposite each other in the X-direction; and the lip portions have respective edges between which the respective gap is defined. 7. The apparatus of claim 1, wherein: each of the partition shields comprises multiple sheet layers of ferromagnetic material; and between each pair of sheet layers of ferromagnetic material is a respective sheet layer of non-magnetic material. 8. The apparatus of claim 7, wherein, with respect to each of the partition shields: the sheet layer of ferromagnetic material situated closest to the CPB-column has a high relative permeability; and the sheet layer of ferromagnetic material situated closest to the respective linear motor has a relatively high saturation magnetic flux density. 9. A charged-particle-beam (CPB) microlithography apparatus, comprising: an illumination-optical system and projection-optical system contained within a CPB-column; a reticle stage configured to hold a reticle during microlithographic exposure, the reticle stage being actuated by a respective linear motor; a substrate stage configured to hold a substrate during microlithographic exposure, the substrate stage being actuated by a respective linear motor; a reticle chamber containing the reticle stage and its respective linear motor, the reticle chamber being situated between the illumination-optical system and the projection-optical system and being made of a ferromagnetic material; a substrate chamber containing the substrate stage and its respective linear motor, the substrate chamber being situated downstream of the projection-optical system and being made of a ferromagnetic material; and a coil individually situated relative to at least one of the reticle chamber and substrate chamber, the coil being configured to circulate a magnetic flux through the ferromagnetic material of the respective chamber. 10. The apparatus of claim 9, wherein each of the reticle chamber and substrate chamber incl