Method and apparatus for shielding a device from a semiconductor wafer process chamber
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
C23C-016/00
B01D-008/00
출원번호
US-0037997
(2001-11-09)
발명자
/ 주소
Brezoczky, Thomas B.
Schmieding, Randy
Kohara, Gene Y.
출원인 / 주소
Applied Materials, Inc.
대리인 / 주소
Moser, Patterson & Sheridan LLP
인용정보
피인용 횟수 :
7인용 특허 :
4
초록▼
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temperature of the apparatus is regulated by flowin
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temperature of the apparatus is regulated by flowing fluid through the passage.
대표청구항▼
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temperature of the apparatus is regulated by flowin
A method and apparatus for shielding a device, such as a pump, from a process chamber of a semiconductor wafer processing system. The apparatus comprises a shield connected to a mounting portion. The mounting portion has a fluid passage wherein the temperature of the apparatus is regulated by flowing fluid through the passage. claim 1, wherein the presence of said coating material is detected using a capacitive sensor. 16. The apparatus of claim 1, wherein the presence of said coating material is detected using a triboelectric flow monitor. 17. The apparatus of claim 1, wherein the process controller directs fasteners to be separated into at least three locations: a first location comprising purged fasteners which have not been coated and which may be recycled for processing; a second location comprising fasteners which fail to conform to said inspection criteria; and a third location for fasteners that meet said inspection criteria. 18. The apparatus of claim 1, wherein process heating is provided by an optical pyrometer. 19. The apparatus of claim 1, wherein the process controller provides a visual and/or audible signal indicating the presence of at least one of the following conditions: (1) a subsystem fault resulting in ceasation of processing; (2) a fault concerning said inspection criteria and allowing continued processing; and (3) normal processing conditions. 20. An apparatus to monitor and control the process of applying at least one coating material onto the threads of a fastener comprising: a coating applicator adapted to apply at least one coating material to the threads of a fastener; a process controller to confirm the availability of at least one subsystem from the group comprising: compressed air, parts feed, vacuum pressure for material reclamation, and coating material feed; said process controller adapted to perform the following operational sequence to begin fastener processing upon confirming the availability of said at least one subsystem: providing at least one control signal to activate the revolution of a dial and to begin purging fasteners, monitor for fastener movement on said dial, providing at least one control signal to activate process heat, providing at least one control signal to activate the application of coating material, and after purging a predetermined number of fasteners, providing at least one control signal to deactivate fastener purge; said process controller adapted to monitor the availability of said at least one subsystem during fastener processing and in the event of said subsystem becoming unavailable, said process controller provides a signal halting fastener processing; a machine vision system in communication with said process controller, said machine vision system adapted to monitor fasteners for conformance with predetermined inspection criteria, said predetermined inspection criteria comprising the number of threads on the fastener, the location of threads on the fastener, the orientation or pitch of the threads on the fastener, the amount of coating coverage on the fastener, and the location of coating on the fastener; said process controller upon detecting a fastener which fails to meet said inspection criteria provides a signal which causes the detected fastener to be directed to a preselected location while allowing fastener processing to continue. 21. The apparatus of claim 20, wherein fasteners are separated into at least three locations: a first location for purged fasteners, a second location for fasteners which fail to conform to said inspection criteria; and a third location for fasteners meeting said inspection criteria. 22. The apparatus of claim 20, wherein said process controller provides a signal halting fastener processing when the number of fasteners failing to meet said inspection criteria exceeds a predetermined number. 23. An apparatus to monitor and control the process of applying at least one coating material onto the threads of a fastener comprising: a coating applicator adapted to apply at least one coating material to the threads of a fastener; a process controller adapted to confirm the availability of the following subsystems upon activation of electrical power and prior to fastener processing: compressed air, parts feed, and vacuum pressure for ma
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이 특허에 인용된 특허 (4)
Moore Jerry H. (Palm Beach Gardens FL), Blade lock for a rotor disk and rotor blade assembly.
Huo David Datong ; Adams Bret W. ; Jarvis John,GBX, Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal.
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