Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G21K-007/00
G01N-023/00
출원번호
US-0688223
(2000-10-16)
우선권정보
JP-0295698 (1999-10-18)
발명자
/ 주소
Okunuki, Masahiko
출원인 / 주소
Canon Kabushiki Kaisha
대리인 / 주소
Fitzpatrick, Cella, Harper & Scinto
인용정보
피인용 횟수 :
31인용 특허 :
2
초록▼
Each of a plurality of electrostatic lens has inner walls of a plurality of lens apertures, which are formed by an electrode laid out around each beam axis, and high-resistance portions which are bonded to the electrode and are laid out on two sides of the electrode in the beam axis direction, and a
Each of a plurality of electrostatic lens has inner walls of a plurality of lens apertures, which are formed by an electrode laid out around each beam axis, and high-resistance portions which are bonded to the electrode and are laid out on two sides of the electrode in the beam axis direction, and a low-resistance portion which is bonded to the high-resistance portions on a side opposite to the electrode in the beam axis direction.
대표청구항▼
Each of a plurality of electrostatic lens has inner walls of a plurality of lens apertures, which are formed by an electrode laid out around each beam axis, and high-resistance portions which are bonded to the electrode and are laid out on two sides of the electrode in the beam axis direction, and a
Each of a plurality of electrostatic lens has inner walls of a plurality of lens apertures, which are formed by an electrode laid out around each beam axis, and high-resistance portions which are bonded to the electrode and are laid out on two sides of the electrode in the beam axis direction, and a low-resistance portion which is bonded to the high-resistance portions on a side opposite to the electrode in the beam axis direction. t of 0.0003 to 0.005 mol with respect to one mol of carboxyl groups of the carboxylic acid, and separating a resultant ester, wherein the acid catalyst and the reducing agent are substantially removed from the resultant ester. 8. An ester lubricating base stock for automotive engine oil obtained by a process comprising: reacting a neopentyl polyol having 2 to 4 hydroxyl groups with a monocarboxylic acid having 5 to 12 carbon atoms in a presence of a Lewis acid catalyst in an amount of 0.00001 to 0.005 mol and a phosphorus-containing reducing agent in an amount of 0.0003 to 0.005 mol with respect to one mol of carboxyl groups of the carboxylic acid, and separating a resultant ester, wherein the acid catalyst and the reducing agent are substantially removed from the resultant ester. 9. A grease composition, wherein the composition comprises the ester lubricating base stock for grease of claim 6, a thickener, and an antioxidant, and wherein the ester lubricating base stock for grease is contained in a ratio of 10 to 90% by weight. 10. A working fluid composition for refrigerating machine oil comprising the ester lubricating base stock for refrigerating machine oil of claim 7 and a hydrofluorocarbon in a weight ratio of 10:90 to 90:10. 11. A composition for engine oil, wherein the composition comprises the ester lubricating base stock for automotive engine oil of claim 8, an anti-wear additive, and an antioxidant, and wherein the ester lubricating base stock for automotive engine oil is contained in a ratio of 5 to 95% by weight. 12. The method of claim 2, wherein the alcohol is a neopentyl polyol having 2 to 6 hydroxyl groups, and the carboxylic acid is a monocarboxylic acid having 5 to 10 carbon atoms. 13. The method of claim 2, wherein the alcohol is a neopentyl poiyoi having 2 to 4 hydroxyl groups, and the carboxylic acid is a monocarboxylic acid having 5 to 12 carbon atoms.
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이 특허에 인용된 특허 (2)
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