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Method and system for processing one or more microstructures of a multi-material device

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B23K-026/36
출원번호 US-0107028 (2002-03-27)
발명자 / 주소
  • Ehrmann, Jonathan S.
  • Cordingley, James J.
  • Smart, Donald V.
  • Svetkoff, Donald J.
출원인 / 주소
  • GSI Lumonics Corporation
대리인 / 주소
    Brooks Kushman P.C.
인용정보 피인용 횟수 : 36  인용 특허 : 17

초록

A method and system for processing at least one microstructure which is part of a multi-material device containing a plurality of microstructures is provided. The at least one microstructure has a designated region for target material removal. The method includes generating a laser beam, modifying t

대표청구항

A method and system for processing at least one microstructure which is part of a multi-material device containing a plurality of microstructures is provided. The at least one microstructure has a designated region for target material removal. The method includes generating a laser beam, modifying t

이 특허에 인용된 특허 (17)

  1. Geyer Frederick F. (Rochester NY), Apparatus for use in correcting beam anamorphicity by vector diffraction.
  2. Cordingley James J. ; Smart Donald V. ; Plotkin Michael ; Lauer William, Controlling laser polarization.
  3. Dickey Fred M. ; Holswade Scott C. ; Romero Louis A., Gaussian beam profile shaping apparatus, method therefor and evaluation thereof.
  4. Cahill Steven P. ; Hunter Bradley L., High-speed precision positioning apparatus.
  5. Amako Jun,JPX ; Murai Masami,JPX ; Ota Tsutomu,JPX ; Sonehara Tomio,JPX, Laser machining apparatus with rotatable phase grating.
  6. Smart Donald V., Laser processing.
  7. Tada Nobuhiko (Ushiku JPX) Miyanagi Naoki (Ibaraki-ken JPX) Shimomura Yoshiaki (Ibaraki-ken JPX) Sakurai Shigeyuki (Ibaraki-ken JPX) Nagano Yoshinari (Ibaraki-ken JPX), Lead frame fabricating method and lead frame fabricating apparatus.
  8. James Douglas J. (Ottawa CAX) Andrews Kenneth J. (Stettsville CAX) McKee Terrence J. (Nepean CAX), Marking of a workpiece by light energy.
  9. James H Morris ; Michael Powers ; Harry Rieger, Method and apparatus for laser ablation of a target material.
  10. Timothy Fillion ; Arkady Savikovsky ; Jonathan S. Ehrmann, Method and apparatus for shaping a laser-beam intensity profile by dithering.
  11. Veldkamp Wilfrid B. (Lexington MA), Method and apparatus for shaping electromagnetic beams.
  12. Ohtani Ryuji (Kadoma JPX) Okamoto Takeshi (Kadoma JPX) Nakamura Yoshimitsu (Kadoma JPX) Uchinono Yosiyuki (Kadoma JPX) Kamada Kazuo (Kadoma JPX) Nakashima Kunzi (Kadoma JPX) Suzuki Toshiyuki (Kadoma , Method for manufacturing printed circuit board.
  13. Cordingley James J. (Cumberland RI), Method for severing integrated-circuit connection paths by a phase-plate-adjusted laser beam.
  14. Sun Yunlong ; Swenson Edward J., Method of severing electrically conductive links with ultraviolet laser output.
  15. Adachi Yoshi (16214 Watson Cir. Westminster CA 92683), Superior resolution laser using bessel transform optical filter.
  16. Marshall John (Farnborough GB3) Raven Anthony L. (Royston GB3) Welford Walter T. (London GB3) Ness Karen M. M. (Royston GB3), Surface erosion using lasers.
  17. Sun Yunlong (Portland OR) Hutchens Craig D. (Portland OR), System and method for selectively laser processing a target structure of one or more materials of a multimaterial, multi.

이 특허를 인용한 특허 (36)

  1. Farrow, Roger L.; Kliner, Dahv A. V., Fiber source with cascaded gain stages and/or multimode delivery fiber with low splice loss.
  2. Kitai,Anton T.; Ehrmann,Jonathan S., Flexible scan field.
  3. Kitai,Anton; Ehrmann,Jonathan S, Flexible scan field.
  4. Ehrmann, Jonathan S.; Cordingley, James J.; Smart, Donald V.; Svetkoff, Donald J., High-speed, precision, laser-based method and system for processing material of one or more targets within a field.
  5. Ehrmann,Jonathan S.; Cordingley,James J.; Smart,Donald V.; Svetkoff,Donald J., High-speed, precision, laser-based method and system for processing material of one or more targets within a field.
  6. Lee, Jung-Min; Kang, Tae-Wook, Laser beam irradiation apparatus for substrate sealing, substrate sealing method, and method of manufacturing organic light emitting display device using the same.
  7. Oishi,Hirotada, Laser irradiation apparatus and method of manufacturing semiconductor device.
  8. Tanaka, Koichiro, Laser irradiation apparatus and method of manufacturing semiconductor device.
  9. Unrath, Mark A.; Berwick, Andrew; Myachin, Alexander A., Laser processing systems and methods for beam dithering and skiving.
  10. Gu,Bo; Ehrmann,Jonathan S.; Svetkoff,Donald J.; Cahill,Steven P.; Sullivan,Kevin E., Laser-based method and system for processing targeted surface material and article produced thereby.
  11. Gu, Bo; Smart, Donald V.; Cordingley, James J.; Lee, Joohan; Svetkoff, Donald J.; Johnson, Shepard D.; Ehrmann, Jonathan S., Laser-based method and system for removing one or more target link structures.
  12. Gu, Bo; Smart, Donald V.; Cordingley, James J.; Lee, Joohan; Svetkoff, Donald J.; Johnson, Shepard D.; Ehrmann, Jonathan S., Laser-based method and system for removing one or more target link structures.
  13. Ehrmann, Jonathan S.; Griffiths, Joseph J.; Cordingley, James J.; Svetkoff, Donald J.; Johnson, Shepard D.; Plotkin, Michael, Link processing with high speed beam deflection.
  14. Ehrmann,Jonathan S.; Cordingley,James J.; Smart,Donald V.; Svetkoff,Donald J., Method and apparatus for laser marking by ablation.
  15. Zhang, Haibin; Shan, Fang; Rekow, Mathew; Zhang, Min; Simenson, Glenn; Xu, Qian; Brookhyser, James; Frankel, Joe; Darwin, Michael; Rundel, Jack; Pysher, Matthew, Method and apparatus for separation of workpieces and articles produced thereby.
  16. Laskin, Alexander; Laskin, Vadim, Method and apparatus for shaping focused laser beams.
  17. Eck, Karl, Method and apparatus for the thermal treatment of a workpiece by means of a laser beam.
  18. Griffiths, Joseph J.; Pelsue, Kurt, Method and system for adaptively controlling a laser-based material processing process and method and system for qualifying same.
  19. Gu, Bo; Ehrmann, Jonathan S.; Lento, Joseph V.; Couch, Bruce L.; Chu, Yun Fee; Johnson, Shepard D., Method and system for high-speed precise laser trimming and scan lens for use therein.
  20. Gu, Bo; Ehrmann, Jonathan S.; Lento, Joseph V.; Couch, Bruce L.; Chu, Yun Fee; Johnson, Shepard D., Method and system for high-speed precise laser trimming and scan lens for use therein.
  21. Couch, Bruce L.; Ehrmann, Jonathan S.; Lento, Joseph V.; Johnson, Shepard D., Method and system for high-speed, precise micromachining an array of devices.
  22. Couch, Bruce L.; Erhmann, Jonathan S.; Chu, Yun Fee; Lento, Joseph V.; Johnson, Shepard D., Method and system for high-speed, precise micromachining an array of devices.
  23. Gu, Bo, Method and system for laser processing targets of different types on a workpiece.
  24. Gu, Bo, Method and system for laser processing targets of different types on a workpiece.
  25. Gu, Bo; Ehrmann, Jonathan S., Method and system for laser soft marking.
  26. Nemets, Christian; Woelki, Michael; Engineer, Amit V., Method and system for machine vision-based feature detection and mark verification in a workpiece or wafer marking system.
  27. Tanaka,Koichiro, Method of manufacturing semiconductor device.
  28. Hanks, D. Mitchel; Taugher, Lawrence N.; Colburn, Kevin L., Methods and apparatus for detecting and optimizing laser mark quality on recording media.
  29. Van Brocklin, Andrew L.; Hubby, Jr., Laurence M.; Anderson, Daryl E., Methods and apparatus for marking media with collimated electromagnetic radiation beam.
  30. Cordingley, James J.; Ehrmann, Jonathan S.; Filgas, David M.; Johnson, Shepard D.; Lee, Joohan; Smart, Donald V.; Svetkoff, Donald J., Methods and systems for thermal-based laser processing a multi-material device.
  31. Cordingley, James J.; Ehrmann, Jonathan S.; Filgas, David M.; Johnson, Shepard D.; Lee, Joohan; Smart, Donald V.; Svetkoff, Donald J., Methods and systems for thermal-based laser processing a multi-material device.
  32. Ehrmann,Jonathan S.; Kilgus,Donald B. T., Optical scanning method and system and method for correcting optical aberrations introduced into the system by a beam deflector.
  33. Kliner, Dahv A. V., Scalable high power fiber laser.
  34. Cordingley, James; Maltsev, Dimitry, Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use.
  35. Cordingley, James; Maltsev, Dimitry, Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use.
  36. Karlsen, Scott R.; Kennedy, Keith; Martinsen, Robert J., Thermal processing with line beams.
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