초록 ▼

The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved micro

The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved microfluidic systems. The microfluidic systems provided according to the invention can include three-dimensionally arrayed networks of fluid flow paths therein including channels that cross over or under other channels of the network without physical intersection at the points of cross over. The microfluidic networks of the invention can be fabricated via replica molding processes, also provided by the invention, utilizing mold masters including surfaces having topological features formed by photolithography. The microfluidic networks of the invention are, in some cases, comprised of a single replica molded layer, and, in other cases, are comprised of two, three, or more replica molded layers that have been assembled to form the overall microfluidic network structure. The present invention also describes various novel applications for using the microfluidic network structures provided by the invention.

대표청구항 ▼

The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved micro

The present invention provides, in certain embodiments, improved microfluidic systems and methods for fabricating improved microfluidic systems, which contain one or more levels of microfluidic channels. The inventive methods can provide a convenient route to topologically complex and improved microfluidic systems. The microfluidic systems provided according to the invention can include three-dimensionally arrayed networks of fluid flow paths therein including channels that cross over or under other channels of the network without physical intersection at the points of cross over. The microfluidic networks of the invention can be fabricated via replica molding processes, also provided by the invention, utilizing mold masters including surfaces having topological features formed by photolithography. The microfluidic networks of the invention are, in some cases, comprised of a single replica molded layer, and, in other cases, are comprised of two, three, or more replica molded layers that have been assembled to form the overall microfluidic network structure. The present invention also describes various novel applications for using the microfluidic network structures provided by the invention. isposed behind the evaporation surface. 6. The apparatus of claim 1 in which varying a level of current applied through the first steering conductor relative to the second steering conductor shifts the magnetic field generated by the first conductor toward a long side of the cathode plate. 7. The apparatus of claim 5 in which a magnetic field generated by the first and second steering conductors confines a flow of plasma from the cathode plate to the substrate holder. 8. A vacuum arc coating apparatus comprising a rectangular cathode plate having opposed long sides and opposed short sides and connected to a negative pole of an arc current source, the cathode plate having an evaporation surface, a coating chamber defined by the evaporation surface and a housing, containing a substrate holder, at least one anode within the coating chamber spaced from the evaporation surface, connected to a positive pole of a current source, an arc igniter for igniting an arc between the cathode and the anode and generating an arc spot on the target evaporation surface, and a magnetic steering system comprising at least first and second steering conductors respectively arranged behind the evaporation surface along the short sides of the cathode plate, the first steering conductor carrying a current in a direction opposite to a direction of current in the second steering conductor the first and second steering conductors being electrically independent and being disposed in the vicinity of the evaporation surface so that a magnetic field generated thereby exerts a magnetic influence on the arc spot, wherein the magnetic fields generated by the steering conductors are oriented in the same direction in front of the evaporation surface such that a level of current through the first and second steering conductors can be varied independently to thereby direct are spots in a desired direction around the evaporation surface. 9. The arc coating apparatus of claim 8 in which the steering conductors are substantially linear. 10. The arc coating apparatus of claim 8 further comprising a magnetic focusing system comprising at least first and second substantially linear focusing conductors arranged in front of the evaporation surface along opposite long sides of the cathode plate, the focusing conductors carrying a current in opposite directions and being electrically independent of the steering conductors, wherein the magnetic fields generated by the focusing conductors direct plasma away from the evaporation surface. 11. The arc coating apparatus of claim 10 in which the focusing conductors are interconnected and form a single circuit with closing conductors arranged parallel to the short sides of the cathode plate. 12. The arc coating apparatus of claim 8 in which each steering conductor is a part of a coil having closing conductors oriented away from the cathode plate. 13. The arc coating apparatus of claim 10 in which the focusing conductors are electrically independent, whereby varying a level of current applied through the first focusing conductor relative to a current applied through the second focusing conductor shifts the plasma flow toward a long side of the cathode plate. 14. The arc coating apparatus of claim 13 in which each focusing conductor is a part of a coil having closing conductors oriented away from the cathode plate. 15. The arc coating apparatus of claim 12 in which a portion of the circuit closing conductors is oriented perpendicular to the cathode plate. 16. The arc coating apparatus of claim 14 in which a portion of the circuit closing conductors is oriented perpendicular to the cathode plate. 17. The arc coating apparatus of claim 8 in which steering conductors are provided only along the short sides of the cathode plate. 18. The arc coating apparatus of claim 10 in which focusing conductors are provided only along the long sides of the cathode plate. 19. The arc coating apparatus of claim 10 in which magnetic fields genera