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Clean box, clean transfer method and system 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B65G-049/07
출원번호 US-0473946 (1999-12-29)
우선권정보 JP-0124166 (1999-04-30); JP-0124167 (1999-04-30)
발명자 / 주소
  • Miyajima, Toshihiko
  • Okabe, Tsutomu
출원인 / 주소
  • TDK Corporation
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 12  인용 특허 : 21

초록

A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box body or the lid member for defining a suction space sealed between the lid member and the box body unde

대표청구항

A clean box is composed of a box body having an opening in one surface thereof and a lid member for closing the opening. An annular groove is formed so as to surround the opening on one of the box body or the lid member for defining a suction space sealed between the lid member and the box body unde

이 특허에 인용된 특허 (21)

  1. Hosoi Masato,JPX, Air-tightly sealable container with bell jar covering.
  2. Takahashi Tetsuo (Akita JPX) Miyauchi Eisaku (Akita JPX) Miyajima Toshihiko (Saku JPX) Watanabe Hideaki (Akita JPX), Apparatus for clean transfer of objects.
  3. Miyajima Toshihiko,JPX, Clean box, clean transfer method and apparatus therefor.
  4. Toshihiko Miyajima JP, Clean box, clean transfer method and apparatus therefor.
  5. Takahashi Tetsuo (Akita JPX) Miyauchi Eisaku (Akita JPX) Miyajima Toshihiko (Saku JPX), Clean transfer method and system therefor.
  6. Tsutomu Okabe JP; Toshihiko Miyajima JP; Hiroshi Igarashi JP, Container and method for sealing the container.
  7. Ludwig Joachim (Jena DEX), Device for transporting magazines for molding wafer-shaped objects.
  8. DeAngelis, Robert L.; Gallagher, Gary M., Gas purge system for isolation enclosure for contamination sensitive items.
  9. Kawano Hitoshi (Ise JPX) Yamashita Teppei (Ise JPX) Murata Masanao (Ise JPX) Tanaka Tsuyoshi (Ise JPX) Morita Teruya (Ise JPX) Okuno Atsushi (Ise JPX) Hayashi Mitsuhiro (Ise JPX) Nakamura Akio (Ise J, Gas purge unit for a portable container.
  10. Fosnight William J. ; Shenk Joshua W. ; Peterson Perry, Kinematic coupling compatible passive interface seal.
  11. Tsutomu Okabe JP; Hiroshi Igarashi JP, Lid latch mechanism for clean box.
  12. Williams Randall S. (Chaska MN) Cheesebrow Nicholas T. (St. Paul MN), Mechanical interface wafer container.
  13. Tanigawa Osamu,JPX, Method and apparatus for wafer processing.
  14. Roberson ; Jr. Glenn A. ; Genco Robert M. ; Eglinton Robert B. ; Comer Wayland ; Mundt Gregory K., Molecular contamination control system.
  15. Yamashita Teppei,JPX ; Murata Masanao,JPX ; Tanaka Tsuyoshi,JPX ; Kawano Hitoshi,JPX ; Morita Teruya,JPX, Portable closed container.
  16. Parikh Mihir (San Jose CA) Bonora Anthony C. (Menlo Park CA), Sealable transportable container having a particle filtering system.
  17. Bonora Anthony C. ; Rosenquist Frederick T. ; Jain Sudhir ; Davis Mark R., Sealable, transportable container having a breather assembly.
  18. Gentischer Josef (Weinbergweg 31 73630 Remshalden DEX), System for transferring substrates into clean rooms.
  19. Bonora Anthony C. ; Wartenbergh Robert P. ; Gomes Christopher, Two stage valve for charging and/or vacuum relief of pods.
  20. Miyajima Toshihiko,JPX, Vacuum clean box, clean transfer method and apparatus therefor.
  21. Justesen Jeffrey L. (219 Woodland Ave. Bloomfield CT 06002), Vacuum seal container.

이 특허를 인용한 특허 (12)

  1. Hsiao, Yi-Li; Yu, Chen-Hua; Wang, Jean; Hung, Jui-Pin; Yeh, Ming-Shih, Apparatus for storing substrates.
  2. Igarashi, Hiroshi; Miyajima, Toshihiko; Okabe, Tsutomu, Closed container and lid opening/closing system therefor.
  3. Okabe, Tsutomu; Miyajima, Toshihiko; Igarashi, Hiroshi, Closed container and lid opening/closing system therefor.
  4. Okabe, Tsutomu; Miyajima, Toshihiko; Igarashi, Hiroshi, Lid opening/closing system for closed container.
  5. Yoshimura, Takehiko; Nagata, Tatsuhiko; Seki, Masaru; Cho, Yoshinori, Load port.
  6. Fosnight, William; Waite, Stephanie, Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod.
  7. Rice, Michael Robert; Hudgens, Jeffrey C., Sealed substrate carriers and systems and methods for transporting substrates.
  8. Ikehata, Yoshiteru, Substrate storage facility and substrate processing facility, and method for operating substrate storage.
  9. Okabe, Tsutomu; Igarashi, Hiroshi, Substrate storage pod and lid member thereof, and processing apparatus for a substrate.
  10. Igarashi, Hiroshi; Miyajima, Toshihiko; Okabe, Tsutomu, Substrate storage pod and lid opening/closing system for the same.
  11. Okabe, Tsutomu; Miyajima, Toshihiko, Substrate storage pod with replacement function of clean gas.
  12. Okabe,Tsutomu; Igarashi,Hiroshi; Miyajima,Toshihiko, Wafer processing apparatus including clean box stopping mechanism.
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