초록 ▼

A pressure sensor is provided, in which dead space is not formed under the diaphragm so that air or fluid will not be remained in the dead space. The pressure sensor having a passage for flowing fluid from one end to the other end thereof comprises a sensor head having a pressure sensitive area resp

A pressure sensor is provided, in which dead space is not formed under the diaphragm so that air or fluid will not be remained in the dead space. The pressure sensor having a passage for flowing fluid from one end to the other end thereof comprises a sensor head having a pressure sensitive area responsive to the fluid pressure and a diaphragm having a pressure receiving surface for receiving the fluid pressure directly, wherein the pressure receiving surface is disposed so as to protrude to the inside of the passage, and the pressure sensitive area is disposed on the opposite surface from the pressure receiving surface of the diaphragm.

대표청구항 ▼

1. A pressure sensor having a passage for flowing fluid from one end to the other end thereof, comprising, a sensor head having a pressure sensitive area responsive to the fluid pressure, and, a diaphragm having a pressure receiving surface for receiving a fluid pressure directly, wherein said

1. A pressure sensor having a passage for flowing fluid from one end to the other end thereof, comprising, a sensor head having a pressure sensitive area responsive to the fluid pressure, and, a diaphragm having a pressure receiving surface for receiving a fluid pressure directly, wherein said pressure receiving surface is disposed so as to protrude into the inside of the passage and said pressure sensitive area is disposed on an opposite surface from the pressure receiving surface of the diaphragm. 2. The pressure sensor according to claim 1, wherein said sensor head is covered with the diaphragm. 3. The pressure sensor according to claim 2, wherein an air hole for escaping air near the sensor head to the outside is formed at said diaphragm. 4. The pressure sensor according to claim 1, wherein the fluid pressure in the passage is transmitted to said pressure sensitive area via said pressure receiving surface. 5. The pressure sensor according to claim 2, further comprising a conduit which constructs said passage. 6. The pressure sensor according to claim 5, further comprising a body which is integrally formed with said conduit. 7. The pressure sensor according to claim 6, wherein said body has a through bore which communicates with the passage, the through bore being adapted to receive said diaphragm and said sensor head. 8. The pressure sensor according to claim 5, wherein said conduit is connected to a piping for flowing a fluid at both ends thereof. 9. The pressure sensor according to claim 1, wherein said diaphragm is made of fluororesin. 10. The pressure sensor according to claim 1, wherein said diaphragm comprises a first portion for transmitting pressure applied to said pressure receiving surface, and a second portion for receiving at least a portion of said sensor head and sealing against fluid from said passage. 11. The pressure sensor according to claim 10, wherein said passage has a concave portion through which said first portion of said diaphragm projects and a said diaphragm second portion is shaped to seal said concave portion against fluid from said passage. 12. The pressure sensor according to claim 11, further comprising a sensor holder with a threaded surface, wherein said diaphragm second portion comprises a threaded portion for engaging the threaded portion on said sensor holder.