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An improved, non-plasma, static method for removing accumulated films and solid residues from interior surfaces of processing chambers used in thermal or plasma CVD treatment processes. The method includes introducing a reactive substance into a processing chamber while adjusting the pressure within

An improved, non-plasma, static method for removing accumulated films and solid residues from interior surfaces of processing chambers used in thermal or plasma CVD treatment processes. The method includes introducing a reactive substance into a processing chamber while adjusting the pressure within the processing chamber to a predetermined level. The flow of the reactive substance into the processing chamber is terminated and the reactive substance is retained in the processing chamber to react with solid residues and form reaction products, following which the reaction products are subsequently removed from the processing chamber. Advantageously, terminating the flow of reactive substance into the processing chamber results in etching action that more effectively utilizes the cleaning agent and generates less hazardous materials.

대표청구항 ▼

An improved, non-plasma, static method for removing accumulated films and solid residues from interior surfaces of processing chambers used in thermal or plasma CVD treatment processes. The method includes introducing a reactive substance into a processing chamber while adjusting the pressure within

An improved, non-plasma, static method for removing accumulated films and solid residues from interior surfaces of processing chambers used in thermal or plasma CVD treatment processes. The method includes introducing a reactive substance into a processing chamber while adjusting the pressure within the processing chamber to a predetermined level. The flow of the reactive substance into the processing chamber is terminated and the reactive substance is retained in the processing chamber to react with solid residues and form reaction products, following which the reaction products are subsequently removed from the processing chamber. Advantageously, terminating the flow of reactive substance into the processing chamber results in etching action that more effectively utilizes the cleaning agent and generates less hazardous materials. iffering cross-sectional diameters, wherein a portion of said core more adjacent the distal end thereof than the proximal end thereof being wound to form a helical coil which tapers in diameter from a larger diameter end at the proximal end thereof to a smaller diameter end at the distal end thereof, at least the portion of said core forming said helical coil being made of a super-elastic deformable material, including a wrapped helical spring surrounding a longitudinally-extending portion of said core. 2. The medical device of claim 1, wherein said spring surrounds a major fraction of the overall length of said core. 3. The medical device of claim 1, wherein the distal and proximal ends of said spring are attached to said core. 4. The medical device of claim 1, wherein said spring includes a first spring portion surrounding a first longitudinally-extending portion of said core and a second spring surrounding a second longitudinally-extending portion of said core, said second longitudinally-extending portion including said helical coil, said portions being adjacent to one another, and adjacent ends of said spring portions being attached to each other and to said core in a region proximal of said helical coil. 5. The medical device of claim 4, wherein the first spring portion and said second spring portion comprise wires of different diameters. 6. The medical device of claim 1, wherein the spring comprises stainless steel. 7. The medical device of claim 1, wherein a layer of a polymeric material substantially covers the outer surface of said spring. 8. The medical device of claim 7, wherein the polymeric material comprises a fluorinated polymer. 9. The medical device of claim 8, wherein the fluorinated polymer is polytetrafluoroethylene. 10. The medical device of claim 3, wherein the distal and proximal ends of said spring are attached to said core by a weld or braze. 11. The medical device of claim 4, wherein the adjacent ends of said first and second spring sections are attached-to each other and to said core by an epoxy. 12. The medical device of claim 11, wherein the epoxy comprises epoxy which cures upon exposure to ultraviolet radiation. 13. A medical device comprising: a generally longitudinally-extending wire core having a shaped construction wherein the wire core contains at least one tapered portion and portions of differing cross-sectional diameters, wherein, a portion of said core more adjacent the distal end thereof than the proximal end thereof being wound to form a helical coil which tapers in diameter from a larger diameter end at the proximal end thereof to a smaller diameter end at the distal end thereof, at least the portion of said core forming said helical coil being made of a super-elastic deformable material; and, a pair of wrapped helical springs surrounding the wire core, one of said springs extending distally from a point adjacent the proximal end of said core, the other of said springs extending proximally from a point adjacent the distal end of said core to a point proximal to said helical coil, one end of one of said springs being connected to one end of the other of said springs and to said core, and the other end of each of said springs being connected to the core. 14. The medical device of claim 13, wherein a portion of the coil is covered with a radiopaque material.