초록 ▼

A system/method for interactively monitoring and adjusting product output from a module that includes two or more preparation tools. The output is a result of the coordinated effort of the two or more semiconductor preparation tools making up the module. The first of the tools is capable of implemen

A system/method for interactively monitoring and adjusting product output from a module that includes two or more preparation tools. The output is a result of the coordinated effort of the two or more semiconductor preparation tools making up the module. The first of the tools is capable of implementing a first process on a semiconductor product and producing a first output. The second of the tools is configured to receive as input the first output from the first tool. The second tool is also capable of implementing a second process on the semiconductor product and producing a second output. A module control mechanism is capable of facilitating the exchange of information between the first tool and the second tool so that the module yields a desired semiconductor product output. Certain information can also be exchanged between the first and second tools. Other system/method embodiments for output/production control are also envisioned.

대표청구항 ▼

A system/method for interactively monitoring and adjusting product output from a module that includes two or more preparation tools. The output is a result of the coordinated effort of the two or more semiconductor preparation tools making up the module. The first of the tools is capable of implemen

A system/method for interactively monitoring and adjusting product output from a module that includes two or more preparation tools. The output is a result of the coordinated effort of the two or more semiconductor preparation tools making up the module. The first of the tools is capable of implementing a first process on a semiconductor product and producing a first output. The second of the tools is configured to receive as input the first output from the first tool. The second tool is also capable of implementing a second process on the semiconductor product and producing a second output. A module control mechanism is capable of facilitating the exchange of information between the first tool and the second tool so that the module yields a desired semiconductor product output. Certain information can also be exchanged between the first and second tools. Other system/method embodiments for output/production control are also envisioned. he top of the left ear, the top of the right ear and the nasal projection; fitting markers other than said reference frame to said subject; determining the coordinates of said markers on said image by using the coordinates of the markers in the real space and said corresponding relationship; and computing positional and orientational transformation between said subject and the image of said subject by using said markers. 27. A calibration method according to claim 26, wherein said markers have respective position detecting sensors. 28. A calibration method according to claim 26, wherein said markers are plural in number and only the markers having errors found within a predetermined range as detected in the real space are used to compute positional and orientational transformation between said subject and the image of said subject. 29. A calibration method according to claim 28, wherein said markers have respective position detecting sensors. 30. A method of computing positional and orientational transformation between a subject of medical treatment and a tom